المؤلفون: Kimiyoshi DEGUCHI, Tsuneyuki HAGA, 出口 公吉, 芳賀 恒之

المصدر: 応用物理 / Oyo Buturi. 2004, 73(4):455

المؤلفون: Akinobu Tanaka, Hiroshi Ban, Jiro Nakamura, Kimiyoshi Deguchi

المصدر: Journal of Photopolymer Science and Technology. 1994, 7(1):17

المؤلفون: KIMIYOSHI DEGUCHI

المصدر: Journal of Photopolymer Science and Technology. 1993, 6(4):445

المؤلفون: Hiroshi Ban, Jiro Nakamura, Kimiyoshi Deguchi

المصدر: Journal of Photopolymer Science and Technology. 1998, 11(4):571

المؤلفون: Hiroo KINOSHITA, Kimiyoshi DEGUCHI, Munenori KANAI, Tadao SAITO, 出口 公吉, 斉藤 忠男, 木下 博雄, 金井 宗統

المصدر: 精密工学会誌 / Journal of the Japan Society for Precision Engineering. 1986, 52(10):1713

المؤلفون: Hiroo KINOSHITA, Kimiyoshi DEGUCHI, Nobuyuki TAKEUCHI, 出口 公吉, 木下 博雄, 竹内 信行

المصدر: 精密機械 / Journal of the Japan Society of Precision Engineering. 1985, 51(5):1040

المؤلفون: Hiroo KINOSHITA, Kimiyoshi DEGUCHI, 出口 公吉, 木下 博雄

المصدر: 精密機械 / Journal of the Japan Society of Precision Engineering. 1981, 47(7):849

المؤلفون: Kimiyoshi Deguchi, 出口 公吉

المصدر: 照明学会誌 / JOURNAL OF THE ILLUMINATING ENGINEERING INSTITUTE OF JAPAN. 1991, 75(Appendix):233

المؤلفون: Tsuneyuki Haga, Kimiyoshi Deguchi

المصدر: Comptes Rendus de l'Académie des Sciences - Series IV - Physics. 1:829-842

مصطلحات موضوعية: Fabrication, Resist, business.industry, Computer science, Extreme ultraviolet lithography, General Physics and Astronomy, Optoelectronics, business, Cost of ownership, Lithography, Next-generation lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5fbf109d32e6904275032d69f99f763f
https://doi.org/10.1016/s1296-2147(00)01086-6

المؤلفون: A. Yoshikawa, S. Hirota, Toshiyuki Horiuchi, Kimiyoshi Deguchi

المصدر: Microelectronic Engineering. 13:315-318

مصطلحات موضوعية: Materials science, Fabrication, business.industry, X-ray, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Secondary electrons, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Optics, Dose optimization, Digital pattern generator, Nanometre, Electrical and Electronic Engineering, business, Lithography, Metal thin film

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1455d22b9b92b8f7e1f44a2c20356540
https://doi.org/10.1016/0167-9317(91)90101-i

المؤلفون: Toshiyuki Horiuchi, Toshiyuki Horiuchi, Kimiyoshi Deguchi, Kimiyoshi Deguchi

المصدر: Japanese Journal of Applied Physics ; volume 35, issue 4R, page 2363 ; ISSN 0021-4922 1347-4065

الاتاحة: http://dx.doi.org/10.1143/jjap.35.2363
https://iopscience.iop.org/article/10.1143/JJAP.35.2363
https://iopscience.iop.org/article/10.1143/JJAP.35.2363/pdf

المؤلفون: Fukuda, Makoto, Endo, Naoe, Tsuyuzaki, Haruo, Masanori Suzuki, Masanori Suzuki, Kimiyoshi Deguchi, Kimiyoshi Deguchi

المصدر: Japanese Journal of Applied Physics ; volume 35, issue 12S, page 6458 ; ISSN 0021-4922 1347-4065

الاتاحة: http://dx.doi.org/10.1143/jjap.35.6458
https://iopscience.iop.org/article/10.1143/JJAP.35.6458
https://iopscience.iop.org/article/10.1143/JJAP.35.6458/pdf

المؤلفون: Y. Sakakibara, M. Miyake, E. Yamamoto, A. Yoshikawa, Toshiyuki Horiuchi, Kimiyoshi Deguchi, T. Kitayama

