المؤلفون: Alireza Mohseni, Mohammad Amin Ebrahimzadeh, Amirsaman Bahramian, Esmail Pishbin

المصدر: Results in Engineering, Vol 25, Iss , Pp 103835- (2025)

مصطلحات موضوعية: Microvalves, Thermo-pneumatic microvalve, Micro-electromechanical systems (MEMS), Microfluidic device, Technology

وصف الملف: electronic resource

Relation: http://www.sciencedirect.com/science/article/pii/S2590123024020784; https://doaj.org/toc/2590-1230

URL الوصول: https://doaj.org/article/b453e421074c45d3832fee74c1ed64cc

المؤلفون: Matthew Benson, Ryan W. Parker, Melisa Ekin Gulseren, Juan Sebastian Gomez-Diaz

المصدر: IEEE Access, Vol 12, Pp 190120-190133 (2024)

مصطلحات موضوعية: Automation, characterization, infrared, micro-electromechanical systems (MEMS), metasurfaces, radiofrequency (RF), Electrical engineering. Electronics. Nuclear engineering, TK1-9971

وصف الملف: electronic resource

Relation: https://ieeexplore.ieee.org/document/10798116/; https://doaj.org/toc/2169-3536

URL الوصول: https://doaj.org/article/01ab5fa735e24a9daf441cb5a3c8d77c

المؤلفون: Zhengliang Fang, Stephanos Theodossiades, Amal Hajjaj

مصطلحات موضوعية: Acoustics, Micro-electromechanical systems (MEMS), Multi-sensing, Nonlinear dynamics, Electrostatic actuation, Weakly coupled resonators

Relation: 2134/25241761.v1; https://figshare.com/articles/conference_contribution/A_MEMS_triple_sensing_scheme_based_on_nonlinear_coupled_micromachined_resonators_Abstract_/25241761

الاتاحة: https://figshare.com/articles/conference_contribution/A_MEMS_triple_sensing_scheme_based_on_nonlinear_coupled_micromachined_resonators_Abstract_/25241761

المؤلفون: Zhengliang Fang, Stephanos Theodossiades, Amal Hajjaj

مصطلحات موضوعية: Engineering, Mathematical sciences, Acoustics, Micro-electromechanical systems (MEMS), Multi-sensing, Nonlinear dynamics, Electrostatic actuation, Weakly coupled resonators

Relation: 2134/25226732.v1; https://figshare.com/articles/journal_contribution/Triple_sensing_scheme_based_on_nonlinear_coupled_micromachined_resonators/25226732

الاتاحة: https://figshare.com/articles/journal_contribution/Triple_sensing_scheme_based_on_nonlinear_coupled_micromachined_resonators/25226732

المؤلفون: Last, Torben

المساهمون: Stemme, Göran, Professor, 1958, Roxhed, Niclas, Associate professor, Lehr, Claus-Michael, Dr.

المصدر: TRITA-EECS-AVL.

مصطلحات موضوعية: Portable Inhaler, Biopharmaceuticals, Soft-mist inhaler, Transport vesicles, Microfluidic packaging, High-pressure microfluidics, aerosolization, cleanroom-free fabrication, drug delivery, micro-electromechanical systems (MEMS), Applied Medical Technology, Tillämpad medicinsk teknik

وصف الملف: electronic

URL الوصول: https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-320164
https://kth.diva-portal.org/smash/get/diva2:1703858/FULLTEXT04.pdf

المؤلفون: Enrico, Alessandro

المساهمون: Stemme, Göran, 1958, Niklaus, Frank, 1971, Herland, Anna, Brugger, Jürgen, 1971

المصدر: TRITA-EECS-AVL.

مصطلحات موضوعية: Micro-electromechanical systems (MEMS), nanotechnology, nanowires, microfabrication, tissue engineering, crack-lithography, direct writing, femtosecond lasers, two-photon polymerization, 3D micromachining, cavitation molding, scalable optical patterning, 2D materials, surface structuring, bacterial-surface interaction., Electrical Engineering, Elektro- och systemteknik

وصف الملف: electronic

URL الوصول: https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-311503
https://kth.diva-portal.org/smash/get/diva2:1654893/SUMMARY01.pdf

المؤلفون: Ludovic Rapp, Steve Madden, Andrei V. Rode, Laurence J. Walsh, Heiko Spallek, Quan Nguyen, Van Dau, Peter Woodfield, Dzung Dao, Omar Zuaiter, Alaa Habeb, Timothy R. Hirst

المصدر: Frontiers in Dental Medicine, Vol 3 (2022)

مصطلحات موضوعية: ultrashort (femtosecond) laser pulses, dentistry, intraoral, micro-electromechanical systems (MEMS), dental treatment, robotic dentistry, Dentistry, RK1-715

وصف الملف: electronic resource

Relation: https://www.frontiersin.org/articles/10.3389/fdmed.2022.976097/full; https://doaj.org/toc/2673-4915

URL الوصول: https://doaj.org/article/47807bb6d57c4150a0fa67bdb5838889

المؤلفون: Esu, Ozak O.

