المؤلفون: Xu, Xiaomo, Prüfer, Thomas, Wolf, Daniel, Engelmann, Hans-Jürgen, Bischoff, Lothar, Hübner, René, Heinig, Karl-Heinz, Möller, Wolfhard, Facsko, Stefan, von Borany, Johannes, Hlawacek, Gregor

المصدر: Beilstein Journal of Nanotechnology 9 (2018) 2883-2892

مصطلحات موضوعية: Condensed Matter - Mesoscale and Nanoscale Physics, Physics - Applied Physics

URL الوصول: http://arxiv.org/abs/1910.04389

المؤلفون: Xu, Xiaomo, Heinig, Karl-Heinz, Möller, Wolfhard, Engelmann, Hans-Jürgen, Klingner, Nico, Gharbi, Ahmed, Tiron, Raluca, von Borany, Johannes, Hlawacek, Gregor

مصطلحات موضوعية: Physics - Applied Physics, Condensed Matter - Materials Science

URL الوصول: http://arxiv.org/abs/1906.09975

المؤلفون: Borany, Johannes von, Engelmann, Hans-Jürgen, Heinig, Karl-Heinz, Amat, Esteve, Hlawacek, Gregor, Klüpfel, Fabian J., Hübner, René, Möller, Wolfhard, Pourteau, Marie-Line, Rademaker, Guido, Rommel, Mathias, Baier, Leander, Pichler, Peter, Perez-Murano, Francesc, Tiron, Raluca

مصطلحات موضوعية: CMOS, Single-electron transistor, Nanostructure fabrication, Nanopillars, Silicon nanodot, Self-organization, Ion-beam mixing

وصف الملف: application/pdf

Relation: Semiconductor Science and Technology; Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology; 688072; https://publica.fraunhofer.de/handle/publica/439370; https://doi.org/10.24406/publica-1154

الاتاحة: https://publica.fraunhofer.de/handle/publica/439370
https://doi.org/10.1088/1361-6641/acbe5d
https://doi.org/10.24406/publica-1154

المؤلفون: Pourteau, Marie-Line, Gharbi, Ahmed, Brianceau, Pierre, Dallery, Jacques-Alexandre, Laulagnet, Fabien, Rademaker, Guido, Tiron, Raluca, Engelmann, Hans-Juergen, von Borany, Johannes, Heinig, Karl-Heinz, Rommel, Mathias, Baier, Leander

المساهمون: Département Plate-Forme Technologique (DPFT), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Vistec Electron Beam GmbH, Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Fraunhofer Institute for Integrated Systems and Device Technology (Fraunhofer IISB), Fraunhofer (Fraunhofer-Gesellschaft), European Project: 688072,H2020,H2020-ICT-2015,IONS4SET(2016)

المصدر: ISSN: 2590-0072 ; Micro and Nano Engineering ; https://cea.hal.science/cea-03409432 ; Micro and Nano Engineering, 2020, 9, https://doi.org/10.1016/j.mne.2020.100074. ⟨10.1016/j.mne.2020.100074⟩.

مصطلحات موضوعية: Single-electron-transistor, Multilayer nanopillars, Si nanodots, E-beam lithography, ICP-RIE, EFTEM, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics

Relation: info:eu-repo/grantAgreement//688072/EU/Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology/IONS4SET; cea-03409432; https://cea.hal.science/cea-03409432; https://cea.hal.science/cea-03409432/document; https://cea.hal.science/cea-03409432/file/Sub-20%20nm%20multilayer%20nanopillar%20patterning%20for%20hybrid%20SETCMOS%20integration.pdf

الاتاحة: https://cea.hal.science/cea-03409432
https://cea.hal.science/cea-03409432/document
https://cea.hal.science/cea-03409432/file/Sub-20%20nm%20multilayer%20nanopillar%20patterning%20for%20hybrid%20SETCMOS%20integration.pdf
https://doi.org/10.1016/j.mne.2020.100074

المؤلفون: Prüfer, Thomas, Möller, Wolfhard, Heinig, Karl-Heinz, Wolf, Daniel, Engelmann, Hans-Jürgen, Xu, Xiaomo, von Borany, Johannes