المصدر: Microelectronic Engineering. 11:233-236

مصطلحات موضوعية: Materials science, Fabrication, business.industry, Synchrotron radiation, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Laser linewidth, Optics, Optoelectronics, Electrical and Electronic Engineering, business, Lithography, Exposure latitude, NMOS logic

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6304a4a53a54a14435aec09ebec91609
https://doi.org/10.1016/0167-9317(90)90104-2

المؤلفون: Toshiyuki Horiuchi, Toshiyuki Horiuchi, Kimiyoshi Deguchi, Kimiyoshi Deguchi

المصدر: Japanese Journal of Applied Physics ; volume 33, issue 5R, page 2798 ; ISSN 0021-4922 1347-4065

الاتاحة: http://dx.doi.org/10.1143/jjap.33.2798
https://iopscience.iop.org/article/10.1143/JJAP.33.2798
https://iopscience.iop.org/article/10.1143/JJAP.33.2798/pdf

المؤلفون: Somemura, Yoh, Kimiyoshi Deguchi, Kimiyoshi Deguchi, Kazunori Miyoshi, Kazunori Miyoshi

المصدر: Japanese Journal of Applied Physics ; volume 33, issue 10R, page 6046 ; ISSN 0021-4922 1347-4065

الاتاحة: http://dx.doi.org/10.1143/jjap.33.6046
https://iopscience.iop.org/article/10.1143/JJAP.33.6046
https://iopscience.iop.org/article/10.1143/JJAP.33.6046/pdf

المؤلفون: Somemura, Yoh, Kimiyoshi Deguchi, Kimiyoshi Deguchi, Kazunori Miyoshi, Kazunori Miyoshi

المصدر: Japanese Journal of Applied Physics ; volume 33, issue 11R, page 6389 ; ISSN 0021-4922 1347-4065

الاتاحة: http://dx.doi.org/10.1143/jjap.33.6389
https://iopscience.iop.org/article/10.1143/JJAP.33.6389
https://iopscience.iop.org/article/10.1143/JJAP.33.6389/pdf

المؤلفون: Yoh Somemura, Yoh Somemura, Kimiyoshi Deguchi, Kimiyoshi Deguchi

المصدر: Japanese Journal of Applied Physics ; volume 31, issue 3R, page 938 ; ISSN 0021-4922 1347-4065

الاتاحة: http://dx.doi.org/10.1143/jjap.31.938
https://iopscience.iop.org/article/10.1143/JJAP.31.938
https://iopscience.iop.org/article/10.1143/JJAP.31.938/pdf

المؤلفون: Nakamura, Jiro, Ban, Hiroshi, Kimiyoshi Deguchi, Kimiyoshi Deguchi, Akinobu Tanaka, Akinobu Tanaka

المصدر: Japanese Journal of Applied Physics ; volume 30, issue 10R, page 2619 ; ISSN 0021-4922 1347-4065

الاتاحة: http://dx.doi.org/10.1143/jjap.30.2619
https://iopscience.iop.org/article/10.1143/JJAP.30.2619
https://iopscience.iop.org/article/10.1143/JJAP.30.2619/pdf

المؤلفون: Kimiyoshi Deguchi, T. Kobayashi, T. Matsuda, M. Oda, M. Sato, M. Miyake, S. Ohki, Y. Okazaki

المصدر: Technical Digest., International Electron Devices Meeting.

مصطلحات موضوعية: Materials science, Silicon, business.industry, chemistry.chemical_element, Synchrotron radiation, Ring oscillator, Integrated circuit, Cryogenics, Threshold voltage, law.invention, chemistry, law, Optoelectronics, business, Lithography, NMOS logic

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f8869bd85f2074d69a96bacfeeaa1787
https://doi.org/10.1109/iedm.1988.32951

المؤلفون: E. Yamamoto, H. Kyuragi, T. Kobayashi, Y. Yamamoto, Kimiyoshi Deguchi, Shinsuke Konaka, S. Ohki

المصدر: 1992 Symposium on VLSI Technology Digest of Technical Papers.

مصطلحات موضوعية: Materials science, business.industry, BiCMOS, Synchrotron, law.invention, CMOS, Resist, law, Gate array, Chemical-mechanical planarization, Optoelectronics, X-ray lithography, business, Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::fc31c74e03467b037c75e823a70ff6d2
https://doi.org/10.1109/vlsit.1992.200627