المؤلفون: Polla Rouf (6452750), Rouzbeh Samii (7495976), Karl Rönnby (6452747), Babak Bakhit (10686551), Sydney C. Buttera (1854577), Ivan Martinovic (10686554), Lars Ojamäe (1352061), Chih-Wei Hsu (358950), Justinas Palisaitis (1350021), Vadim Kessler (2964378), Henrik Pedersen (109842), Nathan J. O’Brien (7495973)

مصطلحات موضوعية: Biochemistry, Biotechnology, Sociology, Developmental Biology, Environmental Sciences not elsewhere classified, Biological Sciences not elsewhere classified, precursor, vapor deposition process, AlN seed layer, electron mobility transistors, electron microstructure analysis, ALD, Atomic Layer Deposition Gallium nitride, Epitaxial Gallium Nitride, GaN films, future deposition processes, triazenide

Relation: https://figshare.com/articles/journal_contribution/Hexacoordinated_Gallium_III_Triazenide_Precursor_for_Epitaxial_Gallium_Nitride_by_Atomic_Layer_Deposition/14466113

الاتاحة: https://doi.org/10.1021/acs.chemmater.1c00244.s001

المؤلفون: Polla Rouf (6452750), Rouzbeh Samii (7495976), Karl Rönnby (6452747), Babak Bakhit (10686551), Sydney C. Buttera (1854577), Ivan Martinovic (10686554), Lars Ojamäe (1352061), Chih-Wei Hsu (358950), Justinas Palisaitis (1350021), Vadim Kessler (2964378), Henrik Pedersen (109842), Nathan J. O’Brien (7495973)

مصطلحات موضوعية: Biochemistry, Biotechnology, Sociology, Developmental Biology, Environmental Sciences not elsewhere classified, Biological Sciences not elsewhere classified, precursor, vapor deposition process, AlN seed layer, electron mobility transistors, electron microstructure analysis, ALD, Atomic Layer Deposition Gallium nitride, Epitaxial Gallium Nitride, GaN films, future deposition processes, triazenide

Relation: https://figshare.com/articles/dataset/Hexacoordinated_Gallium_III_Triazenide_Precursor_for_Epitaxial_Gallium_Nitride_by_Atomic_Layer_Deposition/14466116

الاتاحة: https://doi.org/10.1021/acs.chemmater.1c00244.s002