المؤلفون: Alexander Krokhmal, Dmitry Yarmolich, I. Schnitzer, Joseph Z. Gleizer, Joshua Felsteiner, Konstantin Chirko, Or Peleg, Vladislav Vekselman, Yakov E. Krasik, Yoav Hadas

المصدر: IEEJ Transactions on Fundamentals and Materials. 2007, 127(11):697

المؤلفون: Neta Shomrat, Konstantin Chirko, Inbal Weisbord, Yan Avniel, Sergey Khristo, David Nessim, Alon Litman, Tamar Segal-Peretz

المصدر: Journal of Micro/Nanopatterning, Materials, and Metrology. 21

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::36b142b08da37a5765fab98436114643
https://doi.org/10.1117/1.jmm.21.2.021202

المؤلفون: Leathen Shi, Guy M. Cohen, Sarunya Bangsaruntip, Shimon Levi, Deborah A. Neumayer, Alfred Grill, Konstantin Chirko, Ofer Adan

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, Silicon, business.industry, Scanning electron microscope, Nanowire, chemistry.chemical_element, Strained silicon, Nanotechnology, Substrate (electronics), chemistry.chemical_compound, chemistry, Boron nitride, Electron beam processing, Optoelectronics, business, Beam (structure)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1a924f0870bdf19edeb3e5deda1f7fcc
https://doi.org/10.1117/12.2086104

المؤلفون: Aaron Cordes, Vasiliki Tileli, Ram Peltinov, Konstantin Chirko, Benjamin Bunday, Mayaan Bar-Zvi, Daniel Bellido Aguilar, Bradley L. Thiel, Ofer Adan, John A. Allgair, Yohanan Avitan

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Photoresist, law.invention, Metrology, Optics, Resist, law, Photolithography, business, Critical dimension, Lithography, Shrinkage

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::04f5cc2a4d84c1d43b2de864106d34e7
https://doi.org/10.1117/12.846991