المؤلفون: A. M. Goethals, D. Van Heuvel, F. Van Roey, K. Rose, M. Ercken, R. Gronheid, S. Light, S. Locorotondo

المصدر: Journal of Photopolymer Science and Technology. 2004, 17(4):655

المؤلفون: G. Vandenberghe, K. Ronse, M. Ercken, M. Meanhoudt, P. Leunissen, S. Cheng

المصدر: Journal of Photopolymer Science and Technology. 2005, 18(5):571

المؤلفون: C. Baerts, C. Delvaux, E. Tenaglia, H. W. Kim, I. Pollentier, M. Ercken, M. Moelants, N. Stepenenko, P. Foubert, R. Gronheid, S. Kishimura, T. Vandeweyer

المصدر: Journal of Photopolymer Science and Technology. 2006, 19(4):539

المؤلفون: A.M. Goethals, G. Vandenberghe, I. Pollentier, K. Ronse, M. Ercken, M. Maenhoudt, P. de Bisschop

المصدر: Journal of Photopolymer Science and Technology. 2001, 14(3):333

المؤلفون: Philippe Leray, N. Jourdan, O. Varela Pedreira, E. Dentoni-Litta, Thomas Witters, Werner Gillijns, Nancy Heylen, L. Ramakers, E. Grieten, Zaid El-Mekki, Gayle Murdoch, V. Vega-Gonzalez, Anne-Laure Charley, Ivan Ciofi, Zsolt Tokei, H. Vats, S. V. Gompel, M. H. van der Veen, L. Halipre, J. Swerts, A. Haider, Bilal Chehab, S. Park, N. Bazzazian, Quoc Toan Le, B. De Wachter, T. Peissker, Harinarayanan Puliyalil, Naoto Horiguchi, Miroslav Cupak, J. Versluijs, G. T. Martinez, Y. Kimura, R. Kim, J. Geypen, J. Uk-Lee, N. Nagesh, D. Montero, L. Rynders, M. Ercken, D. Batuk, K. Croes, Patrick Verdonck, Manoj Jaysankar, Y. Drissi, T. Webers

المصدر: 2021 IEEE International Interconnect Technology Conference (IITC).

مصطلحات موضوعية: chemistry.chemical_compound, Atomic layer deposition, Materials science, chemistry, Analytical chemistry, Nucleation, chemistry.chemical_element, Chemical vapor deposition, Tin, Cobalt, Layer (electronics), Titanium nitride, Titanium oxide

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::775097fabe7d875876eeac9844668bb1
https://doi.org/10.1109/iitc51362.2021.9537535

المؤلفون: Zaid El-Mekki, F. Schleicher, Frederic Lazzarino, D. Trivkovic, Zsolt Tokei, B. De-Wachter, S. V. Gompel, L. Halipre, E. Vancoille, S. Decoster, G. Muroch, Thomas Witters, L. Dupas, O. Varela-Pereira, B. Briggs, Quoc Toan Le, Harinarayanan Puliyalil, Christopher J. Wilson, Philippe Leray, N. Jourdan, I. Demonie, C. Lorant, Joost Bekaert, Nancy Heylen, Y. Kimura, Rogier Baert, M. H. van der Veen, J. Versluijs, Miroslav Cupak, Patrick Verdonck, K. Croes, Manoj Jaysankar, Anne-Laure Charley, J. Heijlen, J. Uk-Lee, Ivan Ciofi, Y. Drissi, V. Vega-Gonzalez, S. Paolillo, H. Vats, D. Montero, L. Rynders, Els Kesters, M. Ercken, A. Lesniewska, R. Kim, Lieve Teugels, T. Webers

المصدر: 2020 IEEE International Electron Devices Meeting (IEDM).