المساهمون: Horizon 2020 Framework Programme

المصدر: Journal of Applied Physics ; volume 125, issue 22 ; ISSN 0021-8979 1089-7550

الاتاحة: http://dx.doi.org/10.1063/1.5096451
https://pubs.aip.org/aip/jap/article-pdf/doi/10.1063/1.5096451/15230942/225708_1_online.pdf

المؤلفون: Prüfer, Thomas, Möller, Wolfhard, Heinig, Karl-Heinz, Wolf, Daniel, Engelmann, Hans-Jürgen, Xu, Xiaomo, von Borany, Johannes

المصدر: Journal of Applied Physics; 6/14/2019, Vol. 125 Issue 22, pN.PAG-N.PAG, 10p, 3 Color Photographs, 1 Diagram, 1 Chart, 4 Graphs

مصطلحات موضوعية: COMPUTER simulation, MIXING, MONTE Carlo method, DYNAMIC simulation, SILICON oxide

المؤلفون: Moral, Alberto del, Amat, E., Engelmann, Hans-Jürgen, Pourteau, Marie-Line, Rademaker, Guido, Quirion, D., Torres-Herrero, N., Rommel, Mathias, Heinig, Karl Heinz H., Borany, Johannes von, Tiron, Raluca, Bausells, Joan, Perez-Murano, Francesc

مصطلحات موضوعية: CMOS, hybrid circuit, MOSFET, single electron transistor, vertical nanopillar

Relation: Semiconductor Science and Technology; Ion-irradiation-induced Si Nanodot Self-Assembly for Hybrid SET-CMOS Technology; https://publica.fraunhofer.de/handle/publica/447964

الاتاحة: https://publica.fraunhofer.de/handle/publica/447964
https://doi.org/10.1088/1361-6641/ac9f61

المؤلفون: Borany, J., Engelmann, Hans-Jürgen, Heinig, K.-H., Hlawacek, G., Hübner, R., Klüpfel, F., Möller, W., Pourteau, M.-L., Rademaker, G., Rommel, M., Baier, L., Pichler, P., Tiron, R.

المصدر: Publication date: 2022-07-11 Open accessDOI: 10.14278/rodare.1804Versions: 10.14278/rodare.1805License: CC-BY-4.0

مصطلحات موضوعية: Silicon nanodot, Single-electron transistor, Nanopillars, CMOS, Ion-beam mixing, Phase separation, nanostructure fabrication, self-organization

URL الوصول: https://explore.openaire.eu/search/publication?articleId=od______4577::6b578ace376a7530a98bf87834492a85
https://www.hzdr.de/publications/Publ-34906-1

المؤلفون: von Borany, Johannes, Engelmann, Hans-Jürgen, Heinig, Karl-Heinz, Hlawacek, Gregor, Hübner, René, Klüpfel, Fabian, Möller, Wolfhard, Pourteau, Marie-Line, Rademaker, Guido, Rommel, Mathias, Baier, Leander, Pichler, Peter, Tiron, Raluca

مصطلحات موضوعية: CMOS, Single-electron transistor, nanostructure fabrication, self-organization, Silicon nanodot, Nanopillars, Ion-beam mixing, Phase separation

Relation: url:https://www.hzdr.de/publications/Publ-34906; url:https://www.hzdr.de/publications/Publ-34842; url:https://rodare.hzdr.de/communities/rodare; https://rodare.hzdr.de/record/1805; oai:rodare.hzdr.de:1805

الاتاحة: https://rodare.hzdr.de/record/1805
https://doi.org/10.14278/rodare.1805

المؤلفون: Dittmar, Kornelia, Ohsiek, Susanne, Klein, Christoph, Weisheit, Martin, Lenski, Markus, Erben, Elke, Triyoso, Dina, Binder, Robert, Metzger, Joachim, Hempel, Klaus, Engelmann, Hans-Jürgen

المصدر: Microscopy and Microanalysis ; volume 20, issue S3, page 2054-2055 ; ISSN 1431-9276 1435-8115

مصطلحات موضوعية: Instrumentation

الاتاحة: http://dx.doi.org/10.1017/s1431927614012008
https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S1431927614012008

