-
1Conference
المؤلفون: Laske, F., Kunitani, S., Kamibayashi, T., Yamana, M., Fuse, A., Wagner, M., Roeth, K.-D., Ferber, M., Daneshpanah, M., Czerkas, S., Sakaguchi, H.
المساهمون: Faure, Thomas B., Ackmann, Paul W.
المصدر: SPIE Proceedings ; Photomask Technology 2013 ; ISSN 0277-786X
الاتاحة: http://dx.doi.org/10.1117/12.2027200
-
2Conference
المؤلفون: Kunitani, S., Kobayashi, K., Mitsuhashi, W.
المصدر: Proceedings of the 41st SICE Annual Conference. SICE 2002. ; volume 3, page 1433-1436
-
3Conference
المؤلفون: Kunitani, S., Kobayashi, K., Mitsuhashi, W.
المصدر: Proceedings of the 41st SICE Annual Conference (SICE 2002); 2002, p1433-1433, 1p
-
4Periodical
المؤلفون: Faure, Thomas B., Ackmann, Paul W., Laske, F., Kunitani, S., Kamibayashi, T., Yamana, M., Fuse, A., Wagner, M., Roeth, K.-D., Ferber, M., Daneshpanah, M., Czerkas, S., Sakaguchi, H.
المصدر: Proceedings of SPIE; September 2013, Vol. 8880 Issue: 1 p888024-888024-8