المؤلفون: Lamia Nouri, Stefan Landis, Frederic Milesi, Frederic-Xavier Gaillard, Nicolas Posseme

المصدر: Emerging Patterning Technologies.

مصطلحات موضوعية: Microelectromechanical systems, Materials science, Ion implantation, Resist, law, Nanotechnology, Photolithography, Ion beam lithography, Lithography, Electron-beam lithography, law.invention, Nanoimprint lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::453e069f9e7e2ab7daed12ed7be4cf30
https://doi.org/10.1117/12.2258603

المؤلفون: Lamia Nouri, Marie-Line Pourteau, Nicolas Posseme, M. May, C. Tallaron, Isabelle Servin, Jonathan Pradelles, Ahmed Gharbi, Bernard Dalzotto, Sébastien Barnola, F. Delachat, Stefan Landis, C. Lapeyre, Aurelien Sarrazin, Philippe Essomba, M. Argoud, P. Brianceau, H. Teyssedre, A. Bernadac, P. Pimenta Barros, R. Tiron, G. Chamiot-Maitral, Yoann Blancquaert, Laurent Pain, Guillaume Claveau, Sandra Bos

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Computer science, Computational lithography, Extreme ultraviolet lithography, Nanotechnology, Hardware_PERFORMANCEANDRELIABILITY, Nanoimprint lithography, law.invention, law, Hardware_INTEGRATEDCIRCUITS, Systems engineering, Multiple patterning, Multi beam, Lithography, Immersion lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c2df2d94c4d940e340bc2ac65e3698ee
https://doi.org/10.1117/12.2259966

المؤلفون: Vincent Ah-Leung, Nicolas Posseme, Olivier Pollet, Lamia Nouri, Maxime Garcia Barros, Sebastien Barnola

المصدر: ECS Meeting Abstracts. :1248-1248

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::df526d72342e92f87bd69c42a4c63d33
https://doi.org/10.1149/ma2017-01/25/1248

المؤلفون: Frederic Milesi, Stéfan Landis, Denis Mariolle, Frédéric Gaillard, Lamia Nouri, Nicolas Posseme, Christophe Licitra

المصدر: ECS Meeting Abstracts. :1239-1239

مصطلحات موضوعية: Materials science, Silicon, chemistry, Anodizing, Nano, chemistry.chemical_element, Nanotechnology, Substrate (printing)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::879f5928860042783d34d61f7175f5c5
https://doi.org/10.1149/ma2017-01/25/1239