المؤلفون: Hähnel, Angelika, Reiche, Manfred, Moutanabbir, Oussama, Blumtritt, Horst, Geisler, Holm, Höntschel, Jan, Engelmann, Hans-Jürgen

المصدر: Microscopy and Microanalysis ; volume 18, issue 1, page 229-240 ; ISSN 1431-9276 1435-8115

الاتاحة: https://doi.org/10.1017/s1431927611012657
https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S1431927611012657

المؤلفون: Engelmann, Hans-Jürgen

المساهمون: von Borany, Johannes

Relation: info:eu-repo/grantAgreement/EC/H2020/688072/; url:https://www.hzdr.de/publications/Publ-32276; url:https://www.hzdr.de/publications/Publ-32129; url:https://rodare.hzdr.de/communities/ecfunded; url:https://rodare.hzdr.de/communities/fwi; url:https://rodare.hzdr.de/communities/matter; url:https://rodare.hzdr.de/communities/rodare; https://rodare.hzdr.de/record/807; oai:rodare.hzdr.de:807

الاتاحة: https://rodare.hzdr.de/record/807
https://doi.org/10.14278/rodare.807

المؤلفون: Chuvilin, Andrey, Kaiser, Ute, de Robillard, Quentin, Engelmann, Hans-Jürgen

مصطلحات موضوعية: Physical: Letter

وصف الملف: text/html

Relation: http://jmicro.oxfordjournals.org/cgi/content/short/dfi069v1; http://dx.doi.org/10.1093/jmicro/dfi069

الاتاحة: http://jmicro.oxfordjournals.org/cgi/content/short/dfi069v1
https://doi.org/10.1093/jmicro/dfi069

المؤلفون: Gruenewald, Wolfgang, Engelmann, Hans-Juergen, Volkmann, Beate

المصدر: Microscopy and Microanalysis ; volume 10, issue S02, page 1166-1167 ; ISSN 1431-9276 1435-8115

الاتاحة: https://doi.org/10.1017/s1431927604881911
https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S1431927604881911

المؤلفون: Engelmann, Hans-Juergen, Huebner, RenË, Hecker, Michael, Mattern, Norbert, Wenzel, Christian, Zschech, Ehrenfried, Wetzig, Klaus

المصدر: Microscopy and Microanalysis ; volume 10, issue S02, page 616-617 ; ISSN 1431-9276 1435-8115

الاتاحة: https://doi.org/10.1017/s143192760488200x
https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S143192760488200X

المؤلفون: Engelmann, Hans-Jürgen

المصدر: Nuclear Technology ; volume 121, issue 2, page 148-161 ; ISSN 0029-5450 1943-7471

الاتاحة: http://dx.doi.org/10.13182/nt98-a2827
https://www.tandfonline.com/doi/pdf/10.13182/NT98-A2827

المؤلفون: Zschech, Ehrenfried, Engelmann, Hans-Jürgen, Meyer, Moritz Andreas, Kahlert, Volker, Vairagar, Anand V., Mhaisalkar, Subodh G., Krishnamoorthy, Ahila, Yan, Minyu, Tu, K. N., Sukharev, Valeriy

المصدر: International Journal of Materials Research: Zeitschrift fuer Metallkunde; February 2022, Vol. 96 Issue: 9 p966-971, 6p

المؤلفون: Geisler, Holm, Weisheit, Martin, Hofmann, Petra, Engelmann, Hans‐Juergen

المصدر: Advanced Engineering Materials ; volume 19, issue 8 ; ISSN 1438-1656 1527-2648

الاتاحة: http://dx.doi.org/10.1002/adem.201600744
https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fadem.201600744
https://onlinelibrary.wiley.com/doi/pdf/10.1002/adem.201600744

المؤلفون: Dittmar, Kornelia, Triyoso, Dina H., Erben, Elke, Metzger, Joachim, Binder, Robert, Brongersma, Hidde H., Weisheit, Martin, Engelmann, Hans‐Jürgen

المصدر: Surface and Interface Analysis ; volume 49, issue 12, page 1175-1186 ; ISSN 0142-2421 1096-9918

الاتاحة: http://dx.doi.org/10.1002/sia.6312
https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fsia.6312
https://onlinelibrary.wiley.com/doi/full/10.1002/sia.6312