-
1
المؤلفون: P. Morin, Julien Ryckaert, Doyoung Jang, Lieve Teugels, Efrain Altamirano-Sanchez, M. H. Na, Jürgen Bömmels, F. Schleicher, S. Wang, A. Sepúlveda, Serge Biesemans, C. Lorant, I. Demonie, Gayle Murdoch, E. Dentoni Litta, A. Lesniewska, Zsolt Tokei, Bilal Chehab, Farid Sebaai, Antony Premkumar Peter, N. Nagesh, Naoto Horiguchi, Frederic Lazzarino, Boon Teik Chan, Geert Hellings, O. Varela Pedreira, N. Jourdan, D. Radisic, O. Richard, Z. Tao, Hans Mertens, P. Marien, Anshul Gupta, Nancy Heylen, Steven Demuynck, Katia Devriendt
المصدر: 2020 IEEE International Electron Devices Meeting (IEDM).
مصطلحات موضوعية: Materials science, business.industry, Annealing (metallurgy), chemistry.chemical_element, Dielectric, Electromigration, law.invention, Fin (extended surface), chemistry, law, Optoelectronics, Node (circuits), business, Tin, Spark plug, Scaling
-
2
المؤلفون: N. Jourdan, Katia Devriendt, E. Dupuy, Hans Mertens, S. Paolillo, Guillaume Boccardi, F. Schleicher, E. Sanchez, Romain Ritzenthaler, Frank Holsteyns, Z. Tao, Sylvain Baudot, Sofie Mertens, Haroen Debruyn, Kevin Vandersmissen, Thomas Chiarella, P. Morin, Antony Premkumar Peter, Anshul Gupta, Erik Rosseel, Min-Soo Kim, Nouredine Rassoul, Boon Teik Chan, Christopher J. Wilson, D. Radisic, Lieve Teugels, A. De Keersgieter, D. Yakimets, I. Demonie, N. Bontemps, C. Drijbooms, Sujith Subramanian, Bilal Chehab, Paola Favia, C. Lorant, Farid Sebaai, Steven Demuynck, Frederic Lazzarino, E. Dentoni Litta, G. Mannaert, Houman Zahedmanesh, Yong Kong Siew, J. Cousserier, T. Hopf, B. Briggs, Manoj Jaysankar, Jerome Mitard, K. Kenis, A. Sepúlveda, S. Wang, Naoto Horiguchi, Goutham Arutchelvan, E. Capogreco, O. Varela Pedreira, D. Zhou, Jürgen Bömmels, Zsolt Tokei
المصدر: 2020 IEEE Symposium on VLSI Technology.
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, chemistry.chemical_element, 02 engineering and technology, Tungsten, 021001 nanoscience & nanotechnology, 01 natural sciences, Electromigration, Cmos scaling, CMOS, chemistry, Booster (electric power), Logic gate, 0103 physical sciences, Optoelectronics, 0210 nano-technology, business, Low resistance, Scaling
-
3
المؤلفون: Jürgen Bömmels, Zsolt Tokei, Shreya Kundu, Hugo Bender, Shibesh Dutta, Wilfried Vandervorst, Sven Van Elshocht, Christoph Adelmann, Anshul Gupta, G. Jamieson, Christopher J. Wilson, Sofie Beyne
المصدر: IEEE Electron Device Letters. 39:731-734
مصطلحات موضوعية: 010302 applied physics, Interconnection, Materials science, Scattering, business.industry, Nanowire, 02 engineering and technology, Conductivity, 021001 nanoscience & nanotechnology, 01 natural sciences, Electronic, Optical and Magnetic Materials, Stress (mechanics), Reliability (semiconductor), Electrical resistivity and conductivity, 0103 physical sciences, Thermoelectric effect, Optoelectronics, Electrical and Electronic Engineering, 0210 nano-technology, business
-
4
المؤلفون: Eric Beyne, Jürgen Bömmels, Gayle Murdoch, Zsolt Tőkei, Mario Gonzalez, Joeri De Vos, Kristof Croes, P. Nolmans, Ingrid De Wolf, Luka Kljucar, Joke De Messemaeker
المصدر: Microelectronics Reliability. 79:297-305
مصطلحات موضوعية: 010302 applied physics, Interconnection, Materials science, Passivation, 02 engineering and technology, Temperature cycling, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Chip, 01 natural sciences, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Back end of line, Reliability (semiconductor), Stack (abstract data type), Etching (microfabrication), 0103 physical sciences, Electronic engineering, Electrical and Electronic Engineering, Composite material, 0210 nano-technology, Safety, Risk, Reliability and Quality
