المؤلفون: Haase, Micha, Ecke, Ramona, Schulz, Stefan E.

المصدر: AMC 2015 – Advanced Metallization Conference

مصطلحات موضوعية: info:eu-repo/classification/ddc/620, ddc:620, Low-k-Dielektrikum, Opferschicht, ultra low-k dielectric, sacrificial layer, free standing metal lines, hybrid stack, gap fill

Relation: urn:nbn:de:bsz:ch1-qucosa-206986; qucosa:20503

الاتاحة: https://monarch.qucosa.de/id/qucosa%3A20515
https://monarch.qucosa.de/api/qucosa%3A20515/attachment/ATT-0/
https://monarch.qucosa.de/api/qucosa%3A20515/attachment/ATT-1/

المؤلفون: Waechtler, Thomas, Oswald, Steffen, Roth, Nina, Jakob, Alexander, Lang, Heinrich, Ecke, Ramona, Schulz, Stefan E., Gessner, Thomas, Moskvinova, Anastasia, Schulze, Steffen, Hietschold, Michael

المصدر: Journal of The Electrochemical Society, Vol. 156, No. 6, pp. H453-H459 (2009); Digital Object Identifier (DOI): 10.1149/1.3110842

مصطلحات موضوعية: info:eu-repo/classification/ddc/540, ddc:540, info:eu-repo/classification/ddc/530, ddc:530, info:eu-repo/classification/ddc/620, ddc:620, info:eu-repo/classification/ddc/660, ddc:660, Atomschichtepitaxie, Dampfdruckkurve, Diffusionsbarriere, Diketonate , Durchstrahlungselektronenmikroskopie, Elektronen-Energieverlustspektroskopie, Elektronenbeugung, Ellipsometrie, Kraftmikroskopie, Kupferkomplexe, Kupferoxide, Metallisieren, Metallisierungsschicht, Phosphane, Rasterelektronenmikroskop, Ruthenium, Röntgen-Photoelektronenspektroskopie, Siliciumdioxid, Tantal, Tantalnitride, ULSI, Atomic Layer Deposition (ALD), Atomic force microscopy (AFM), Beta-Diketonate, Copper Oxide, Copper(I), Damascene, Diffusion Barrier, Electron diffraction, Electron energy loss spectroscopy (EELS), Interconnect, Metallization, Scanning electron microscopy (SEM), Silicon Oxide, Spectroscopic ellipsometry, Tantalum, Tantalum Nitride, Transmission electron microscopy (TEM), Vapor Pressure, X-ray photoelectron spectroscopy (XPS)

الاتاحة: https://monarch.qucosa.de/id/qucosa%3A19121
https://monarch.qucosa.de/api/qucosa%3A19121/attachment/ATT-0/
https://monarch.qucosa.de/api/qucosa%3A19121/attachment/ATT-1/

المؤلفون: Ecke, Ramona

Thesis Advisors: Schulz, Stefan, Wielage, Bernhard, Geßner, Thomas, Engelmann, Hans-Jürgen, Technische Universität Chemnitz

مصطلحات موضوعية: info:eu-repo/classification/ddc/600, ddc:600, Amorpher Zustand, Diffusionsbarriere, Halbleitertechnologie, Kupfermetallisierung, MIS-Struktur, PECVD, WNx, WSiN

الاتاحة: https://monarch.qucosa.de/id/qucosa%3A18678
https://monarch.qucosa.de/api/qucosa%3A18678/attachment/ATT-0/
https://monarch.qucosa.de/api/qucosa%3A18678/attachment/ATT-1/

المؤلفون: Waechtler, Thomas, Shen, Yingzhong, Jakob, Alexander, Ecke, Ramona, Schulz, Stefan E., Wittenbecher, Lars, Sterzel, Hans-Josef, Tiefensee, Kristin, Oswald, Steffen, Schulze, Steffen, Lang, Heinrich, Hietschold, Michael, Gessner, Thomas

المصدر: Poster presentation; Materials for Advanced Metallization Conference (MAM 2006), 6 to 8 March 2006, Grenoble, France

مصطلحات موضوعية: info:eu-repo/classification/ddc/620, ddc:620, CVD-Verfahren, Kupfer, Metallisieren, ULSI, Decarboxylierung, Kupfer(I)-Carboxylat

الاتاحة: https://monarch.qucosa.de/id/qucosa%3A18471
https://monarch.qucosa.de/api/qucosa%3A18471/attachment/ATT-0/
https://monarch.qucosa.de/api/qucosa%3A18471/attachment/ATT-1/

المؤلفون: Haase, Micha, Melzer, Marcel, Lang, Norbert, Ecke, Ramona, Zimmermann, Sven, van Helden, Jean-Pierre H., Schulz, Stefan E.

