المؤلفون: Mathias Franz, Mahnaz Safian Jouzdani, Lysann Kaßner, Marcus Daniel, Frank Stahr, Stefan E. Schulz

المصدر: Beilstein Journal of Nanotechnology, Vol 14, Iss 1, Pp 951-963 (2023)

مصطلحات موضوعية: atomic layer deposition (ald), cobalt, low-temperature ald, peald, plasma-enhanced ald, xps, Technology, Chemical technology, TP1-1185, Science, Physics, QC1-999

وصف الملف: electronic resource

Relation: https://doaj.org/toc/2190-4286

URL الوصول: https://doaj.org/article/82e156ae26c543a2afd135994b8163b5

المؤلفون: Sebastian Leszczynski, Carsten Strobel, Barbara Leszczynska, Sylva Waurenschk, Sören Röhlecke, Frank Stahr, Matthias Albert, Johann W. Bartha

المصدر: Thin Solid Films. 754:139296

مصطلحات موضوعية: Materials Chemistry, Metals and Alloys, Surfaces and Interfaces, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f55b65eeec686c7d01ec8a0541576770
https://doi.org/10.1016/j.tsf.2022.139296

المؤلفون: Bjoern Meyer, Ralph Schmittgens, Frank Stahr, Klaus Prof. Dr. Schade, Eberhard Schultheiss

المصدر: Plasma Processes and Polymers. 4:S831-S834

مصطلحات موضوعية: Materials science, Polymers and Plastics, Silicon, Analytical chemistry, chemistry.chemical_element, Chemical vapor deposition, Condensed Matter Physics, Plasma polymerization, chemistry.chemical_compound, chemistry, Chemical engineering, Plasma-enhanced chemical vapor deposition, Siloxane, Thin film, Silicon oxide, Plasma processing

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9a28d3cff21239dbc9698464ac9a0562
https://doi.org/10.1002/ppap.200731915

المؤلفون: Daniel Wächter, Claus Peter Soose, Matthias R. Krödel, Frank Stahr

المصدر: SPIE Proceedings.

مصطلحات موضوعية: Engineering, Fabrication, business.industry, Supply chain, visual_art, visual_art.visual_art_medium, Nanotechnology, High stiffness, Instrumentation (computer programming), Ceramic, business, Engineering physics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::490e8fe8d1df1673746f9f80045d017f
https://doi.org/10.1117/12.2186404

المؤلفون: Matthias R. Krödel, Daniel Wächter, Frank Stahr, Claus Peter Soose

المصدر: Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation.

مصطلحات موضوعية: Amorphous silicon, chemistry.chemical_compound, Materials science, Fabrication, Optical coating, chemistry, Supply chain, visual_art, Silicon carbide, visual_art.visual_art_medium, Nanotechnology, High stiffness, Ceramic

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4709a6b33574d2d8c32f54d4286d7db0
https://doi.org/10.1117/12.2056867