المؤلفون: Jean-Marc Hauptmann

المساهمون: Société d'études allemandes

المصدر: Revue d’Allemagne et des pays de langue allemande 24(2-3):233-248

URL الوصول: https://www.persee.fr/doc/reval_0035-0974_1992_num_24_2_3593

المؤلفون: Seung-Woo Koo, Jung-Il Hwang, Hyun-Sok Kim, Rizvi Rahman, Kwang-Young Hu, Dong-Jin Lee, Min-Shik Kim, Raheleh Pishkari, In-Ho Joo, Dong-Hak Lee, Jae-Wuk Ju, Allwyn Boustheen, Ik-Hyun Jeong, Marc Hauptmann, Paul Böcker, Kang-San Lee, Kang-Min Lee, Cees Lambregts, Young-Sik Kim

المصدر: Metrology, Inspection, and Process Control for Microlithography XXXIV.

مصطلحات موضوعية: Front and back ends, Computer science, business.industry, Semiconductor device fabrication, Process control, Wafer, Overlay, business, Lithography, Dram, Computer hardware, Metrology

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a8882fbb7d4f4224fc01c899081e8b10
https://doi.org/10.1117/12.2552028

المؤلفون: Kou Weitian, Sangjun Han, Jaesun Woo, Honggoo Lee, Alexander Ypma, Junghwan Moon, Hank Han, Paul Böcker, Daan Slotboom, Marc Hauptmann, Hyun-Woo Yu, Michiel Kupers, Chang-Rock Song

المصدر: SPIE Proceedings.

مصطلحات موضوعية: business.industry, Computer science, Rework, ComputerApplications_COMPUTERSINOTHERSYSTEMS, 02 engineering and technology, Overlay, 021001 nanoscience & nanotechnology, 01 natural sciences, law.invention, Metrology, 010309 optics, Set (abstract data type), law, 0103 physical sciences, Electronic engineering, Wafer, Photolithography, 0210 nano-technology, business, Computer network

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::755f1205ad3b2ba7fe68cc625dc93e60
https://doi.org/10.1117/12.2259846

المؤلفون: Christiane Gottschalk, Herbert Struyf, Stefan De Gendt, Marc Heyns, Antoine Pacco, Marc Hauptmann, Elisabeth Camerotto, Steven Brems, Paul Mertens

المصدر: Solid State Phenomena. 195:177-180

مصطلحات موضوعية: Materials science, Bubble, Megasonic cleaning, Nanotechnology, Substrate (electronics), Mechanics, Condensed Matter Physics, Electrostatics, Atomic and Molecular Physics, and Optics, Sonoluminescence, Etching (microfabrication), Particle, General Materials Science, Wafer

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ab9c461fa23f61e9fd0332178f556d45
https://doi.org/10.4028/www.scientific.net/ssp.195.177

المؤلفون: Jelle Lurquin, Stefan De Gendt, Paul Mertens, Marc Hauptmann, Elisabeth Camerotto, Steven Brems, Herbert Struyf

المصدر: Solid State Phenomena. 195:173-176

مصطلحات موضوعية: Materials science, Bubble, Shear force, Megasonic cleaning, Nanotechnology, Mechanics, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surface tension, Cavitation, Particle, General Materials Science, Ultrasonic sensor, Wetting

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::342654bb783a92b514243f378b43e739
https://doi.org/10.4028/www.scientific.net/ssp.195.173

المؤلفون: Denis Shamiryan, Marc Heyns, Paul Mertens, Marc Hauptmann, Steven Brems, Elisabeth Camerotto, Stefan De Gendt

المصدر: Solid State Phenomena. 187:171-175

مصطلحات موضوعية: Materials science, Acoustics, Megasonic cleaning, Nucleation, Condensed Matter Physics, Sound power, Signal, Atomic and Molecular Physics, and Optics, Hysteresis, Transducer, Sonoluminescence, Cavitation, Forensic engineering, General Materials Science

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::48e406afdc0393d117de6e2853082276
https://doi.org/10.4028/www.scientific.net/ssp.187.171

المؤلفون: Marc Heyns, Steven Brems, Xiu Mei Xu, Marc Hauptmann, Elisabeth Camerotto, Stefan De Gendt, Paul Mertens

المصدر: Solid State Phenomena. 187:163-166

مصطلحات موضوعية: Materials science, business.industry, Ultrasound, Megasonic cleaning, Nanoparticle, Acoustic wave, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Acoustic streaming, Optics, Angle of incidence (optics), Particle, General Materials Science, Wafer, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9c82c1597a1f8a89db15f1a80379c63d
https://doi.org/10.4028/www.scientific.net/ssp.187.163

المؤلفون: Marc Heyns, Steven Brems, Paul Mertens, Walter Lauriks, Christ Glorieux, Stefan De Gendt, Elisabeth Camerotto, Marc Hauptmann

المصدر: Solid State Phenomena. 187:185-189

مصطلحات موضوعية: Materials science, business.industry, Bubble, Nucleation, Megasonic cleaning, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Schlieren imaging, Physics::Fluid Dynamics, Optics, Acoustic emission, Cavitation, Schlieren, General Materials Science, Liquid bubble, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::932da23dcdbafed4eb740971553037ed
https://doi.org/10.4028/www.scientific.net/ssp.187.185

