يعرض 1 - 13 نتائج من 13 نتيجة بحث عن '"Lim, Sanghak"', وقت الاستعلام: 0.41s تنقيح النتائج
  1. 1
    Patent
    Etch-resistant disilane and saturated hydrocarbon bridged silicon-containing polymers, method of making the same, and method of using the same
    View record in USPTO Patent Grants

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  2. 2
    Patent
    Boron-containing hydrogen silsesquioxane polymer, integrated circuit device formed using the same, and associated methods
    View record in USPTO Patent Applications

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  3. 3
    Patent
    Etch-resistant disilane and saturated hydrocarbon bridged silicon-containing polymers, method of making the same, and method of using the same
    View record in USPTO Patent Applications

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  4. 4
    Conference
    Study on spin-on hardmask for quad-layer application

    المؤلفون: Park, Yushin, Lim, Sanghak, Shin, Seungwook, Kim, Jinhyung, Kim, Yunjun, Kim, Seunghyun, Lim, Jaebum, Kim, Sung Hwan, Jung, Hyeonil, Heo, Yumi, Yang, Sunyoung, Yu, Jeong Yun

    المصدر: 2018 China Semiconductor Technology International Conference (CSTIC) ; volume 6923, page 1-3

    الاتاحة: http://dx.doi.org/10.1109/cstic.2018.8369207
    http://xplorestaging.ieee.org/ielx7/8360436/8369163/08369207.pdf?arnumber=8369207

    View record in BASE

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  5. 5
    Conference
    Study on planarization performance of spin on hardmask

    المؤلفون: Yun, Huichan, Kim, Jinhyung, Kim, Yoona, Jeong, Seulgi, Lim, Sanghak, Yu, Jeong Yun

    المصدر: 2018 China Semiconductor Technology International Conference (CSTIC)

    الاتاحة: http://dx.doi.org/10.1109/cstic.2018.8369206
    http://xplorestaging.ieee.org/ielx7/8360436/8369163/08369206.pdf?arnumber=8369206

    View record in BASE

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  6. 6
    Conference
    Study of flowability effect on self-planarization performance at SOC materials

    المؤلفون: Yun, Huichan, Kim, Jinhyung, Park, Youjung, Kim, Yoona, Jeong, Seulgi, Baek, Jaeyeol, Yoon, Byeri, Lim, Sanghak

    المساهمون: Hohle, Christoph K., Gronheid, Roel

    المصدر: SPIE Proceedings ; Advances in Patterning Materials and Processes XXXIV ; ISSN 0277-786X

    الاتاحة: http://dx.doi.org/10.1117/12.2257880

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  7. 7
    Conference
    Investigation on spin-on hard mask integration

    المؤلفون: Park, Yushin, Shin, Seungwook, Kim, Yunjun, Kim, Seunghyun, Lim, Jaebum, Kim, Sung Hwan, Jung, Hyeonil, Lee, Chungheon, Han, Miyeon, Lim, Sanghak, Yu, Jeong Yun

    المساهمون: Hohle, Christoph K., Gronheid, Roel

    المصدر: SPIE Proceedings ; Advances in Patterning Materials and Processes XXXIV ; ISSN 0277-786X

    الاتاحة: http://dx.doi.org/10.1117/12.2257846

    View record in BASE

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  8. 8
    Conference
    Study on thick film spin-on carbon hardmask

    المؤلفون: Kim, Taeho, Kim, Youngmin, Hwang, Sunmin, Lee, Hyunsoo, Han, Miyeon, Lim, Sanghak

    المساهمون: Hohle, Christoph K., Gronheid, Roel

    المصدر: SPIE Proceedings ; Advances in Patterning Materials and Processes XXXIV ; ISSN 0277-786X

    الاتاحة: http://dx.doi.org/10.1117/12.2257867

    View record in BASE

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  9. 9
    Academic Journal
    Soluble polycyclosilane–polysiloxane hybrid material and silicon thin film with optical properties at 193 nm and etch selectivity

    المؤلفون: Park, Sung Jin, Cho, Hyeon Mo, Lee, Myong Euy, Kim, Miyoung, Han, Kwenwoo, Hong, Seunghee, Lim, Sanghak, Lee, Hansong, Hwang, Byeonggyu, Kim, Sang Kyun, Shim, Sangdeok, Kang, Philjae, Choi, Moon-Gun

    المصدر: Journal of Materials Chemistry C ; volume 3, issue 2, page 239-242 ; ISSN 2050-7526 2050-7534

    الاتاحة: http://dx.doi.org/10.1039/c4tc01917b
    http://pubs.rsc.org/en/content/articlepdf/2015/TC/C4TC01917B

    View record in BASE

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  10. 10
    Periodical
    Development of novel thick spin-on carbon hardmask

    المؤلفون: Gronheid, Roel, Sanders, Daniel P., Yoon, Byeri, Shin, Seungwook, Kim, Youngmin, Heo, Yumi, Park, Soyeon, Choi, Sungho, Han, Miyeon, Lim, Sanghak

    المصدر: Proceedings of SPIE; March 2019, Vol. 10960 Issue: 1 p109601D-109601D-6, 986416p


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  11. 11
    Periodical
    Study of flowability effect on self-planarization performance at SOC materials

    المؤلفون: Hohle, Christoph K., Gronheid, Roel, Yun, Huichan, Kim, Jinhyung, Park, Youjung, Kim, Yoona, Jeong, Seulgi, Baek, Jaeyeol, Yoon, Byeri, Lim, Sanghak

    المصدر: Proceedings of SPIE; March 2017, Vol. 10146 Issue: 1 p1014624-1014624-9


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  12. 12
    Periodical
    Study on thick film spin-on carbon hardmask

    المؤلفون: Hohle, Christoph K., Gronheid, Roel, Kim, Taeho, Kim, Youngmin, Hwang, Sunmin, Lee, Hyunsoo, Han, Miyeon, Lim, Sanghak

    المصدر: Proceedings of SPIE; March 2017, Vol. 10146 Issue: 1 p1014623-1014623-6


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  13. 13
    Periodical
    Investigation on spin-on hard mask integration

    المؤلفون: Hohle, Christoph K., Gronheid, Roel, Park, Yushin, Shin, Seungwook, Kim, Yunjun, Kim, Seunghyun, Lim, Jaebum, Kim, Sung Hwan, Jung, Hyeonil, Lee, Chungheon, Han, Miyeon, Lim, Sanghak, Yu, Jeong Yun

    المصدر: Proceedings of SPIE; March 2017, Vol. 10146 Issue: 1 p1014616-1014616-9


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