المؤلفون: De-Kun Yang, Du Wang, Qiu-Shi Huang, Yi Song, Jian Wu, Wen-Xue Li, Zhan-Shan Wang, Xia-Hui Tang, Hong-Xing Xu, Sheng Liu, Cheng-Qun Gui

المصدر: Chip, Vol 1, Iss 3, Pp 100019- (2022)

مصطلحات موضوعية: Extreme ultraviolet source, Laser-produced plasma, Sn target, Long lifetime collector, Information technology, T58.5-58.64

وصف الملف: electronic resource

Relation: http://www.sciencedirect.com/science/article/pii/S270947232200017X; https://doaj.org/toc/2709-4723

URL الوصول: https://doaj.org/article/c221e40df43c496a963b38514b7fd8d8