المؤلفون: Anuja De Silva, M. Ali, Madhana Sunder, Dario L. Goldfarb, Mark A. Stalter, Steven H. Boettcher, Jay Bunt, Christopher F. Robinson, G. Lian, M. Zaitz, Conor R. Thomas, Luciana Meli, Leo Tai, Yiping Yao, Jim Rosa, Cody Murray

المصدر: Extreme Ultraviolet (EUV) Lithography XI.

مصطلحات موضوعية: Scanner, Optics, Materials science, Resist, business.industry, Extreme ultraviolet lithography, Dose assessment, Wafer, Radiation, business, Effective dose (radiation), Reflectivity

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0cf247184f68177f013838db0dcf615e
https://doi.org/10.1117/12.2551612

المؤلفون: Luke C. Henson, Douglas S. McGregor, Kyle A. Nelson, Madhana Sunder, Philip B. Ugorowski, Michael A. Reichenberger, Benjamin W. Montag

المصدر: Journal of Electronic Materials. 46:4875-4882

مصطلحات موضوعية: 010302 applied physics, Materials science, chemistry.chemical_element, Germanium, 02 engineering and technology, Crystal structure, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Electronic, Optical and Magnetic Materials, Crystallography, Full width at half maximum, Lattice constant, chemistry, 0103 physical sciences, X-ray crystallography, Materials Chemistry, Electrical and Electronic Engineering, Ingot, 0210 nano-technology, Single crystal, Diffractometer

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6c7a1407d21c0ce30915d04ac61c1e10
https://doi.org/10.1007/s11664-017-5471-3

المؤلفون: Larry Palmer, Prabjit Singh, Eric J. Campbell, Madhana Sunder

المصدر: 2020 Pan Pacific Microelectronics Symposium (Pan Pacific).

مصطلحات موضوعية: Materials science, Metallurgy, food and beverages, chemistry.chemical_element, Sulfuric acid, Contamination, Copper, humanities, Corrosion, Electrochemical migration, Nickel, chemistry.chemical_compound, chemistry, Relative humidity, Solder mask

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0599b7f14a55305a0b3937280969cc16
https://doi.org/10.23919/panpacific48324.2020.9059398

المؤلفون: Benjamin W. Montag, Michael A. Reichenberger, Nathaniel S. Edwards, Philip B. Ugorowski, Madhana Sunder, Joseph Weeks, Douglas S. McGregor

المصدر: Journal of Crystal Growth. 438:99-103

مصطلحات موضوعية: 010302 applied physics, Inorganic Chemistry, 0103 physical sciences, Materials Chemistry, 02 engineering and technology, 021001 nanoscience & nanotechnology, 0210 nano-technology, Condensed Matter Physics, 01 natural sciences

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2d094f31ccb6a5f7e09fc577c1f71c6a
https://doi.org/10.1016/j.jcrysgro.2015.12.023

المؤلفون: Benjamin W. Montag, Michael A. Reichenberger, Madhana Sunder, Douglas S. McGregor, Joseph J. Weeks, Philip B. Ugorowski, Nathaniel S. Edwards

المصدر: Journal of Crystal Growth. 419:133-137

مصطلحات موضوعية: business.industry, Analytical chemistry, Condensed Matter Physics, Ampoule, Inorganic Chemistry, chemistry.chemical_compound, Crystallography, Semiconductor, chemistry, Impurity, Boron nitride, Ternary compound, Materials Chemistry, Sublimation (phase transition), Inductively coupled plasma, business, Stoichiometry

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ce8011f41a1025fa5421fc560c840ad3
https://doi.org/10.1016/j.jcrysgro.2015.03.002

المؤلفون: Philip B. Ugorowski, Kyle A. Nelson, Michael A. Reichenberger, Madhana Sunder, Douglas S. McGregor, Benjamin W. Montag

المصدر: Journal of Crystal Growth. 419:143-148

مصطلحات موضوعية: Materials science, Analytical chemistry, Condensed Matter Physics, Inorganic Chemistry, Crystallinity, chemistry.chemical_compound, Crystallography, Full width at half maximum, chemistry, Boron nitride, Impurity, X-ray crystallography, Materials Chemistry, Neutron detection, Ingot, Diffractometer

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8c1b0f1d3065119e9ee240ca35206517

المؤلفون: Benjamin W. Montag, Kyle A. Nelson, Michael A. Reichenberger, Madhana Sunder, Philip B. Ugorowski, Kevin R. Arpin, Douglas S. McGregor

المصدر: Journal of Crystal Growth. 412:103-108

مصطلحات موضوعية: Physics::Instrumentation and Detectors, Chemistry, Q value, business.industry, Analytical chemistry, Scintillator, Cubic crystal system, Condensed Matter Physics, Inorganic Chemistry, Crystallography, Semiconductor, Torr, Yield (chemistry), Materials Chemistry, Neutron detection, Photonics, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0e2e5e1ad8778f7566f1986c204b42f0

المؤلفون: Madhana Sunder, Shravan Matham, Anuja De Silva, Yiping Yao, Hao Truong, Abraham Arceo, Indira Seshadri, Yasir Sulehria, Ruqiang Bao, Heng Wu, Nelson Felix, Sivananda K. Kanakasabapathy, Kisup Chung, Brock Mendoza, Luciana Meli

المصدر: SPIE Proceedings.

