المؤلفون: Johnston, Ian R., Ashraf, Huma, Bhardwaj, Jy K., Hopkins, Janet, Hynes, Alan M., Nicholls, Glenn, McAuley, Serrita A., Hall, Stephen, Atabo, Lilian, Bogart, Gregory R., Kornblit, Avi, Novembre, Anthony E.

المساهمون: Dobisz, Elizabeth A.

المصدر: SPIE Proceedings ; Emerging Lithographic Technologies IV ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.390054