المؤلفون: K. L. Sequoia, M. S. Tillack, H. A. Scott

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://aei.ucsd.edu/CER/REPORTS/UCSD-CER-06-09.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.690.9970; http://aei.ucsd.edu/CER/REPORTS/UCSD-CER-06-09.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.690.9970
http://aei.ucsd.edu/CER/REPORTS/UCSD-CER-06-09.pdf

المؤلفون: Y Tao, M S Tillack, S S Harilal, K L Sequoia, F Najmabadi

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://www-ferp.ucsd.edu/najmabadi/PAPER/A1-095-06-JPD-Tao.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.541.6926; http://www-ferp.ucsd.edu/najmabadi/PAPER/A1-095-06-JPD-Tao.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.541.6926
http://www-ferp.ucsd.edu/najmabadi/PAPER/A1-095-06-JPD-Tao.pdf

المؤلفون: M. S. Tillack, J. F. Latkowski, J. E. Pulsifer, K. L. Sequoia, R. P. Abbott

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://aei.ucsd.edu/CER/REPORTS/UCSD-CER-05-08.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.691.829; http://aei.ucsd.edu/CER/REPORTS/UCSD-CER-05-08.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.691.829
http://aei.ucsd.edu/CER/REPORTS/UCSD-CER-05-08.pdf

المؤلفون: K. L. Sequoia, M. S. Tillack, T. Albert, M. Wolford, J. D. Sethian

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://aei.ucsd.edu/LIB/REPORT/UCSD-ENG/UCSD-ENG-111.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.689.8720; http://aei.ucsd.edu/LIB/REPORT/UCSD-ENG/UCSD-ENG-111.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.689.8720
http://aei.ucsd.edu/LIB/REPORT/UCSD-ENG/UCSD-ENG-111.pdf

المؤلفون: Y. Tao, Beau O’Shay, Farrokh Najmabadi, K. L. Sequoia, Mark S. Tillack, Sivanandan S. Harilal

المصدر: Journal of Physics D: Applied Physics. 39:4027-4030

مصطلحات موضوعية: Acoustics and Ultrasonics, Pulse (signal processing), Chemistry, Plasma, Condensed Matter Physics, Laser, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, law, Ionization, Torr, Astronomical interferometer, Jump, Physics::Atomic Physics, Atomic physics, Pressure.ambient

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9cbd1f4521b2dbbb435b62c1cd53cbf8
https://doi.org/10.1088/0022-3727/39/18/014

المؤلفون: J. O'Shay, K. L. Sequoia, Christina Back, Mark S. Tillack, Howard A. Scott

المصدر: Journal de Physique IV (Proceedings). 133:985-988

مصطلحات موضوعية: Range (particle radiation), business.industry, Chemistry, Doping, Kinetics, General Physics and Astronomy, Aerogel, Plasma, Warm dense matter, Laser, law.invention, Optics, law, Irradiation, Atomic physics, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::10db0d5f9293a69d8bdcfda85eca48da
https://doi.org/10.1051/jp4:2006133198

المؤلفون: R. Burdt, Y. Tao, S. Yuspeh, K. L. Sequoia, Mark S. Tillack, Farrokh Najmabadi

المصدر: 2009 IEEE International Conference on Plasma Science - Abstracts.

مصطلحات موضوعية: Materials science, Active laser medium, business.industry, Far-infrared laser, Physics::Optics, Laser pumping, Laser, law.invention, X-ray laser, Optics, Physics::Plasma Physics, law, Nd:YAG laser, Diode-pumped solid-state laser, Optoelectronics, Physics::Atomic Physics, Laser power scaling, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::60554e3139d83c682dabddbd1ad94afc
https://doi.org/10.1109/plasma.2009.5227298

المؤلفون: Y. Tao, Mark S. Tillack, R. Burdt, K. L. Sequoia, S. Yuspeh

المصدر: 2009 IEEE International Conference on Plasma Science - Abstracts.

مصطلحات موضوعية: Physics, Radiation transport, Opacity, Extreme ultraviolet lithography, chemistry.chemical_element, Plasma, Kinetic energy, Laser, Ion, law.invention, chemistry, law, Atomic physics, Tin

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::857cecd61e9f8af80d0c9473a3fd5f81
https://doi.org/10.1109/plasma.2009.5227662

المؤلفون: Y. Tao, K. L. Sequoia, Farrokh Najmabadi, Mark S. Tillack, R. Burdt, S. Yuspeh

المصدر: Alternative Lithographic Technologies.

مصطلحات موضوعية: Laser ablation, Materials science, business.industry, Extreme ultraviolet lithography, Laser, law.invention, X-ray laser, Optics, law, Extreme ultraviolet, Nd:YAG laser, Optoelectronics, Photolithography, business, Inertial confinement fusion

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e0c5eed688368cee00500b6f6c8251d8
https://doi.org/10.1117/12.814233

المؤلفون: Y. Tao, Mark S. Tillack, Farrokh Najmabadi, K. L. Sequoia, S. Yuspeh, R. Burdt

المصدر: Alternative Lithographic Technologies.

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, Plasma, Radiation, Laser, law.invention, Optics, law, Extreme ultraviolet, Photolithography, business, Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2ea521956b91cd61163a2c93b7b1a4de
https://doi.org/10.1117/12.814167

المؤلفون: Mark S. Tillack, Farrokh Najmabadi, Y. Tao, K. L. Sequoia, R. Burdt

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Electron density, Number density, Materials science, business.industry, Extreme ultraviolet lithography, Plasma, Laser, law.invention, Optics, law, Extreme ultraviolet, Monochromatic color, business, Absorption (electromagnetic radiation)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d0432fda36d9934d4a61d49a06e3f40c
https://doi.org/10.1117/12.731032

المؤلفون: Y. Tao, Mark S. Tillack, K. L. Sequoia

المصدر: 2007 IEEE 34th International Conference on Plasma Science (ICOPS).

