المؤلفون: Mochi, Iacopo, Goldberg, Kenneth A., Fontaine, Bruno La, Wood, Obert

وصف الملف: application/pdf

URL الوصول: https://escholarship.org/uc/item/0qk738rq

المؤلفون: Naulleau, Patrick P., Anderson, Chris N., Dean, Kim, Denham, Paul, Goldberg, Kenneth A., Hoef, Brian, Fontaine, Bruno La, Wallow, Tom

وصف الملف: application/pdf

URL الوصول: https://escholarship.org/uc/item/77k7w13s

المؤلفون: Fontaine, Bruno La, Pawloski, Adam R., Wood, Obert R., Levinson, Harry, Denham, Paul, Gullikson, Eric, Hoef, Brian, Naulleau, Patrick, Holfeld, Christian, Chovino, Christian, Letzkus, Florian

وصف الملف: application/pdf

URL الوصول: https://escholarship.org/uc/item/4zv2405r

المؤلفون: Feigl, Torsten, Perske, Marco, Pauer, Hagen, Fiedler, Tobias, Yulin, Sergiy, Kaiser, Norbert, Tünnermann, Andreas, Böwering, Nobert R., Ershov, Alex I., Dea, Silvia de, Hoffmann, Kay, Fontaine, Bruno la, Fomenkov, Igor V., Brandt, David

مصطلحات موضوعية: EUV collector mirror, multilayer mirror coating, collector lifetime

Time: 620

Relation: Conference "Extreme Ultraviolet (EUV) Lithography" 2013; Extreme Ultraviolet (EUV) Lithography IV; https://publica.fraunhofer.de/handle/publica/379880

الاتاحة: https://publica.fraunhofer.de/handle/publica/379880
https://doi.org/10.1117/12.2015492

المؤلفون: Naulleau, Patrick P., Anderson, Christopher N., Chiu, Jerrin, Denham, Paul, George, Simi, Goldberg, Kenneth A., Goldstein, Michael, Hoef, Brian, Hudyma, Russ, Jones, Gideon, Koh, Chawon, Fontaine, Bruno La, Ma, Andy, Montgomery, Warren, Niakoula, Dimitra, Park, Joo-on, Wallow, Tom, Wurm, Stefan

المصدر: Microelectronic Engineering ; volume 86, issue 4-6, page 448-455 ; ISSN 0167-9317

الاتاحة: http://dx.doi.org/10.1016/j.mee.2009.03.013
https://api.elsevier.com/content/article/PII:S0167931709001919?httpAccept=text/xml
https://api.elsevier.com/content/article/PII:S0167931709001919?httpAccept=text/plain

المؤلفون: Desparois, Alain, Fontaine, Bruno La

المصدر: IEEE Transactions on Plasma Science. Oct2000, Vol. 28 Issue 5, p1755. 8p. 2 Diagrams, 7 Graphs.

مصطلحات موضوعية: LASERS, ELECTRIC discharges

المؤلفون: Naulleau, Patrick P., Anderson, Christopher N., Baclea-an, Lorie-Mae, Denham, Paul, George, Simi, Goldberg, Kenneth A., Goldstein, Michael, Hoef, Brian, Jones, Gideon, Koh, Chawon, Fontaine, Bruno La, Montgomery, Warren, Wallow, Tom

المصدر: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Nov2009, Vol. 27 Issue 6, p2911-2915, 5p, 6 Black and White Photographs, 1 Diagram, 4 Graphs

مصطلحات موضوعية: VACUUM technology, PHOTORESISTS, MASKS (Electronics), OPTICAL resolution, COHERENCE (Optics)

المؤلفون: Lin, Benjamin, Fontaine, Bruno La, Brandt, David, Farrar, Nigel

المصدر: ECS Transactions; March 2011, Vol. 34 Issue: 1 p231-236, 6p