مصطلحات موضوعية: Thermal shock, Reliability (semiconductor), Materials science, chemistry, Process integration, Analytical chemistry, chemistry.chemical_element, Time-dependent gate oxide breakdown, Dielectric, Tin, Ruthenium

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9d5b5a73112c7be6f5016d4aa4c44eb7
https://doi.org/10.1109/iedm13553.2020.9372096

المؤلفون: Nancy Heylen, K. Croes, Rogier Baert, S. Park, Geoffrey Pourtois, Jean-Philippe Soulie, Katia Devriendt, Christopher J. Wilson, Ming Mao, Q-T. Le, V. Blanco, Gayle Murdoch, Herbert Struyf, Anshul Gupta, V. Vega, Lieve Teugels, S. Paolillo, N. Jourdan, Kiroubanand Sankaran, J. Sweerts, Ivan Ciofi, S. Decoster, P. Morin, Els Kesters, Juergen Boemmels, Frederic Lazzarino, Zs. Tokei, Christoph Adelmann, M. H. van der Veen, M. Ercken, Kris Vanstreels, S. Van Elshocht, M. O'Toole, J. Versluijs, M. H. Na, Frank Holsteyns, Houman Zahedmanesh

المصدر: 2020 IEEE International Electron Devices Meeting (IEDM).

مصطلحات موضوعية: Interconnection, Computer science, Order (business), Inflection point, Electronic engineering, Electric potential, Electrical conductor, Bottleneck, Conductor

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f3b4b449b819b2556b63b50762bf16b9
https://doi.org/10.1109/iedm13553.2020.9371903

المؤلفون: V. Vega-Gonzalez, J. Bekaert, E. Kesters, Q. T. Le, C. Lorant, O. Varela P., L. Teugels, N. Heylen, Z. El-Mekki, M. van der Veen, T. Webers, C. J. Wilson, H. Vats, L. Rynders, M. Cupak, J. Uk-Lee, Y. Drissi, L. Halipre, A.-L. Charley, P. Verdonck, T. Witters, S. V. Gompel, B. Briggs, Y. Kimura, N. Jourdan, I. Ciofi, A. Gupta, A. Contino, G. Boccardi, S. Lariviere, L. Dupas, B. De-Wachter, E. Vancoille, S. Decoster, F. Lazzarino, M Ercken, P. Debacker, R. Kim, D. Trivkovic, K. Croes, P. Leray, L. Dillemans, Y.-F. Chen, Z. Tokei, J. Versluijs, A. Lesniewska, S. Paolillo, R. Baert, H. Puliyalil

المصدر: 2019 IEEE International Electron Devices Meeting (IEDM).

مصطلحات موضوعية: 010302 applied physics, Chamfer, Materials science, business.industry, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Electromigration, Modulation, 0103 physical sciences, Process integration, Optoelectronics, Node (circuits), Static random-access memory, Place and route, 0210 nano-technology, business, Block (data storage)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7eecb12b8a386042eac7e3255fe54876
https://doi.org/10.1109/iedm19573.2019.8993538

المؤلفون: Victor Blanco, Gayle Murdoch, S. Paolillo, Danny Wan, Christoph Adelmann, Bogumila Kutrzeba Kotowska, Nouredine Rassoul, Frederic Lazzarino, Christopher J. Wilson, Jürgen Bömmels, Zsolt Tokei, M. Ercken

المصدر: 2018 IEEE International Interconnect Technology Conference (IITC).

مصطلحات موضوعية: 010302 applied physics, Interconnection, Materials science, Annealing (metallurgy), business.industry, Extreme ultraviolet lithography, Copper interconnect, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Copper, Ruthenium, chemistry, Electrical resistivity and conductivity, 0103 physical sciences, Optoelectronics, 0210 nano-technology, business, Critical dimension

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::87ff871b8552326059f2788385084bb2
https://doi.org/10.1109/iitc.2018.8454841

المؤلفون: E. Dentoni Litta, R. Ritzenthaler, T. Schram, A. Spessot, B. O'Sullivan, Y. Ji, G. Mannaert, C. Lorant, F. Sebaai, A. Thiam, M. Ercken, S. Demuynck, N. Horiguchi

المصدر: Extended Abstracts of the 2017 International Conference on Solid State Devices and Materials.

