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المؤلفون: J.-M. Chaix, C. Monget, F. Volpi, M. Vilmay, David Roy
المساهمون: STMicroelectronics [Crolles] (ST-CROLLES), Science et Ingénierie des Matériaux et Procédés (SIMaP), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut National Polytechnique de Grenoble (INPG)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)
المصدر: IEEE Transactions on Device and Materials Reliability
IEEE Transactions on Device and Materials Reliability, Institute of Electrical and Electronics Engineers, 2009, 9 (2), pp.120-127. ⟨10.1109/tdmr.2009.2020089⟩مصطلحات موضوعية: Materials science, Geometrical effect, 02 engineering and technology, Surface finish, Dielectric, Topology, 01 natural sciences, [SPI.MAT]Engineering Sciences [physics]/Materials, Reliability (semiconductor), 0103 physical sciences, Wafer, Electrical and Electronic Engineering, Safety, Risk, Reliability and Quality, roughness, 010302 applied physics, reliability, Dielectric strength, low-k dielectrics, High voltage, [CHIM.MATE]Chemical Sciences/Material chemistry, 021001 nanoscience & nanotechnology, Electronic, Optical and Magnetic Materials, microelectronics, Node (circuits), 0210 nano-technology, Voltage
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المؤلفون: Laurent-Luc Chapelon, K. Hamioud, Joaquim Torres, P. Brun, M. Vilmay, H. Chaabouni, G. Imbert, Alexis Farcy, M. Mellier
المساهمون: Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), Clot, Marielle
المصدر: Microelectronic Engineering
Microelectronic Engineering, Elsevier, 2008, pp.85 Issue: 10 (2008) 2098-2101
Microelectronic Engineering, 2008, pp.85 Issue: 10 (2008) 2098-2101مصطلحات موضوعية: Materials science, business.industry, Copper interconnect, Low-k dielectric, 02 engineering and technology, Dielectric, RC time constant, 010402 general chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Chemical-mechanical planarization, Optoelectronics, Electrical and Electronic Engineering, 0210 nano-technology, business, ComputingMilieux_MISCELLANEOUS, Delay time
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المؤلفون: David Roy, J.-M. Chaix, S. Blonkowski, M. Vilmay, F. Volpi
المصدر: 2009 IEEE International Integrated Reliability Workshop Final Report.
مصطلحات موضوعية: Permittivity, Interconnection, Materials science, business.industry, Electronic engineering, Optoelectronics, Dielectric, Activation energy, Trapping, business, Porous medium, Capacitance, Leakage (electronics)
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المؤلفون: Sylvain Maitrejean, J. Guillan, Vincent Jousseaume, Jonathan Pradelles, D. Galpin, Aziz Zenasni, Michel Haond, Olivier Gourhant, S. Manakli, Sonarith Chhun, K. Hamioud, M. Vilmay, E. Richard, G. Imbert, P. Brun, C. Monget, D. Barbier, B. Icard, Alexis Farcy, Vincent Arnal, C. Jayet, M. Assous
المصدر: 2009 IEEE International Interconnect Technology Conference.
مصطلحات موضوعية: Interconnection, Materials science, CMOS, business.industry, Electrical engineering, Copper interconnect, Optoelectronics, Node (circuits), Dielectric, business, Lithography, Capacitance, Electronic mail
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المؤلفون: Sébastien Petitdidier, J.-M. Chaix, M. Mellier, J. Guillan, Y. Le Friec, David Roy, G. Imbert, M. Vilmay, F. Volpi, P. Vannier, Lucile Arnaud, O. Robin, C. Besset, C. Monget, S. Chhun, D. Galpin
المصدر: 2009 IEEE International Interconnect Technology Conference.
مصطلحات موضوعية: Interconnection, Materials science, Dielectric reliability, Robustness (computer science), Chemical-mechanical planarization, Electronic engineering, Polishing, Dielectric, Capacitance, Engineering physics
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المؤلفون: M. Vilmay, P. Waltz, E. Petitprez, G. Imbert, E. Richard, S. Chhun, D. Galpin, L. Doyen, F. Terrier, C. Monget, Y. Le Friec, C. Besset, David Roy, Lucile Arnaud
المصدر: 2009 IEEE International Interconnect Technology Conference.