مصطلحات موضوعية: ddc:530, Absorption spectroscopy, Deposition, Dry etching, Plasma applications, Polymer films, Quantum cascade lasers, Semiconducting films, Silicon, Silicon compounds, Spectroscopic ellipsometry, X ray photoelectron spectroscopy, Fluorocarbon-based plasma, Plasma treatment, Polymer deposition, Product concentration, Temporal behavior, Time resolved measurement, Ultra low k materials, Variable angle spectroscopic ellipsometry, Fluorine compounds

وصف الملف: application/pdf

Relation: ESSN:2158-3226; https://oa.tib.eu/renate/handle/123456789/6649; https://doi.org/10.34657/5696

الاتاحة: https://oa.tib.eu/renate/handle/123456789/6649
https://doi.org/10.34657/5696

المؤلفون: Haase, Micha, Melzer, Marcel, Lang, Norbert, Ecke, Ramona, Zimmermann, Sven, van Helden, Jean-Pierre H., Schulz, Stefan E.

المساهمون: Bundesministerium für Bildung und Forschung, Electronic Components and Systems for European Leadership

المصدر: AIP Advances ; volume 10, issue 6 ; ISSN 2158-3226

الاتاحة: http://dx.doi.org/10.1063/1.5125498
https://pubs.aip.org/aip/adv/article-pdf/doi/10.1063/1.5125498/12823535/065212_1_online.pdf

المؤلفون: Hoffmann, Maria A, Sharma, Apoorva, Matthes, Patrick, Okano, Shun, Hellwig, Olav, Ecke, Ramona, Zahn, Dietrich R T, Salvan, Georgeta, Schulz, Stefan E

المساهمون: Deutsche Forschungsgemeinschaft, The Fraunhofer Internal Programmes under

المصدر: Journal of Physics: Condensed Matter ; volume 32, issue 5, page 055702 ; ISSN 0953-8984 1361-648X

الاتاحة: http://dx.doi.org/10.1088/1361-648x/ab4d2f
http://iopscience.iop.org/article/10.1088/1361-648X/ab4d2f
http://iopscience.iop.org/article/10.1088/1361-648X/ab4d2f/pdf
https://iopscience.iop.org/article/10.1088/1361-648X/ab4d2f/pdf
https://iopscience.iop.org/article/10.1088/1361-648X/ab4d2f

المؤلفون: Zschenderlein, U., Zhang, H., Ecke, Ramona, Jöhrmann, N., Wunderle, Bernhard

Relation: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) 2021; 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2021; https://publica.fraunhofer.de/handle/publica/411675

الاتاحة: https://publica.fraunhofer.de/handle/publica/411675
https://doi.org/10.1109/EuroSimE52062.2021.9410834

المؤلفون: Jöhrmann, N., Ecke, Ramona, Wunderle, Bernhard

Relation: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) 2021; 22nd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2021; https://publica.fraunhofer.de/handle/publica/411786

الاتاحة: https://publica.fraunhofer.de/handle/publica/411786
https://doi.org/10.1109/EuroSimE52062.2021.9410851

المؤلفون: Ecke, Ramona.

الاتاحة: http://deposit.d-nb.de/cgi-bin/dokserv?idn=98454089X
http://archiv.tu-chemnitz.de/pub/2007/0034/data/Ecke_Promo.pdf
http://archiv.tu-chemnitz.de/pub/2007/0034

المؤلفون: Pérez, Nicolás, Melzer, Michael, Makarov, Denys, Ueberschär, Olaf, Ecke, Ramona, Schulz, Stefan E., Schmidt, Oliver G.

مصطلحات موضوعية: Galvanomagnetic effects, Magnetic recording, Magnetostriction, Silicon wafers, Bending cycles

Time: 530

وصف الملف: application/pdf

الاتاحة: https://oa.tib.eu/renate/handle/123456789/9951
https://doi.org/10.34657/8989

المؤلفون: Jöhrmann, N., Ecke, Ramona, Wunderle, Bernhard

Relation: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) 2020; 21st International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2020; https://publica.fraunhofer.de/handle/publica/409482

الاتاحة: https://publica.fraunhofer.de/handle/publica/409482
https://doi.org/10.1109/EuroSimE48426.2020.9152706

المؤلفون: Koehler, Nicole, Attallah, Ahmed G., Liedke, Maciej O., Butterling, Maik, Hirschmann, Eric, Ecke, Ramona, Wagner, Andreas, Schulz, Stefan E.

