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المؤلفون: Jeroen Henri Antoine Maria Van Buul, Robert van de Laar, Emile Naburgh, Eric van den Heuvel, Ton de Win, Martien Maas, Frans G. Holthuysen, Falco C. M. J. M. van Delft, Francisco Gonzalez Rodriguez, Frank J.H.M. van der Kruis
المصدر: Microelectronic Engineering. 86:956-960
مصطلحات موضوعية: Materials science, Silicon, Analytical chemistry, chemistry.chemical_element, Nanotechnology, Glassy carbon, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, Resist, chemistry, Sputtering, Chemical-mechanical planarization, Electrical and Electronic Engineering, Reactive-ion etching, Carbon, Hydrogen silsesquioxane
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2
المؤلفون: Gerhard Gross, Christoph Ebm, Falco C. M. J. M. van Delft, Elmar Platzgummer, Emile Naburgh, Hans Loeschner
المصدر: Microelectronic Engineering. 85:937-941
مصطلحات موضوعية: Argon, Materials science, Ion beam, business.industry, Aperture, chemistry.chemical_element, Condensed Matter Physics, computer.software_genre, Stencil, Atomic and Molecular Physics, and Optics, Charged particle, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Simulation software, Optics, chemistry, Sputtering, Electrical and Electronic Engineering, Projection (set theory), business, computer
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3
المؤلفون: Jacob Hooker, Robert Lander, Florence Cubaynes, Tom Schram, F. Roozeboom, Jeroen van Zijl, Martien Maas, Eric van den Heuvel, Emile Naburgh, J.G.M. van Berkum, Y. Tamming, Thuy Dao, Kirklen Henson, Marc Schaekers, Annemie Van Ammel, Zsolt Tokei, Marc Demand, Charles Dachs
المصدر: ECS Meeting Abstracts. :632-632