مصطلحات موضوعية: 621.4, Condition monitoring, Wind energy, Micro Electromechanical Systems (MEMS) accelerometers, Vibration and modal analysis, Wind turbine blade, Energy harvesting, Energy management, Wireless communication, Piezoelectric sensors

URL الوصول: https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.689487

المؤلفون: Dinesh Rotake, Anand Darji, Nitin Kale

المصدر: Beilstein Journal of Nanotechnology, Vol 11, Iss 1, Pp 1242-1253 (2020)

مصطلحات موضوعية: biomems, heavy metal ions (hmis), limit of detection (lod), microcantilevers, microfluidics, micro-electromechanical systems (mems), piezoresistive sensors, sam (self-assembled monolayers), world health organization (who), Technology, Chemical technology, TP1-1185, Science, Physics, QC1-999

وصف الملف: electronic resource

Relation: https://doaj.org/toc/2190-4286

URL الوصول: https://doaj.org/article/827ee1cca9404d699006e7fd74a1a060

المؤلفون: Bedon, Chiara, Noè, Salvatore

المساهمون: Bedon, Chiara, Noè, Salvatore

مصطلحات موضوعية: slab, vibration, laminated glass (LG), body center of mass (CoM), micro electromechanical systems (MEMS) sensor, experiment, numerical modeling

وصف الملف: ELETTRONICO

Relation: info:eu-repo/semantics/altIdentifier/wos/WOS:000774856400001; volume:11; issue:1; firstpage:"-"; lastpage:"-"; numberofpages:19; journal:JOURNAL OF SENSOR AND ACTUATOR NETWORKS; http://hdl.handle.net/11368/3017071; info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-85124178848; https://www.mdpi.com/2224-2708/11/1/10

الاتاحة: http://hdl.handle.net/11368/3017071
https://doi.org/10.3390/jsan11010010
https://www.mdpi.com/2224-2708/11/1/10

المؤلفون: Azrak, Edy, Michaud, Laurent, Richy, Jérôme, Reinhardt, Alexandre, Tardif, Samuel, Eymery, Joël, Bousquet, Marie, Fournel, Frank, Montmeat, Pierre

المساهمون: Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Nanostructures et Rayonnement Synchrotron (NRS), Modélisation et Exploration des Matériaux (MEM), Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Fondamentale (CEA) (DRF (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes (UGA)-Institut de Recherche Interdisciplinaire de Grenoble (IRIG), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Grenoble Alpes (UGA)

المصدر: ISSN: 1616-301X.

مصطلحات موضوعية: aluminum nitride (AlN), micro-electromechanical systems (MEMS), polymer substrates, radio-frequency, strains, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], [SPI.MAT]Engineering Sciences [physics]/Materials, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics

الاتاحة: https://hal.science/hal-03883016
https://hal.science/hal-03883016v1/document
https://hal.science/hal-03883016v1/file/Adv%20Funct%20Materials%20-%202022%20-%20Azrak%20-%20Large%20Scale%20Integration%20of%20Functional%20Radio%E2%80%90Frequency%20Flexible%20MEMS%20under%20Large.pdf
https://doi.org/10.1002/adfm.202205404

المؤلفون: Juzheng Han, Dazhi Ding

المصدر: Micromachines; Volume 13; Issue 5; Pages: 786

مصطلحات موضوعية: microwave wave detection, micro-electromechanical systems (MEMS), phase shift measurement, thermoelectric sensor

وصف الملف: application/pdf

Relation: https://dx.doi.org/10.3390/mi13050786

الاتاحة: https://doi.org/10.3390/mi13050786

المؤلفون: de Milleri N., Valli L., Fueldner M., Wiesbauer A., Baschirotto A.

المساهمون: de Milleri, N, Valli, L, Fueldner, M, Wiesbauer, A, Baschirotto, A

مصطلحات موضوعية: Acoustic, audio, digital microphone, high signal-to-noise ratio (SNR), low noise, micro-electromechanical systems (MEMS) microphone, optical microphone, system-in-package (SiP)

وصف الملف: STAMPA

Relation: info:eu-repo/semantics/altIdentifier/wos/WOS:001230819300001; volume:59; issue:7; firstpage:2005; lastpage:2018; numberofpages:14; journal:IEEE JOURNAL OF SOLID-STATE CIRCUITS; https://hdl.handle.net/10281/511659; info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-85194050174

الاتاحة: https://hdl.handle.net/10281/511659
https://doi.org/10.1109/JSSC.2024.3396669

المؤلفون: Toscani A., Immovilli F., Pinardi D., Cattani L.

المساهمون: Toscani, A., Immovilli, F., Pinardi, D., Cattani, L.

