المؤلفون: Kim, Nakyoon, Lee, Honggoo, Han, Sangjoon, Robinson, John C., Rovira, Pablo, Yoo, Sungchul, Getin, Raphael, Choi, Dongsub, Jeon, Sanghuck, Hong, Minhyung, Kim, Seungyoung, Lee, Jieun, Lee, DongYoung, Oh, Eungryong, Choi, Ahlin, Mengel, Markus

المساهمون: Adan, Ofer, Ukraintsev, Vladimir A.

المصدر: Metrology, Inspection, and Process Control for Microlithography XXXII

الاتاحة: http://dx.doi.org/10.1117/12.2299976

المؤلفون: Honggoo Lee, Sangjun Han, Minhyung Hong, Seungyong Kim, Jieun Lee, DongYoung Lee, Eungryong Oh, Ahlin Choi, Nakyoon Kim, Robinson, John C., Mengel, Markus, Rovira, Pablo, Sungchul Yoo, Getin, Raphael, Dongsub Choi, Sanghuck Jeon

المصدر: Proceedings of SPIE; 2018, Vol. 10585, p1-9, 9p

المؤلفون: Ukraintsev, Vladimir A., Adan, Ofer, Lee, Honggoo, Han, Sangjun, Hong, Minhyung, Kim, Seungyoung, Lee, Jieun, Lee, DongYoung, Oh, Eungryong, Choi, Ahlin, Kim, Nakyoon, Robinson, John C., Mengel, Markus, Pablo, Rovira, Yoo, Sungchul, Getin, Raphael, Choi, Dongsub, Jeon, Sanghuck

المصدر: Proceedings of SPIE; March 2018, Vol. 10585 Issue: 1 p105852A-105852A-9, 952678p

المؤلفون: Sheng-Min Chiu, Chin-Fu Lin, Yu-Ren Wang, Zhiming Jiang, Chao-Yu Cheng, Juli Cheng, Zhengquan Tan, Chien-Jen Huang, Getin Raphael, Tsuo-Wen Lu, Shao-Ju Chang, Juan-Yuan Wu, Tsai-Yu Wen

المصدر: ECS Meeting Abstracts. :1802-1802

مصطلحات موضوعية: Materials science, chemistry, business.industry, Calculus, Spectroscopic ellipsometry, Optoelectronics, chemistry.chemical_element, business, Boron, Energy (signal processing), Line (formation)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::87ed29b7a4014c24260549ffad1651be
https://doi.org/10.1149/ma2014-02/35/1802