المصدر: 2020 IEEE International Interconnect Technology Conference (IITC) ; page 112-114

الاتاحة: http://dx.doi.org/10.1109/iitc47697.2020.9515601
http://xplorestaging.ieee.org/ielx7/9515561/9515567/09515601.pdf?arnumber=9515601

المؤلفون: Kiani, M., Du, N., Bürger, D., Skorupa, I., Ecke, Ramona, Schulz, Stefan E., Schmidt, H.

Relation: International Conference on Electronics, Circuits and Systems (ICECS) 2019; 26th IEEE International Conference on Electronics, Circuits and Systems, ICECS 2019; https://publica.fraunhofer.de/handle/publica/410542

الاتاحة: https://publica.fraunhofer.de/handle/publica/410542
https://doi.org/10.1109/ICECS46596.2019.8965060

المؤلفون: Du, Nan, Kiani, Mahdi, Zhao, Xianyue, Burger, Danilo, Schmidt, Oliver G., Ecke, Ramona, Schulz, Stefan E., Schmidt, Heidemarie, Polian, Ilia

المصدر: 2019 IEEE 4th International Verification and Security Workshop (IVSW) ; page 67-70

الاتاحة: http://dx.doi.org/10.1109/ivsw.2019.8854394
http://xplorestaging.ieee.org/ielx7/8850848/8854381/08854394.pdf?arnumber=8854394

المؤلفون: Attallah, A.G., Köhler, Nicole, Liedke, M.O., Butterling, M., Hirschmann, E., Ecke, Ramona, Schulz, Stefan E., Wagner, A.

Time: 541

Relation: Microporous and mesoporous materials; 398216953; https://publica.fraunhofer.de/handle/publica/265421

الاتاحة: https://publica.fraunhofer.de/handle/publica/265421
https://doi.org/10.1016/j.micromeso.2020.110457

المؤلفون: Elsherif, Ahmed Gamal Attallah, Koehler, Nicole, Liedke, Maciej Oskar, Butterling, Maik, Hirschmann, Eric, Ecke, Ramona, Schulz, Stefan E., Wagner, Andreas

مصطلحات موضوعية: PALS, FTIR, ULK, Curing

Relation: url:https://www.hzdr.de/publications/Publ-31002; url:https://www.hzdr.de/publications/Publ-31402; url:https://rodare.hzdr.de/communities/elbe; url:https://rodare.hzdr.de/communities/hzdr; url:https://rodare.hzdr.de/communities/rodare; https://rodare.hzdr.de/record/322; oai:rodare.hzdr.de:322

الاتاحة: https://rodare.hzdr.de/record/322
https://doi.org/10.14278/rodare.322

المؤلفون: Ueberschär, O., Almeida, M.J., Matthes, Patrick, Müller, Mathias, Ecke, Ramona, Exner, H., Schulz, Stefan E.

Relation: Spintronics Symposium 2015; Conference "Optics and Photonics" 2015; Spintronics VIII; https://publica.fraunhofer.de/handle/publica/398475

الاتاحة: https://publica.fraunhofer.de/handle/publica/398475
https://doi.org/10.1117/12.2188001

المؤلفون: Hofmann, Lutz, Dempwolf, S., Reuter, Danny, Ecke, Ramona, Gottfried, Knut, Schulz, Stefan E., Knechtel, R., Geßner, Thomas

Relation: Conference "Smart Sensors, Actuators, and MEMS" 2015; Conference "Cyber Physical Systems" 2015; Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; https://publica.fraunhofer.de/handle/publica/390181

الاتاحة: https://publica.fraunhofer.de/handle/publica/390181
https://doi.org/10.1117/12.2178598

المؤلفون: Franz, Mathias, Ecke, Ramona, Kaufmann, C., Kriz, J., Schulz, Stefan E.

Relation: International Interconnect Technology Conference (IITC) 2015; Materials for Advanced Metallization Conference (MAM) 2015; IEEE International Interconnect Technology Conference and IEEE Materials for Advanced Metallization Conference, IITC/MAM 2015; https://publica.fraunhofer.de/handle/publica/394674

الاتاحة: https://publica.fraunhofer.de/handle/publica/394674
https://doi.org/10.1109/IITC-MAM.2015.7325640