المؤلفون: Haiducu, Marius, Sameoto, Dan E., Foulds, Ian G., Johnstone, Robert W., Parameswaran, M. Ash

المساهمون: Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division, Electrical Engineering Program, Mechanical Engineering Program, Physical Science and Engineering (PSE) Division

مصطلحات موضوعية: Deep-UV patterning, High-aspect ratio structures, MEMS, Microfluidics, Poly(methyl methacrylate) (PMMA)

Relation: Haiducu, M., Sameoto, D., Foulds, I., Johnstone, R. W., & Parameswaran, A. M. (2012). Bosch-like method for creating high aspect ratio poly(methyl methacrylate) (PMMA) structures. Micromachining and Microfabrication Process Technology XVII. doi:10.1117/12.908690; Micromachining and Microfabrication Process Technology XVII; http://hdl.handle.net/10754/565862

الاتاحة: http://hdl.handle.net/10754/565862
https://doi.org/10.1117/12.908690

المؤلفون: Johnstone, Robert W., Parameswaran, M.

المصدر: 2006 Canadian Conference on Electrical and Computer Engineering

الاتاحة: http://dx.doi.org/10.1109/ccece.2006.277827
http://xplorestaging.ieee.org/ielx5/4054516/4054517/04055051.pdf?arnumber=4055051

المؤلفون: Lee, Sae-Won, Johnstone, Robert W., Parameswaran, Ash M.

المساهمون: Chiao, Jung-Chih, Dzurak, Andrew S., Jagadish, Chennupati, Thiel, David V.

المصدر: SPIE Proceedings ; Device and Process Technologies for Microelectronics, MEMS, and Photonics IV ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.638261

المؤلفون: Johnstone, Robert W., Parameswaran, M.

المصدر: An Introduction to Surface-Micromachining ; page 183-184 ; ISBN 9781475710779 9781402080210

الاتاحة: http://dx.doi.org/10.1007/978-1-4020-8021-0_16
http://link.springer.com/content/pdf/10.1007/978-1-4020-8021-0_16.pdf

المؤلفون: Johnstone, Robert W., Parameswaran, M.

المصدر: An Introduction to Surface-Micromachining ; page 177-179 ; ISBN 9781475710779 9781402080210

الاتاحة: http://dx.doi.org/10.1007/978-1-4020-8021-0_14
http://link.springer.com/content/pdf/10.1007/978-1-4020-8021-0_14.pdf

المؤلفون: Johnstone, Robert W., Parameswaran, M.

المصدر: An Introduction to Surface-Micromachining ; page 153-164 ; ISBN 9781475710779 9781402080210

الاتاحة: http://dx.doi.org/10.1007/978-1-4020-8021-0_12
http://link.springer.com/content/pdf/10.1007/978-1-4020-8021-0_12.pdf

المؤلفون: Johnstone, Robert W., Parameswaran, M.

المصدر: An Introduction to Surface-Micromachining ; page 165-173 ; ISBN 9781475710779 9781402080210

الاتاحة: http://dx.doi.org/10.1007/978-1-4020-8021-0_13
http://link.springer.com/content/pdf/10.1007/978-1-4020-8021-0_13.pdf

المؤلفون: Johnstone, Robert W., Parameswaran, M.

المصدر: An Introduction to Surface-Micromachining ; page 115-134 ; ISBN 9781475710779 9781402080210

الاتاحة: http://dx.doi.org/10.1007/978-1-4020-8021-0_10
http://link.springer.com/content/pdf/10.1007/978-1-4020-8021-0_10.pdf

المؤلفون: Johnstone, Robert W., Parameswaran, M.

المصدر: An Introduction to Surface-Micromachining ; page 181-182 ; ISBN 9781475710779 9781402080210

الاتاحة: http://dx.doi.org/10.1007/978-1-4020-8021-0_15
http://link.springer.com/content/pdf/10.1007/978-1-4020-8021-0_15.pdf

المؤلفون: Johnstone, Robert W., Parameswaran, M.

المصدر: An Introduction to Surface-Micromachining ; page 135-152 ; ISBN 9781475710779 9781402080210

الاتاحة: http://dx.doi.org/10.1007/978-1-4020-8021-0_11
http://link.springer.com/content/pdf/10.1007/978-1-4020-8021-0_11.pdf

المؤلفون: Johnstone, Robert W., Parameswaran, M.

المصدر: ISBN 9781475710779 9781402080210.

الاتاحة: http://dx.doi.org/10.1007/978-1-4020-8021-0
http://link.springer.com/content/pdf/10.1007/978-1-4020-8021-0.pdf
http://link.springer.com/content/pdf/10.1007/978-1-4020-8021-0

المؤلفون: Johnstone, Robert W., Parameswaran, M.

المساهمون: Motamedi, M. Edward, Goering, Rolf

المصدر: SPIE Proceedings ; MOEMS and Miniaturized Systems II ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.443076

المؤلفون: Crabtree, H. John, Lauzon, Jana, Morrissey, Yuen C., Taylor, Brian J., Liang, Tina, Johnstone, Robert W., Stickel, Alexander J., Manage, Dammika P., Atrazhev, Alexey, Backhouse, Christopher J., Pilarski, Linda M.

المصدر: Microfluidics and Nanofluidics ; volume 13, issue 3, page 383-398 ; ISSN 1613-4982 1613-4990

الاتاحة: http://dx.doi.org/10.1007/s10404-012-0968-9
http://link.springer.com/content/pdf/10.1007/s10404-012-0968-9.pdf
http://link.springer.com/article/10.1007/s10404-012-0968-9/fulltext.html
http://link.springer.com/content/pdf/10.1007/s10404-012-0968-9

المؤلفون: Johnstone, Robert W.

المصدر: Journal of Micro/Nanolithography, MEMS, and MOEMS ; volume 7, issue 4, page 043006 ; ISSN 1932-5150

الاتاحة: http://dx.doi.org/10.1117/1.2990738
http://nanolithography.spiedigitallibrary.org/article.aspx?articleid=1098845

المؤلفون: Chiu, Yu-Shan (Susan), Chang, Kwan-Shi (Jason), Johnstone, Robert W, Parameswaran, M

المصدر: Journal of Micromechanics and Microengineering ; volume 16, issue 3, page 480-486 ; ISSN 0960-1317 1361-6439

الاتاحة: http://dx.doi.org/10.1088/0960-1317/16/3/002

المؤلفون: Johnstone, Robert W.

URL الوصول: https://explore.openaire.eu/search/publication?articleId=od_______497::2b769a4942b49e4f51f228dffca8372e
http://summit.sfu.ca/item/9138

المؤلفون: Johnstone, Robert W, Parameswaran, M

المصدر: Journal of Micromechanics and Microengineering ; volume 12, issue 6, page 855-861 ; ISSN 0960-1317

الاتاحة: http://dx.doi.org/10.1088/0960-1317/12/6/317

المؤلفون: Pearson, F. J., Davis, E. Mott, Tamers, M. A., Johnstone, Robert W.

المصدر: Radiocarbon ; volume 7, page 296-314 ; ISSN 0033-8222 1945-5755

الاتاحة: http://dx.doi.org/10.1017/s0033822200037280
https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S0033822200037280

المؤلفون: Johnstone, Robert W., Foulds, Ian G., Parameswaran, M.

المصدر: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Mar/Apr2008, Vol. 26 Issue 2, p682-685, 4p, 1 Chart, 2 Graphs

مصطلحات موضوعية: POLYMETHYLMETHACRYLATE, THERMOPLASTICS, RADIATION, PHOTORESISTS, MERCURY