-
5
المؤلفون: Nancy Heylen, Liang Gong Wen, Shibesh Dutta, Jürgen Bömmels, Sven Van Elshocht, Frederik Westergaard Østerberg, Olalla Varela Pedreira, B. Briggs, Christophe Detavernie, Mihaela Popovici, Zsolt Tőkei, Kristof Croes, Philippe Roussel, Christoph Adelmann, Christopher J. Wilson, Benjamin Groven, Dirch Hjorth Petersen, Ivan Ciofi, Kris Vanstreels, Karl Opsomer, Ole Hansen
المصدر: ACS Applied Materials & Interfaces. 8:26119-26125
مصطلحات موضوعية: 010302 applied physics, Materials science, Dielectric strength, business.industry, Annealing (metallurgy), Inorganic chemistry, Copper interconnect, chemistry.chemical_element, 02 engineering and technology, Dielectric, 021001 nanoscience & nanotechnology, 01 natural sciences, Electromigration, Ruthenium, Atomic layer deposition, chemistry, 0103 physical sciences, Optoelectronics, General Materials Science, 0210 nano-technology, business, Tin
-
6
المؤلفون: Ivan Ciofi, Jürgen Bömmels, Mario Gonzalez, Houman Zahedmanesh, Kristof Croes, Zsolt Tőkei
المصدر: Microelectronics Reliability. 59:102-107
مصطلحات موضوعية: 010302 applied physics, Interconnection, Engineering, business.industry, Capacitive sensing, Delamination, Context (language use), 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Capacitance, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Back end of line, Reliability (semiconductor), 0103 physical sciences, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Electrical and Electronic Engineering, 0210 nano-technology, Safety, Risk, Reliability and Quality, business, Failure mode and effects analysis
-
7
المؤلفون: Jürgen Bömmels, Ivan Ciofi, Mario Gonzalez, Houman Zahedmanesh, Kristof Croes, Zsolt Tőkei
المصدر: Microelectronic Engineering. 156:70-77
مصطلحات موضوعية: 010302 applied physics, Interconnection, Materials science, 02 engineering and technology, Dielectric, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Capacitance, Atomic and Molecular Physics, and Optics, Finite element method, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Stress (mechanics), chemistry.chemical_compound, Silicon nitride, chemistry, 0103 physical sciences, Ultimate tensile strength, Forensic engineering, Electrical and Electronic Engineering, Composite material, 0210 nano-technology, Reduction (mathematics)
-
8
المؤلفون: Juan Fernando Gomez Granados, Anshul Gupta, Jürgen Bömmels, G. Jamieson, Zsolt Tokei, Shreya Kundu, Christopher J. Wilson, Shibesh Dutta, Christoph Adelmann
المصدر: IEEE Electron Device Letters. 38:949-951
مصطلحات موضوعية: 010302 applied physics, Interconnection, Materials science, Nanowire, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, Conductivity, 021001 nanoscience & nanotechnology, 01 natural sciences, Temperature measurement, Electronic, Optical and Magnetic Materials, Ruthenium, chemistry, Electrical resistivity and conductivity, 0103 physical sciences, Electrical measurements, Electrical and Electronic Engineering, 0210 nano-technology, Scaling
-
9
المؤلفون: Nancy Heylen, Anshul Gupta, Jürgen Bömmels, Zsolt Tokei, Ivan Ciofi, Olalla Varela Pedreira, Christoph Adelmann, Christopher J. Wilson, Bharani Chava, Lieve Teugels, Shreya Kundu, G. Jamieson
المصدر: 2018 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: 010302 applied physics, Standard cell, Interconnection, Materials science, business.industry, Oxide, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, chemistry.chemical_compound, chemistry, Booster (electric power), Electrical resistivity and conductivity, 0103 physical sciences, Thermal, Optoelectronics, 0210 nano-technology, business, Scaling, Voltage drop
