المؤلفون: Dias, R. A., Cretu, E., Wolffenbuttel, R. F., Rocha, Luís A.

المساهمون: Universidade do Minho

مصطلحات موضوعية: Squeeze-film damping, Air channels, MEMS capacitive sensing, Science & Technology

وصف الملف: application/pdf

Relation: 1877-7058; http://www.elsevier.com

الاتاحة: https://hdl.handle.net/1822/14701

المؤلفون: R.A. Dias, Luís A. Rocha, Reinoud F. Wolffenbuttel, Edmond Cretu

المساهمون: Universidade do Minho

المصدر: Procedia Engineering, 25, 2011

مصطلحات موضوعية: Microelectromechanical systems, 0303 health sciences, Engineering, Inertial frame of reference, Science & Technology, business.industry, Acoustics, 02 engineering and technology, General Medicine, MEMS capacitive sensing, 021001 nanoscience & nanotechnology, Capacitance, Air channels, Damper, 03 medical and health sciences, Control theory, Trajectory, Point (geometry), 0210 nano-technology, Reduction (mathematics), business, Damping torque, Squeeze-film damping, Engineering(all), 030304 developmental biology

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e546f223de30b8f0eb49017a8ab15f11

المؤلفون: Dias, R.A. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)

مصطلحات الفهرس: squeeze-film damping, air channels, MEMS capacitive sensing, journal article, Text

URL: http://resolver.tudelft.nl/uuid:ddfb078a-289b-4f02-8bab-56862dcf5768
Procedia Engineering, 25, 2011--1877-7058