مصطلحات موضوعية: 010302 applied physics, Materials science, Metal contamination, Nanotechnology, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, 0103 physical sciences, Electrical performance, Process window, Dry etching, 0210 nano-technology, Lithography, Scale down, Layer (electronics), Deposition (law)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::22e3e9c55551a3638db535479e95a21f
https://doi.org/10.1117/12.2258380

المؤلفون: Lakshmi Krishna, Madhana Sunder, Natee Tangtrakarn, P.D. Moran, Matthew Swanson

المصدر: Solid State Ionics. 189:45-49

مصطلحات موضوعية: Materials science, Doping, Ionic bonding, Ionic conductivity, General Materials Science, General Chemistry, Conductivity, Composite material, Thin film, Atmospheric temperature range, Condensed Matter Physics, Single crystal, Layer (electronics)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b2ddc5cca1e2c468e57127e292caf46f
https://doi.org/10.1016/j.ssi.2011.02.010

المؤلفون: Matthew Swanson, Madhana Sunder, Natee Tangtrakarn, P.D. Moran

المصدر: Solid State Ionics. 181:379-385

مصطلحات موضوعية: Van der Pauw method, Materials science, Analytical chemistry, Ionic conductivity, General Materials Science, Grain boundary, General Chemistry, Crystallite, Thin film, Atmospheric temperature range, Sputter deposition, Condensed Matter Physics, Single crystal

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b99911279055a1c3f1407de3f4d4f79a
https://doi.org/10.1016/j.ssi.2010.01.020

المؤلفون: Lakshmi Krishna, Madhana Sunder, P.D. Moran

المصدر: Journal of Electronic Materials. 39:132-137

مصطلحات موضوعية: Materials science, Analytical chemistry, Mineralogy, Substrate (electronics), Sputter deposition, Condensed Matter Physics, Epitaxy, Electronic, Optical and Magnetic Materials, Amorphous solid, Physical vapor deposition, Materials Chemistry, Sapphire, Electrical and Electronic Engineering, Thin film, Perovskite (structure)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2a3f6ee7afbc245639e3bdedfee81527
https://doi.org/10.1007/s11664-009-0945-6

المؤلفون: Madhana Sunder, P.D. Moran

المصدر: Journal of Electronic Materials. 38:1931-1937

مصطلحات موضوعية: Materials science, business.industry, Crystal growth, Sputter deposition, Condensed Matter Physics, Epitaxy, Electronic, Optical and Magnetic Materials, Orientation (vector space), Crystallography, Optics, Physical vapor deposition, Materials Chemistry, Perpendicular, Crystallite, Electrical and Electronic Engineering, Thin film, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::499bd450c24db9f42d73ec8ffe5453e5
https://doi.org/10.1007/s11664-009-0864-6

المؤلفون: Lakshmi Krishna, P.D. Moran, Daniel Seguin, Alexander Tatarenko, Madhana Sunder

المصدر: Journal of Crystal Growth. 311:3235-3238

مصطلحات موضوعية: Materials science, business.industry, Bilayer, Mineralogy, Heterojunction, Sputter deposition, Condensed Matter Physics, Epitaxy, Ferroelectricity, Amorphous solid, Inorganic Chemistry, Physical vapor deposition, Materials Chemistry, Optoelectronics, Thin film, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0a30599f393be890a17167ee5cd1cf78
https://doi.org/10.1016/j.jcrysgro.2009.03.020

المؤلفون: Nelson Felix, Luciana Meli, Shravan Matham, Heng Wu, Yiping Yao, Ruqiang Bao, Abraham Arceo, Sivananda K. Kanakasabapathy, Hoa Truong, Indira Seshadri, Kisup Chung, Brock Mendoza, Anuja De Silva, Madhana Sunder, Yasir Sulehria

المصدر: Journal of Micro/Nanolithography, MEMS, and MOEMS. 16:023504

مصطلحات موضوعية: Materials science, Mechanical Engineering, Nanotechnology, 02 engineering and technology, 010402 general chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, 0104 chemical sciences, Electronic, Optical and Magnetic Materials, law.invention, Atomic layer deposition, Etching (microfabrication), law, Process window, Dry etching, Electrical and Electronic Engineering, Thin film, Photolithography, 0210 nano-technology, Layer (electronics), Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0a94ec9e6018cdcd311e93498c599029
https://doi.org/10.1117/1.jmm.16.2.023504

المؤلفون: Madhana Sunder, Joseph J. Weeks, Nathaniel S. Edwards, Michael A. Reichenberger, Douglas S. McGregor, Philip B. Ugorowski, Benjamin W. Montag

المصدر: 2014 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC).

مصطلحات موضوعية: Materials science, business.industry, Analytical chemistry, Full width at half maximum, chemistry.chemical_compound, Crystallinity, Optics, chemistry, Impurity, Boron nitride, Neutron detection, Sublimation (phase transition), Inductively coupled plasma, business, Diffractometer

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f6f2ce287b3aca39a3c335c3f6bd8b2c
https://doi.org/10.1109/nssmic.2014.7431265