المؤلفون: Diana Tsvetanova, Rita Vos, Steven Brems, Sophia Arnauts, Paul Mertens, Marc Heyns, Hiroaki Takahashi, Wada Masayuki, D. Cuypers, Marc Hauptmann, S. Sioncke, Nick Valckx

المصدر: ECS Transactions. 41:3-13

مصطلحات موضوعية: CMOS, Computer science, business.industry, Process engineering, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::46417e8765a0cc8b75ec2d36f9c575cb
https://doi.org/10.1149/1.3630820

المؤلفون: Marc Hauptmann, Lukas M. Eng, Johann W. Bartha, Katja Keil, Kang-Hoon Choi, Johannes Kretz

المصدر: Microelectronic Engineering. 86:2408-2411

مصطلحات موضوعية: 010302 applied physics, business.industry, Scanning electron microscope, Proximity effect (electron beam lithography), Chemistry, 02 engineering and technology, Electron, Photoresist, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Optics, Proximity effect correction, 0103 physical sciences, Electron beam processing, Electrical and Electronic Engineering, 0210 nano-technology, business, Electron-beam lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2cc45a0fa4a5e105e57868c7ffe691a9
https://doi.org/10.1016/j.mee.2009.05.002

المؤلفون: Paul Mertens, Stefan De Gendt, Herbert Struyf, Marc Heyns, Christ Glorieux, Marc Hauptmann, Steven Brems

المصدر: AIP Conference Proceedings.

مصطلحات موضوعية: Physics::Fluid Dynamics, Coalescence (physics), Sonoluminescence, Materials science, Nonlinear acoustics, Acoustics, Bubble, Cavitation, Megasonic cleaning, Ultrasonic sensor, Schlieren imaging

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::517a5290f2054f2b79e69a65d43d2eec
https://doi.org/10.1063/1.3703193

المؤلفون: Elisabeth Camerotto, Stefan De Gendt, Marc Hauptmann, Herbert Struyf, Paul Mertens, Steven Brems

المصدر: Proceedings of the 8th International Symposium on Cavitation.

مصطلحات موضوعية: Semiconductor industry, business.industry, Computer science, Optoelectronics, business, High frequency ultrasound

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c0b9dba7cd36d62fa780764b194b619f
https://doi.org/10.3850/978-981-07-2826-7_236

المؤلفون: Philipp Jaschinsky, Marc Hauptmann, Katja Keil, Kang-Hoon Choi, Manuela Gutsch, Christoph Hohle, Martin Freitag

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Point spread function, Optics, Optical proximity correction, Proximity effect (electron beam lithography), business.industry, Scattering, Chemistry, Electron, business, Electron scattering, Electron-beam lithography, Metrology

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e39d663cbdab73b6d5184ca7243ebbfc
https://doi.org/10.1117/12.864315

المؤلفون: Christoph Hohle, Arie Jeffrey Den Boef, Marc Hauptmann, Philipp Jaschinsky, Valeriano Ferreras Paz, Uwe Seifert, Johannes Kretz, Manfred Mört, Kang-Hoon Choi, Katja Keil, Laszlo Szikszai, F. Thrum

المصدر: Alternative Lithographic Technologies.

مصطلحات موضوعية: Fabrication, Materials science, Optics, Resist, business.industry, Surface finish, business, Critical dimension, Throughput (business), Lithography, Electron-beam lithography, Metrology

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::87ab78c6b2d2bbc1b8ef6ad2cd45cf71
https://doi.org/10.1117/12.814181

المؤلفون: Katja Keil, Johannes Kretz, Marc Hauptmann, Laurent Pain, Johann W. Bartha, Christophe Constancias

المساهمون: Publica

مصطلحات موضوعية: business.industry, Chemistry, Proximity effect (electron beam lithography), Surface finish, Condensed Matter Physics, Laser linewidth, Optics, Square root, Resist, Electrical and Electronic Engineering, business, Lithography, Electron-beam lithography, Gaussian beam

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6602bd74c532846e2e3f0452fdd52bfa
https://publica.fraunhofer.de/handle/publica/220487

المؤلفون: Lukas M. Eng, Marc Hauptmann, Jan Richter

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Yield (engineering), Scanning electron microscope, business.industry, Chemistry, chemistry.chemical_element, Electron, Secondary electrons, law.invention, Chromium, Optics, Resist, law, Optoelectronics, Photolithography, Photomask, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::85928dcebd27a42dca4bd2fa6623a8ac
https://doi.org/10.1117/12.793106

المؤلفون: Marc Hauptmann, Elisabeth Camerotto, Herbert Struyf, Paul Mertens, Stefan De Gendt, Steven Brems, Antoine Pacco

المصدر: Journal of Applied Physics. 112:114322

مصطلحات موضوعية: Surface tension, Materials science, Nonlinear acoustics, Pulmonary surfactant, Acoustics, Bubble, Cavitation, Megasonic cleaning, General Physics and Astronomy, Particle, Composite material, Sonochemistry

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c90e034db34cf8cc16b9a4205c254042
https://doi.org/10.1063/1.4768472