مصطلحات موضوعية: Analog integrated electronics piezoelectric accelerometer, bearing fault detection, Data acquisition, data acquisition (DAQ) system, digital bu, industrial condition monitoring (CM), Machinery, micro electromechanical systems (MEMS) accelerometer, Micromechanical device, Monitoring, scalable architecture, Sensor system, Sensor, structural health monitoring (SHM), Wiring

Relation: info:eu-repo/semantics/altIdentifier/wos/WOS:001076407000001; volume:71; issue:7; firstpage:7975; lastpage:7985; journal:IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS; https://hdl.handle.net/11380/1330310; info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-85168283888

الاتاحة: https://hdl.handle.net/11380/1330310
https://doi.org/10.1109/TIE.2023.3301521

المؤلفون: M. Tahmasebipour, M. Modarres

المصدر: Iranian Journal of Electrical and Electronic Engineering, Vol 14, Iss 4, Pp 374-381 (2018)

مصطلحات موضوعية: Micro-Electromechanical Systems (MEMS), Force Microsensor, Piezoresistive, Finite Element, Von-Mises Stress., Electrical engineering. Electronics. Nuclear engineering, TK1-9971

وصف الملف: electronic resource

Relation: http://ijeee.iust.ac.ir/browse.php?a_code=A-10-2191-1&slc_lang=en&sid=1; https://doaj.org/toc/1735-2827; https://doaj.org/toc/2383-3890

URL الوصول: https://doaj.org/article/2020d0d8e669474197d5e0cbff5605b4

المؤلفون: Yung-Jr Hung, Yu-Ching Cheng, Meng-Syuan Cai, Chen-Han Lu, Hsiu-Wei Su

المصدر: IEEE Journal of the Electron Devices Society, Vol 6, Pp 135-138 (2018)

مصطلحات موضوعية: Complementary metal-oxide-semiconductor (CMOS), backside-illuminated photovoltaic device, localized substrate removal, micro-electromechanical systems (MEMS) process, Electrical engineering. Electronics. Nuclear engineering, TK1-9971

وصف الملف: electronic resource

Relation: https://ieeexplore.ieee.org/document/8231122/; https://doaj.org/toc/2168-6734

URL الوصول: https://doaj.org/article/59dd72c1e7644fa890e1da1d1ea5d8cf

المؤلفون: WANG ShuQin, WANG BiDou, LV DanHui, YANG Wei, SUN HaiXuan

المصدر: Jixie qiangdu, Vol 40, Pp 857-862 (2018)

مصطلحات موضوعية: Micro-electromechanical systems（MEMS）, Force sensor, Two-axis, Comb structure, Physical design, Mechanical engineering and machinery, TJ1-1570, Materials of engineering and construction. Mechanics of materials, TA401-492

وصف الملف: electronic resource

Relation: http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2018.04.016; https://doaj.org/toc/1001-9669

URL الوصول: https://doaj.org/article/625ad8fbe2864b13ab412c4f3ed24105

المؤلفون: Dorfmeister, Manuel, Kössl, Bernhard, Schneider, Michael, Pfusterschmied, Georg, Schmid, Ulrich

المساهمون: #PLACEHOLDER_PARENT_METADATA_VALUE#

مصطلحات موضوعية: piezoelectric, micro electromechanical systems (MEMS) membranes, aluminium nitride (AlN), bistability

Relation: Journal of Micromechanics and Microengineering; ASSIC; https://resolver.obvsg.at/urn:nbn:at:at-ubtuw:3-8741; http://hdl.handle.net/20.500.12708/818; AC15600051; urn:nbn:at:at-ubtuw:3-8741

الاتاحة: https://resolver.obvsg.at/urn:nbn:at:at-ubtuw:3-8741
https://hdl.handle.net/20.500.12708/818

المؤلفون: Cheng Tu, Joshua E.-Y. Lee, Xiao-Sheng Zhang

المصدر: Sensors; Volume 20; Issue 17; Pages: 4978

مصطلحات موضوعية: micro-electromechanical systems (MEMS), piezoelectric MEMS resonators, laterally vibrating resonators, quality factors, dissipation mechanisms, Q-enhancement strategies

وصف الملف: application/pdf

Relation: Electronic Sensors; https://dx.doi.org/10.3390/s20174978

الاتاحة: https://doi.org/10.3390/s20174978

المؤلفون: Giuseppe Ruzza, Luigi Guerriero, Paola Revellino, Francesco M. Guadagno

المصدر: Sensors; Volume 20; Issue 11; Pages: 3318

مصطلحات موضوعية: inclinometer, micro-electromechanical systems (MEMS), Arduino ®, inclination monitoring, landslides, continuous monitoring

وصف الملف: application/pdf

Relation: Physical Sensors; https://dx.doi.org/10.3390/s20113318

الاتاحة: https://doi.org/10.3390/s20113318