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, Pulse duration, Plasma, Laser, law.invention, Pulse (physics), Optics, law, Optoelectronics, Irradiation, business, Bandwidth-limited pulse

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6ba48a0b63759c8ba5e103ad14baef1c
https://doi.org/10.1109/ppps.2007.4346077

المؤلفون: Sivanandan S. Harilal, R. Burdt, K L Sequoia, Y Tao, Mark S. Tillack, Farrokh Najmabadi

المصدر: Optics letters. 32(10)

مصطلحات موضوعية: Physics, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, Laser, Atomic and Molecular Physics, and Optics, law.invention, Optics, law, Extreme ultraviolet, Optoelectronics, Irradiation, Thin film, business, Absorption (electromagnetic radiation), Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b118db8cc72a23708525d278e03f1f96
https://pubmed.ncbi.nlm.nih.gov/17440580

المؤلفون: Mark S. Tillack, Y. Tao, K. L. Sequoia, F. Najimabadi

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, Plasma, Laser, law.invention, Ion, Optics, law, Extreme ultraviolet, Optoelectronics, Irradiation, Photolithography, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::755b012612fc3682a1de03c4342e181d
https://doi.org/10.1117/12.725806

المؤلفون: Y. Tao, Sivanandan S. Harilal, Farrokh Najmabadi, K. L. Sequoia, Mark S. Tillack

المصدر: Tao, Y; Tillack, M S; Harilal, S S; Sequoia, K L; & Najmabadi, F. (2007). Investigation of the interaction of a laser pulse with a preformed Gaussian Sn plume for an extreme ultraviolet lithography source. Journal of Applied Physics, 101(2), 023305-1-023305-8. UC San Diego: Retrieved from: http://www.escholarship.org/uc/item/65t9h4zw

مصطلحات موضوعية: Physics, Sn, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, General Physics and Astronomy, Plasma, Shadowgraphy, Laser, Kinetic energy, pre-pulse, law.invention, Optics, law, Extreme ultraviolet, laser plasma, Plasma diagnostics, EUV, business

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fdc701cafc4c9f445aa843ed917c5936
http://www.escholarship.org/uc/item/65t9h4zw

المؤلفون: Y. Tao, K L Sequoia, B O'Shay, Sivanandan S. Harilal, Mark S. Tillack, Farrokh Najmabadi

المصدر: Optics letters. 31(16)

مصطلحات موضوعية: Physics, Opacity, business.industry, Extreme ultraviolet lithography, Energy conversion efficiency, Plasma, Laser, Atomic and Molecular Physics, and Optics, law.invention, Optics, law, Extreme ultraviolet, Optoelectronics, Focal Spot Size, business, Spectroscopy

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c65b02572e01be7ae49a2c1581c308de
https://pubmed.ncbi.nlm.nih.gov/16880866

المؤلفون: A Elias, J Yuan, James L. Maxwell, Sivanandan S. Harilal, D.T. Goodin, Minami Yoda, Mohamed A. Abdou, Mark S. Tillack, J Freeman, C.S. Debonnel, Philippe M. Bardet, H Zhao, T. Sketchley, Wayne R. Meier, M Ni, Alice Ying, G Fukuda, Gregory A. Moses, Susana Reyes, Pattrick Calderoni, Said I. Abdel-Khalik, D Olander, J O'Shay, Mofreh R. Zaghloul, Ralph W. Moir, S. G. Durbin, A.R. Raffray, Per F. Peterson, G Besenbruch, Gerald L. Kulcinski, Ryan P. Abbott, K. L. Sequoia, J F Latkowski, A Nobile, C. V. Bindhu, Z Gui, Neil B. Morley, A. I. Konkachbaev, B Vermillion, Farrokh Najmabadi, A. C. Gaeris, R.W. Petzoldt

مصطلحات موضوعية: Engineering, Inertial frame of reference, business.industry, Fusion power, Aerospace engineering, business, Engineering physics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8139ac63ff2a37f36c9a5e842d00501c
https://doi.org/10.2172/15013769

المؤلفون: Y Tao, M S Tillack, K L Sequoia, R A Burdt, F Najmabadi

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://www-ferp.ucsd.edu/NAJMABADI/PAPER/A3-014-07-SPIE-Tao-2.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.1061.3230; http://www-ferp.ucsd.edu/NAJMABADI/PAPER/A3-014-07-SPIE-Tao-2.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.1061.3230
http://www-ferp.ucsd.edu/NAJMABADI/PAPER/A3-014-07-SPIE-Tao-2.pdf

المؤلفون: Y Tao, M S Tillack, K L Sequoia, R A Burdt, F Najmabadi

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://aries.ucsd.edu/LIB/REPORT/CONF/SPIE07/Tao2.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.1061.2999; http://aries.ucsd.edu/LIB/REPORT/CONF/SPIE07/Tao2.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.1061.2999
http://aries.ucsd.edu/LIB/REPORT/CONF/SPIE07/Tao2.pdf

المؤلفون: M. S. Tillack, K. L. Sequoia, C. A. Back, H. A. Scott

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://www-ferp.ucsd.edu/LIB/REPORT/CONF/IFSA05/Tillack.pdf.

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.583.9211; http://www-ferp.ucsd.edu/LIB/REPORT/CONF/IFSA05/Tillack.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.583.9211
http://www-ferp.ucsd.edu/LIB/REPORT/CONF/IFSA05/Tillack.pdf