مصطلحات موضوعية: Interconnection, Materials science, CMOS, Robustness (computer science), Process integration, Electronic engineering, Dielectric, Electromigration, Scaling
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المؤلفون: M. Vilmay, C. Monget, David Roy, F. Volpi, J.-M. Chaix
المصدر: 2009 IEEE International Reliability Physics Symposium.
مصطلحات موضوعية: Materials science, Reliability (semiconductor), Dielectric strength, business.industry, Microelectronics, Time-dependent gate oxide breakdown, Topology (electrical circuits), Node (circuits), Dielectric, business, Topology, Line (electrical engineering)
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المؤلفون: F. Volpi, M. Vilmay, David Roy, C. Monget, J.-M. Chaix
المصدر: 2008 IEEE International Integrated Reliability Workshop Final Report.
مصطلحات موضوعية: Materials science, Dielectric strength, chemistry, business.industry, Electronic engineering, Optoelectronics, Breakdown voltage, chemistry.chemical_element, Low-k dielectric, Dielectric, business, Copper
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المؤلفون: Pierre Descouvemont, V. Tatischeff, P. Roussel, S. Fortier, D. Beaumel, L. Audouin, M. Vilmay, J. Kiener, M. G. Pellegriti, F. Hammache, L. Gaudefroy, M. Stanoiu, A. Lefebvre-Schuhl
المصدر: Physical Review C. 77
مصطلحات موضوعية: Physics, Nuclear reaction, Oxygen-17, Nuclear and High Energy Physics, 010308 nuclear & particles physics, Neutron emission, Isotopes of lithium, Alpha particle, 01 natural sciences, 7. Clean energy, Reaction rate, 0103 physical sciences, Atomic physics, Nuclear Experiment, 010306 general physics, s-process, Oxygen-16
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المؤلفون: F. Volpi, M. Vilmay, J. M. Chaix, David Roy
المساهمون: Science et Ingénierie des Matériaux et Procédés (SIMaP), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut National Polytechnique de Grenoble (INPG)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)
المصدر: Microelectronic Engineering
Materials for Advanced Metallization Conference (MAM 2008)
Materials for Advanced Metallization Conference (MAM 2008), 2008, Dresden, Germany. pp.2075-2078مصطلحات موضوعية: 02 engineering and technology, Dielectric, Trapping, 01 natural sciences, Poole–Frenkel effect, 0103 physical sciences, Band diagram, Microelectronics, [SPI.GPROC]Engineering Sciences [physics]/Chemical and Process Engineering, Electrical and Electronic Engineering, ComputingMilieux_MISCELLANEOUS, Leakage (electronics), 010302 applied physics, Condensed matter physics, Chemistry, business.industry, Low-k dielectric, [CHIM.MATE]Chemical Sciences/Material chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Thermal conduction, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, 0210 nano-technology, business
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المؤلفون: J. F. Clavelin, L. Sagui, S. Franchoo, N. de Séréville, M. Ferraton, M. Lebois, C. Phan Viet, M. Vilmay, C. M. Petrache, I. Stefan, D. Verney, R. Bourgain, F. Ibrahim
المساهمون: Institut de Physique Nucléaire d'Orsay (IPNO), Centre National de la Recherche Scientifique (CNRS)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Université Paris-Sud - Paris 11 (UP11)
المصدر: European Physical Journal A
European Physical Journal A, EDP Sciences, 2008, 35, pp.167-170. ⟨10.1140/epja/i2007-10534-y⟩مصطلحات موضوعية: Physics, Nuclear and High Energy Physics, 010308 nuclear & particles physics, 0103 physical sciences, Hadron, Quasiparticle, Nuclear fusion, 27.60.+j, 21.60.-n, 21.10.Tg, Atomic physics, [PHYS.NEXP]Physics [physics]/Nuclear Experiment [nucl-ex], 010306 general physics, 01 natural sciences