مصطلحات موضوعية: Materials science, CMOS, business.industry, law, Transistor, Optoelectronics, Diffusion (business), business, Dram, AND gate, High-κ dielectric, law.invention

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9ad113f1a8aff2d01c775534795d762d
https://doi.org/10.7567/ssdm.2017.k-4-02

المؤلفون: Adrien Vaysset, Eline Raymenants, Khashayar Babaei Gavan, Iuliana Radu, Kristof Paredis, Danny Wan, Cedric Huyghebaert, Dan Mocuta, A. Thiam, Christopher J. Wilson, Johan Swerts, Nouredine Rassoul, J. Jussot, Lennaert Wouters, Safak Sayan, Mauricio Manfrini, Sebastien Couet, M. Ercken, Laurent Souriau

مصطلحات موضوعية: Materials science, Fabrication, Physics and Astronomy (miscellaneous), General Physics and Astronomy, FOS: Physical sciences, 02 engineering and technology, Applied Physics (physics.app-ph), 01 natural sciences, 0103 physical sciences, Torque, Spin-½, 010302 applied physics, Interconnection, Condensed Matter - Materials Science, business.industry, General Engineering, Spin-transfer torque, Materials Science (cond-mat.mtrl-sci), Physics - Applied Physics, 021001 nanoscience & nanotechnology, Domain wall (magnetism), Ferromagnetism, Optoelectronics, 0210 nano-technology, business, Realization (systems)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7f482f0293f383448c4a4e167788300c

المؤلفون: Erik Rosseel, Julien Ryckaert, E. Vecchio, W. Li, Philippe Matagne, Katia Devriendt, M. Ercken, J. Versluijs, Anabela Veloso, Stephan Brus, C. Delvaux, Z. Tao, Vasile Paraschiv, Nadine Collaert, Boon Teik Chan, Dan Mocuta, Niamh Waldron, Efrain Altamirano-Sanchez, T. Huynh-Bao

المصدر: 2016 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S).

مصطلحات موضوعية: 010302 applied physics, Engineering, Hardware_MEMORYSTRUCTURES, business.industry, Circuit design, Transistor, Electrical engineering, Hardware_PERFORMANCEANDRELIABILITY, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, law.invention, law, Logic gate, 0103 physical sciences, Vertical direction, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Static random-access memory, 0210 nano-technology, business, Scaling, Hardware_LOGICDESIGN, Voltage, Leakage (electronics)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3ef539062f48cee934246624d382a7b5
https://doi.org/10.1109/s3s.2016.7804409

المؤلفون: Erik Rosseel, Julien Ryckaert, Efrain Altamirano-Sanchez, Philippe Matagne, T. Huynh-Bao, Katia Devriendt, Vasile Paraschiv, Adrian Chasin, Bertrand Parvais, Tsvetan Ivanov, Aaron Thean, A. Sibaja-Hernandez, Z. Tao, J. Versluijs, Eddy Simoen, Anabela Veloso, E. Vecchio, O. Richard, Boon Teik Chan, M. Ercken, B. Kaczer, Samuel Suhard, Stephan Brus, K. De Meyer, S. Ramesh, C. Delvaux, Nadine Collaert, Hugo Bender, P. Lagrain, Niamh Waldron

المساهمون: Electronics and Informatics, Physics, Faculty of Medicine and Pharmacy, Vriendenkring VUB, Faculty of Arts and Philosophy, Chemical Engineering and Industrial Chemistry, Faculty of Engineering

المصدر: 2016 IEEE Symposium on VLSI Technology.

مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Doping, Stacking, Nanowire, Electrical engineering, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Noise (electronics), PMOS logic, 0103 physical sciences, Optoelectronics, Static random-access memory, Electrical and Electronic Engineering, 0210 nano-technology, business, NMOS logic, Voltage

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f64b857c9947bedfab2383d329a1f103
https://doi.org/10.1109/vlsit.2016.7573409

المؤلفون: Guglielma Vecchio, Pieter Blomme, Laurent Sourieau, H. Hody, Janko Versluis, Jan Van Houdt, Chi Lim Tan, Geert Van den bosch, Vasile Paraschiv, M. Ercken

المصدر: 2016 IEEE 8th International Memory Workshop (IMW).

مصطلحات موضوعية: Hardware_MEMORYSTRUCTURES, Materials science, business.industry, Extreme ultraviolet lithography, Electrical engineering, NAND gate, Dielectric, Flash (photography), Planar, Logic gate, Charge trap flash, Multiple patterning, Optoelectronics, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::cca3fa09ee5485ec9ad4d24c5411368a
https://doi.org/10.1109/imw.2016.7495282

المؤلفون: Stephan Brus, S. Verhaegen, Efrain Altamirano-Sanchez, Anabela Veloso, C. Delvaux, M. Ercken, Christina Baerts, Marc Demand, T. Vandeweyer, J. De Backer, S. Locorotondo, Naoto Horiguchi

