المؤلفون: Phongsakorn Thawornsathit, Ekachai Juntasaro, Hwanjit Rattanasonti, Putapon Pengpad, Karoon Saejok, Chana Leepattarapongpan, Ekalak Chaowicharat, Wutthinan Jeamsaksiri

المصدر: Micromachines; Volume 13; Issue 12; Pages: 2247

مصطلحات موضوعية: MEMS piezoresistive pressure sensor, groove, sensitivity, linearity, FEM

وصف الملف: application/pdf

Relation: https://dx.doi.org/10.3390/mi13122247

الاتاحة: https://doi.org/10.3390/mi13122247

المؤلفون: RoyChaudhuri, C., Datta, S K, Saha, H.

المصدر: International Journal on Smart Sensing and Intelligent Systems, 2(3), (2017-11-03)

مصطلحات موضوعية: Thermal effects, MEMS piezoresistive pressure sensor, dynamically linked library, CMOS MEMS integration

Relation: oai:zenodo.org:1147896

الاتاحة: https://doi.org/10.21307/ijssis-2017-359

المؤلفون: Chirasree RoyChaudhuri, Hiranmay Saha, S. K. Datta

المصدر: International Journal on Smart Sensing and Intelligent Systems, Vol 2, Iss 3 (2009)

مصطلحات موضوعية: Materials science, business.industry, lcsh:T, High resolution, MEMS piezoresistive pressure sensor, Pressure sensor, lcsh:Technology, Thermal effects, Cmos mems, dynamically linked library, Control and Systems Engineering, Thermal, lcsh:Technology (General), CMOS MEMS integration, Electronic engineering, Hardware_INTEGRATEDCIRCUITS, Optoelectronics, lcsh:T1-995, Electrical and Electronic Engineering, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::835b1fae40da9cd36fe7f4924367a0a6
https://zenodo.org/record/1147896