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المؤلفون: Guglielma Vecchio, Pieter Blomme, Laurent Sourieau, H. Hody, Janko Versluis, Jan Van Houdt, Chi Lim Tan, Geert Van den bosch, Vasile Paraschiv, M. Ercken
المصدر: 2016 IEEE 8th International Memory Workshop (IMW).
مصطلحات موضوعية: Hardware_MEMORYSTRUCTURES, Materials science, business.industry, Extreme ultraviolet lithography, Electrical engineering, NAND gate, Dielectric, Flash (photography), Planar, Logic gate, Charge trap flash, Multiple patterning, Optoelectronics, business