المؤلفون: T. Sandström, Michael Wagner, D. Kunze, P. Dürr, U. Berzinsh, J. Luberek, Dirk Rudloff, P. Björnängen, T. Karlin, J. Heber

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Microelectromechanical systems, Engineering, Spatial light modulator, Optics, law, business.industry, Point (geometry), Contrast (music), Photolithography, business, Lithography, law.invention

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4edf3882089c2237c95c4e50da56e097
https://doi.org/10.1117/12.747015