المصدر: Microelectronic Engineering. 87:993-996

مصطلحات موضوعية: Computer science, business.industry, Extreme ultraviolet lithography, Integrated circuit, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Non-volatile memory, law, Embedded system, Hardware_INTEGRATEDCIRCUITS, Node (circuits), Static random-access memory, Electrical and Electronic Engineering, Photolithography, business, Lithography, Immersion lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9483254ad9233fa51abceefc7885662d
https://doi.org/10.1016/j.mee.2009.11.119

المؤلفون: M. Ercken, A. Thiam, Romain Ritzenthaler, Farid Sebaai, Geert Mannaert, Pierre C. Fazan, V. Machkaoutsan, Alessio Spessot, Barry O'Sullivan, Naoto Horiguchi, Steven Demuynck, Tom Schram, Eugenio Dentoni Litta, C. Lorant, Yun-Hyuck Ji

المصدر: Japanese Journal of Applied Physics. 57:04FB08

مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), General Physics and Astronomy, Equivalent oxide thickness, Hardware_PERFORMANCEANDRELIABILITY, 02 engineering and technology, 01 natural sciences, law.invention, law, 0103 physical sciences, Hardware_INTEGRATEDCIRCUITS, Metal gate, 010302 applied physics, Dynamic random-access memory, business.industry, Transistor, General Engineering, 021001 nanoscience & nanotechnology, Threshold voltage, CMOS, Optoelectronics, Field-effect transistor, 0210 nano-technology, business, AND gate, Hardware_LOGICDESIGN

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::023b77139bd668603964060bc0658557
https://doi.org/10.7567/jjap.57.04fb08

المؤلفون: George P. Patsis, L. H. A. Leunissen, M. Ercken

المصدر: Microelectronic Engineering. :2-10

مصطلحات موضوعية: Materials science, business.industry, Shot noise, Surface finish, Statistical fluctuations, Condensed Matter Physics, Line edge roughness, Atomic and Molecular Physics, and Optics, Secondary electrons, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Optics, Resist, Electrical and Electronic Engineering, Diffusion (business), business, Electron-beam lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a7cb6aa0e6d944bc18e9502721eff168
https://doi.org/10.1016/j.mee.2004.12.005

المؤلفون: Christina Baerts, Naoto Horiguchi, T. Vandeweyer, M. Ercken

المصدر: Microelectronic Engineering. 88:2171-2173

مصطلحات موضوعية: Materials science, Extreme ultraviolet lithography, Sram cell, Nanotechnology, Hardware_PERFORMANCEANDRELIABILITY, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Semiconductor industry, Hardware_INTEGRATEDCIRCUITS, Multiple patterning, Electrical and Electronic Engineering, Scaling, Lithography, Next-generation lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::fae861165c10c34907af888f2ad39e23
https://doi.org/10.1016/j.mee.2010.12.088

المؤلفون: Georg Pawlowski, Kurt G. Ronse, S. Masuda, Geert Vandenberghe, Myriam Moelants, Walter Spiess, M. Ercken, Mieke Goethals

المصدر: Microelectronic Engineering. 53:443-447

مصطلحات موضوعية: Materials science, business.industry, Proximity effect (electron beam lithography), Photoresist, Condensed Matter Physics, medicine.disease_cause, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Numerical aperture, Tone (musical instrument), Optics, Resist, Optical proximity correction, medicine, Electrical and Electronic Engineering, Stepper, business, Ultraviolet

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c46f5e9e75a5e6ac305648e587ebb99a
https://doi.org/10.1016/s0167-9317(00)00352-x

المؤلفون: M. Ercken, I. van Puyenbroeck, M. Goethals, Kurt G. Ronse, Myriam Moelants, Georg Pawlowski, Walter Spiess, I. Pollers

المصدر: Microelectronic Engineering. 46:353-357

مصطلحات موضوعية: Materials science, Silicon, business.industry, chemistry.chemical_element, Nanotechnology, Substrate (electronics), Swing, Photoresist, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Numerical aperture, Optics, Resist, chemistry, Electrical and Electronic Engineering, business, Critical dimension, Exposure latitude

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::128fbb2088b579d04a4ba0ed3a6c28a1
https://doi.org/10.1016/s0167-9317(99)80002-1