المؤلفون: Vladimir M. Borisov, Uwe Stamm, Kai Dr. Gäbel, M. Darscht, O B Khristoforov, Guido Schriever, Aleksandr Yu. Vinokhodov

المصدر: Microelectronic Engineering. :83-88

مصطلحات موضوعية: business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, chemistry.chemical_element, Plasma, Condensed Matter Physics, Laser, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Electric discharge in gases, law.invention, Optics, Xenon, chemistry, W band, law, Optoelectronics, Laser power scaling, Electrical and Electronic Engineering, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::342826a29cca267a3c1348a9517d6f62
https://doi.org/10.1016/s0167-9317(02)00514-2

المؤلفون: Willi Neff, Wolfgang Sandner, H. Stiehl, R. Sauerbrey, Kai Dr. Gäbel, Peter V. Nickles, L. Aschke, Ingo Will, Reinhart Poprawe, G. Schmahl, K. Bergmann, Heinrich Schwoerer, S. Düsterer, Dieter Hoffmann, Christian H. Ziener, Rainer Lebert, Peter Loosen, D. Rudolph, Oliver Rosier

المساهمون: Publica

المصدر: Microelectronic Engineering. :87-92

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Condensed Matter Physics, Key features, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Metrology, Optics, Basic research, law, Scalability, Systems engineering, Key (cryptography), Systems design, Electrical and Electronic Engineering, Photolithography, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::86f03ca146d77185755d4651985f1c90
https://doi.org/10.1016/s0167-9317(01)00533-0

المؤلفون: Adriaan Valster, Kai Dr. Gäbel, H. Heyer, Rainer Lebert, P. Loosen, P. Rußbüldt, Reinhart Poprawe

المساهمون: Publica

المصدر: Optics Communications. 153:275-281

مصطلحات موضوعية: diode pumping, group velocity dispersion, high-brightness laser, laser crystal, Materials science, Kerr effect, Chirped mirror, business.industry, chirped mirror, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Power (physics), law.invention, Optics, Mode-locking, law, Dispersion (optics), Electrical and Electronic Engineering, Physical and Theoretical Chemistry, Kerr lens modelocking, business, Pulse-width modulation, Diode

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::729caa562f3d9cccef0b15d9914d46ab
https://doi.org/10.1016/s0030-4018(98)00221-1

المؤلفون: Kai Dr. Gäbel, Uwe Stamm

مصطلحات موضوعية: Engineering, business.industry, Extreme ultraviolet lithography, Electrical engineering, Joint venture, Thermal load, Laser, Chip, law.invention, law, Scalability, business, Throughput (business), Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f4041c9fc98e1ef5129cbbf6a370b87f
https://doi.org/10.1117/3.613774.ch19

المؤلفون: D. Klopfel, Uwe Stamm, P. Kohler, S. Gotze, Guido Schriever, J. Ringling, Kai Dr. Gäbel, V. Korobotchko, F. Flohrer, Jürgen Dr. Kleinschmidt, I. Ahmad

المصدر: Summaries of Papers Presented at the Lasers and Electro-Optics. CLEO '02. Technical Diges.

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, chemistry.chemical_element, Plasma, medicine.disease_cause, Laser, Electric discharge in gases, law.invention, Optics, Xenon, chemistry, law, Extreme ultraviolet, Z-pinch, medicine, Optoelectronics, business, Ultraviolet

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::60fdbb722f13d74146a17438a472308a
https://doi.org/10.1109/cleo.2002.1034176

المؤلفون: Christian H. Ziener, Jesko Dr. Brudermann, Vladimir Korobotchko, Frank Flohrer, Jürgen Dr. Kleinschmidt, Sven Götze, Kai Dr. Gäbel, Uwe Stamm, Guido Hergenhan, Guido Schriever, D. Bolshukhin, Imtiaz Ahmad, Diethard Klöpfel, Istvan Balogh, Henry Birner, S. Enke, Chinh Duc Prof. Tran, Jens Ringling

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Orders of magnitude (power), Materials science, business.industry, Etendue, Extreme ultraviolet lithography, Laser, law.invention, Optics, law, Extreme ultraviolet, Z-pinch, Optoelectronics, Laser power scaling, business, Spectral purity

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::506a64b648929274da7b635b33902a79
https://doi.org/10.1117/12.482676

المؤلفون: P. Russbuldt, Th. Udem, Theodor W. Hänsch, Ronald Holzwarth, P. St. J. Russell, William J. Wadsworth, Kai Dr. Gäbel, Jonathan Knight, Reinhart Poprawe, Marcus Zimmermann

المساهمون: Publica

المصدر: ResearcherID

مصطلحات موضوعية: Materials science, business.industry, Physics::Optics, Octave (electronics), Laser, Atomic and Molecular Physics, and Optics, law.invention, Frequency comb, symbols.namesake, Optics, law, Brillouin scattering, Femtosecond, symbols, Physics::Atomic Physics, business, Raman scattering, Photonic-crystal fiber, Diode

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a7b8be03073f35b3508f263cb5051d6f
https://doi.org/10.1364/ol.26.001376

المؤلفون: Eckhart Forster, Oliver Treichel, Markus Vollbrecht, Kai Dr. Gäbel, Ingo Uschmann, Rainer Lebert

المصدر: Applied Optics. 37:1803

مصطلحات موضوعية: Water window, Materials science, Toroid, business.industry, Materials Science (miscellaneous), chemistry.chemical_element, Industrial and Manufacturing Engineering, Crystal, Imaging spectroscopy, Wavelength, Optics, chemistry, Pinch, Thallium, Plasma diagnostics, Business and International Management, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::99158ea9b879a46e9c9110f654543714
https://doi.org/10.1364/ao.37.001803