المؤلفون: Juste Rozene, Andrius Dzedzickis, Laisvidas Striska, Vincas Zickus, Inga Morkvenaite-Vilkonciene, Ernestas Šutinys, Vaiva Treciokaite, Vytautas Bučinskas, Mantas Makulavicius

المصدر: 2021 IEEE Open Conference of Electrical, Electronic and Information Sciences (eStream).

مصطلحات موضوعية: Physics, Mechanical system, Scanning probe microscopy, Optics, Positioning system, business.industry, Repeatability, Stepper, business, Mechanical components, Experimental research, Additional research

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8bdb1ec2304b444bd84ed10a4a4495aa
https://doi.org/10.1109/estream53087.2021.9431484