-
10
المؤلفون: Kristof Moors, Kirouban Sankaran, Ivan Ciofi, Anshul Gupta, Geoffrey Pourtois, Nicolo Pinna, Christopher J. Wilson, Guillaume Boccardi, Jürgen Bömmels, Zsolt Tokei, G. Jamieson, Shibesh Dutta, Sven Van Eishocht, Shreya Kundu, Christoph Adelmann
المصدر: Proceedings of the IEEE ... International Interconnect Technology Conference
مصطلحات موضوعية: 010302 applied physics, Materials science, Ab initio, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Molecular physics, Process maturity, Line resistance, Electrical resistivity and conductivity, 0103 physical sciences, Ab initio computations, 0210 nano-technology, Material properties, Line (formation), Electronic properties
-
11
المؤلفون: Victor Blanco, Gayle Murdoch, S. Paolillo, Danny Wan, Christoph Adelmann, Bogumila Kutrzeba Kotowska, Nouredine Rassoul, Frederic Lazzarino, Christopher J. Wilson, Jürgen Bömmels, Zsolt Tokei, M. Ercken
المصدر: 2018 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: 010302 applied physics, Interconnection, Materials science, Annealing (metallurgy), business.industry, Extreme ultraviolet lithography, Copper interconnect, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Copper, Ruthenium, chemistry, Electrical resistivity and conductivity, 0103 physical sciences, Optoelectronics, 0210 nano-technology, business, Critical dimension
-
12
المؤلفون: Basoene Briggs, Zaid El-Mekki, Jürgen Bömmels, Kurt G. Ronse, Stephane Lariviere, Peter De Bisschop, Dan Mocuta, Bogumila Kutrzeba Kotowska, Dieter Van den Heuvel, Joost Bekaert, Danny Wan, Greg McIntyre, Arindam Mallik, Nicolas Jourdan, Ivan Ciofi, Marleen H. van der Veen, Janko Versluijs, Patrick Verdonck, Ming Mao, Christopher J. Wilson, Els Kesters, Stefan Decoster, Victor Blanco, Zsolt Tőkei, Nancy Heylen, Christophe Beral, Eric Hendrickx, Ryoung-han Kim
المصدر: Extreme Ultraviolet (EUV) Lithography IX.
مصطلحات موضوعية: 010302 applied physics, Computer science, Extreme ultraviolet lithography, Context (language use), 02 engineering and technology, 021001 nanoscience & nanotechnology, Chip, 01 natural sciences, Line (electrical engineering), 0103 physical sciences, Multiple patterning, Electronic engineering, Node (circuits), 0210 nano-technology, Critical dimension, Block (data storage)
-
13
المؤلفون: Mario Gonzalez, Ingrid De Wolf, Zsolt Tőkei, Kristof Croes, Jürgen Bömmels, Luka Kljucar
المصدر: Microelectronics Reliability. 56:93-100
مصطلحات موضوعية: Optimal design, Engineering, Modulus, Young's modulus, 02 engineering and technology, Topology, 01 natural sciences, Stress (mechanics), Back end of line, symbols.namesake, 0103 physical sciences, Electrical and Electronic Engineering, Safety, Risk, Reliability and Quality, 010302 applied physics, business.industry, Design of experiments, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Reliability engineering, Metric space, symbols, Node (circuits), 0210 nano-technology, business
-
14
المؤلفون: Vladimir Cherman, Jürgen Bömmels, Ingrid De Wolf, Joeri De Vos, Zsolt Tokei, Geert Van der Plas, Mario Gonzalez, Kris Vanstreels
المصدر: Microelectronic Engineering. 137:54-58
مصطلحات موضوعية: Materials science, Stability test, business.industry, Structural engineering, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Finite element method, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Back end of line, Reliability (semiconductor), Induced stress, Stack (abstract data type), Indentation, Mechanical strength, Forensic engineering, Electrical and Electronic Engineering, business
-
15
المصدر: Advances in Patterning Materials and Processes XXXIV.
