المؤلفون: Rong, B. (author), Van der Drift, E. (author), Van der Heijden, R.W. (author), Salemink, H.W.M. (author)

مصطلحات موضوعية: nanophotonics, nanophotonic crystal, III-V photonic crystal, InP nanophotonic crystal, high aspect ratio, 2D, photonic crystal, gratings, hole and pillar, Cl2+N2 plasma, nanofabrication, nanotechnology

Relation: Proceedings of SPIE, 2006 vol. 6327--0277-786X; http://resolver.tudelft.nl/uuid:9287d9a0-915b-4c86-a1bc-ee4e3a33b44c

الاتاحة: http://resolver.tudelft.nl/uuid:9287d9a0-915b-4c86-a1bc-ee4e3a33b44c

المؤلفون: Rong, Bifeng, van der Drift, Emile, van der Heijden, Rob W., Salemink, Huub W.M.

المساهمون: Dobisz, Elizabeth A., Eldada, Louay A.

المصدر: Rong , B , van der Drift , E , van der Heijden , R W & Salemink , H W M 2006 , 2D InP photonic crystal fabrication process development . in E A Dobisz & L A Eldada (eds) , Nanoengineering : Fabrication, Properties, Optics, and Devices III . , 632715 , Proceedings of SPIE - The International Society for Optical Engineering , vol. 6327 , SPIE , Nanoengineering: Fabrication, Properties, Optics, and Devices III , San Diego, CA , United States , 13/08/06 . https://doi.org/10.1117/12.680281

مصطلحات موضوعية: 2D photonic crystal, Cl +N plasma, Gratings, High aspect ratio, Hole and pillar, III-V photonic crystal, InP nanophotonic crystal, Nanofabrication, Nanophotonic crystal, Nanophotonics, Nanotechnology

Relation: urn:ISBN:9780819464064

الاتاحة: https://research.tue.nl/en/publications/21ed7e21-6901-48fb-8192-2d5ea925ce28
https://doi.org/10.1117/12.680281
http://www.scopus.com/inward/record.url?scp=33751085680&partnerID=8YFLogxK

المصدر: Proceedings of SPIE, 2006 vol. 6327.

مصطلحات موضوعية: III-V photonic crystal, gratings, high aspect ratio, nanotechnology, Cl2+N2 plasma, Physics::Optics, nanophotonics, nanophotonic crystal, hole and pillar, nanofabrication, InP nanophotonic crystal, 2D, photonic crystal

URL الوصول: https://explore.openaire.eu/search/publication?articleId=dris___00893::9275742a8da2b78bbf83087448948c06
http://resolver.tudelft.nl/uuid:9287d9a0-915b-4c86-a1bc-ee4e3a33b44c