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المؤلفون: P. Brun, G. Imbert, Nicolas Jourdan, Vincent Jousseaume, Y. Le-Friec, K. Hamioud, A. Zenasni, M. Mellier, Vincent Delaye, L.L. Chapelon, Laurent Favennec, M. Vilmay, Didier Louis, H. Chaabouni, T. Vanypre, Joaquim Torres, P. Maury, F. Volpi, Alexis Farcy, Gérard Passemard, M. Aimadeddine, V. Amal, S. Jullian, M. Assous
المساهمون: Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Laboratoire des technologies de la microélectronique (LTM), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Clot, Marielle
المصدر: Proceedings of the IEEE 2007 International Interconnect Technology Conference
Proceedings of the IEEE 2007 International Interconnect Technology Conference, 2007, pp.175-177مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Electrical engineering, 02 engineering and technology, Dielectric, 021001 nanoscience & nanotechnology, 01 natural sciences, Capacitance, CMOS, 0103 physical sciences, Trench, Optoelectronics, Barrier integrity, 0210 nano-technology, business, Porous medium, ComputingMilieux_MISCELLANEOUS, Hard mask, Leakage (electronics)
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المؤلفون: P. Roussel, L. Gaudefroy, A. Lefebvre-Schuhl, M. Vilmay, M. G. Pellegriti, S. Fortier, Vincent Tatischeff, F. Hammache, M. Stanoiu, Didier Beaumel, J. Kiener, L. Audouin
مصطلحات موضوعية: Astrophysics and Astronomy, Chemistry, Physical chemistry, Alpha (ethology)
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المؤلفون: P. Edelbruck, Ch. Houarner, D. Beaumel, A. Gillibert, A. Richard, L. Nalpas, V. Le Ven, B. Paul, P. Baron, P. Roussel-Chomaz, A. Boujrad, L. Lavergne, M. Wittwer, Y. Blumenfeld, E. Becheva, M. Rouger, E. Wanlin, E. C. Pollacco, L. Olivier, F. Druillole, V. Lapoux, M. Tripon, J. P. Baronick, A. Drouart, F. Lugiez, M. Vilmay, G. Leberthe, M. Gelin, E. Atkin, B. Raine, F. Skaza, F. Saillant, L. Leterrier
المساهمون: Institut de Physique Nucléaire d'Orsay (IPNO), Université Paris-Sud - Paris 11 (UP11)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), Grand Accélérateur National d'Ions Lourds (GANIL), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)-Centre National de la Recherche Scientifique (CNRS), C. Gross, W. Nazarewicz, K. Rykaczewski, Centre National de la Recherche Scientifique (CNRS)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Institut National de Physique Nucléaire et de Physique des Particules du CNRS (IN2P3)
المصدر: The 4th International Conference on Exotic Nuclei and Atomic Masses ISBN: 9783540284413
Fourth International Conference on Exotic Nuclei and Atomic Masses (ENAM'04)
Fourth International Conference on Exotic Nuclei and Atomic Masses (ENAM'04), Sep 2004, Pine Mountain, United States. pp.287-288, ⟨10.1140/epjad/i2005-06-162-5⟩مصطلحات موضوعية: Physics, Nuclear and High Energy Physics, Inverse kinematics, 010308 nuclear & particles physics, 29.30.Ep, 29.40.Wk, 29.40.Gx, 25.60.-t, Hadron, Alpha (navigation), [PHYS.NEXP]Physics [physics]/Nuclear Experiment [nucl-ex], Charged-particle spectroscopy, 01 natural sciences, law.invention, Nuclear physics, Telescope, Reactions induced by unstable nuclei, law, Tracking and position-sensitive detectors, 0103 physical sciences, Solid-state detectors, Nuclear fusion, Direct reaction, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det], Nuclear Experiment, 010306 general physics