مصطلحات موضوعية: Fabrication, Materials science, business.industry, Nanotechnology, Integrated circuit, Overlay, Dielectric, Specific surface energy, law.invention, law, Optoelectronics, Layer (object-oriented design), business, Scaling, Block (data storage)
-
16
المؤلفون: O. Varela Pedreira, Danny Wan, Nancy Heylen, Zs. Tokei, S. Decoster, K. Croes, Farid Sebaai, N. Jourdan, S. Paolillo, Katia Devriendt, B. Briggs, Els Kesters, S. Lariviere, Christopher J. Wilson, J. Versluijs, Zaid El-Mekki, Jürgen Bömmels, Julien Ryckaert, Shibesh Dutta, Arindam Mallik, Patrick Verdonck, M. H. van der Veen
المصدر: 2017 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: 010302 applied physics, Materials science, Copper interconnect, Process (computing), 01 natural sciences, 010309 optics, Logic gate, 0103 physical sciences, Trench, Electronic engineering, Process window, Node (circuits), Lithography, Block (data storage)
-
17
المؤلفون: Gayle Murdoch, Quoc Toan Le, Khashayar Babaei Gavan, William Clark, Jürgen Bömmels, Zsolt Tokei, Christopher J. Wilson
المصدر: 2017 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Flow (psychology), Process (computing), Hardware_PERFORMANCEANDRELIABILITY, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Capacitance, Software, Etching (microfabrication), 0103 physical sciences, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Node (circuits), 0210 nano-technology, business, Layer (electronics), Aluminum oxide
-
18
المؤلفون: Jürgen Bömmels, Anshul Gupta, Zsolt Tokei, Shibesh Dutta, Shreya Kundu, Christopher J. Wilson, Kristof Croes, G. Jamieson, Lianggong Wen, Christoph Adelmann
المصدر: 2017 IEEE International Interconnect Technology Conference (IITC).
مصطلحات موضوعية: 010302 applied physics, Materials science, Nanowire, chemistry.chemical_element, Nanotechnology, 02 engineering and technology, Conductivity, 021001 nanoscience & nanotechnology, 01 natural sciences, Ruthenium, chemistry, Transmission electron microscopy, Electrical resistivity and conductivity, 0103 physical sciences, Multiple patterning, Electrical measurements, 0210 nano-technology, Current density
-
19
المؤلفون: Kevin Vandersmissen, M. H. van der Veen, C. Wu, Lianggong Wen, Zs. Tokei, V. Vega Gonzalez, Kristof Croes, J. De Messemaeker, B. Briggs, O. Varela Pedreira, A. Lesniewska, Christoph Adelmann, N. Jourdan, Jürgen Bömmels
المصدر: 2017 IEEE International Reliability Physics Symposium (IRPS).
مصطلحات موضوعية: 010302 applied physics, Materials science, Metallurgy, Delamination, Copper interconnect, chemistry.chemical_element, Time-dependent gate oxide breakdown, 02 engineering and technology, Dielectric, 021001 nanoscience & nanotechnology, 01 natural sciences, Temperature measurement, Copper, Ruthenium, chemistry, 0103 physical sciences, Composite material, 0210 nano-technology, Cobalt
-
20
المؤلفون: Kazuhisa Hasumi, Raf Appeltans, Osamu Inoue, Takumichi Sutani, Paulina Rincon Delgadillo, Naoto Horiguchi, Yutaka Okagawa, Masami Ikota, Basoene Briggs, R. Delhougne, Laurent Souriau, Tom Raymaekers, Christopher J. Wilson, Geert Van den bosch, G. L. Donadio, Arnaud Furnemont, Siddharth Rao, Andrea Fantini, Daisy Zhou, D. Crotti, Luca Di Piazza, Anabela Veloso, Takeyoshi Ohashi, Gouri Sankar Kar, Philippe Leray, Astuko Yamaguchi, Chi Lim Tan, Danilo De Simone, Nadine Collaert, Jürgen Bömmels, Toru Ishimoto, Shunsuke Koshihara, Anne-Laure Charley, Farrukh Yasin, Gian Lorusso
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Back end of line, Materials science, Semiconductor device fabrication, Extreme ultraviolet lithography, Shallow trench isolation, NAND gate, Nanotechnology, Front end of line, Critical dimension, Engineering physics, Metrology