المؤلفون: M. Ercken, I. van Puyenbroeck, M. Goethals, Kurt G. Ronse, Myriam Moelants, Georg Pawlowski, Walter Spiess, I. Pollers

المصدر: Microelectronic Engineering. 46:353-357

مصطلحات موضوعية: Materials science, Silicon, business.industry, chemistry.chemical_element, Nanotechnology, Substrate (electronics), Swing, Photoresist, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Numerical aperture, Optics, Resist, chemistry, Electrical and Electronic Engineering, business, Critical dimension, Exposure latitude

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::128fbb2088b579d04a4ba0ed3a6c28a1
https://doi.org/10.1016/s0167-9317(99)80002-1