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1Academic Journal
المصدر: Sensors, Vol 24, Iss 22, p 7144 (2024)
مصطلحات موضوعية: silicon nanowire, e-beam lithography, EBL, dry etching, DRIE, nanofabrication, Chemical technology, TP1-1185
وصف الملف: electronic resource
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2Academic Journal
المؤلفون: Amani Ouirimi, Alex Chamberlain Chime, Nixson Loganathan, Mahmoud Chakaroun, Quentin Gaimard, Alexis P. A. Fischer
المصدر: Micromachines, Vol 15, Iss 2, p 260 (2024)
مصطلحات موضوعية: OLED, micro-cavity, DFB, e-beam lithography, process optimization, OLD, Mechanical engineering and machinery, TJ1-1570
Relation: https://www.mdpi.com/2072-666X/15/2/260; https://doaj.org/toc/2072-666X; https://doaj.org/article/fcd045d4dc7d4e7a8fe995127dda744b
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3Academic Journal
المؤلفون: Sukjong Bae, Flip de Jong, Rik Nuyts, Rahul Sasikumar, Haifeng Yuan, Seongjune Min, Jin Choi, Sanghee Lee, Joonsoo Park, Johan Hofkens
المصدر: Micro and Nano Engineering, Vol 19, Iss , Pp 100180- (2023)
مصطلحات موضوعية: E-beam lithography, Photomask, Super resolution fluorescence microscopy, E-beam resist, Electronics, TK7800-8360, Technology (General), T1-995
وصف الملف: electronic resource
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4Academic Journal
المؤلفون: Fedor Sidorov, Alexander Rogozhin
المصدر: Polymers, Vol 15, Iss 3731, p 3731 (2023)
مصطلحات موضوعية: grayscale e-beam lithography, PMMA, thermal reflow, nonuniform viscosity profile, Organic chemistry, QD241-441
Relation: https://www.mdpi.com/2073-4360/15/18/3731; https://doaj.org/toc/2073-4360; https://doaj.org/article/8640959ea607438dbf21b6415db80cbd
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5Conference
المساهمون: Padmore, Howard
المصدر: Conference: Pan American SRI2010
وصف الملف: Medium: ED
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6Academic Journal
المؤلفون: Javier Hermosa, Aurelio Hierro-Rodríguez, Carlos Quirós, María Vélez, Andrea Sorrentino, Lucía Aballe, Eva Pereiro, Salvador Ferrer, José I. Martín
المصدر: Micromachines; Volume 13; Issue 2; Pages: 204
مصطلحات موضوعية: e-beam lithography, magnetic nanostructures, transmission X-ray microscopy
وصف الملف: application/pdf
Relation: D:Materials and Processing; https://dx.doi.org/10.3390/mi13020204
الاتاحة: https://doi.org/10.3390/mi13020204
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7Academic Journal
المؤلفون: Kumar, Deepak
المصدر: Theses and Dissertations--Electrical and Computer Engineering
مصطلحات موضوعية: Micro and nano fabrication, variable pressure e-beam lithography, large area positive-tone writing, tunable emission, enhanced fluorescence, Electromagnetics and Photonics, Electronic Devices and Semiconductor Manufacturing, Nanotechnology Fabrication
وصف الملف: application/pdf
Relation: https://uknowledge.uky.edu/ece_etds/199; https://uknowledge.uky.edu/context/ece_etds/article/1211/viewcontent/Gas_assisted_electron_beam_patterning_processes.pdf
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8Academic Journal
المؤلفون: Anderson, Erik
مصطلحات موضوعية: Instrumentation -- other, diffraction grating, multilayer, interference lithography, e-beam lithography, EUV, soft x-rays
وصف الملف: application/pdf
URL الوصول: https://escholarship.org/uc/item/1g9326m0
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9Academic Journal
المؤلفون: Hui Yang (91136), Sa Cai (10290996), Yifei Zhang (122595), Dongping Wu (9335807), Xiaosheng Fang (1422040)
مصطلحات موضوعية: Biophysics, Medicine, Cell Biology, Biotechnology, Infectious Diseases, Physical Sciences not elsewhere classified, MoS 2 FETs, e-beam lithography-free method, MoS 2 FET fabrication, Lithography-Free Fabricated MoS 2 F., MoS 2, Enhanced Electrical Properties, Chromium Contacts Molybdenum disulfide, contact, annealing limits materials
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10Academic Journal
المؤلفون: Kaixi Bi, Jiliang Mu, Wenping Geng, Linyu Mei, Siyuan Zhou, Yaokai Niu, Wenxiao Fu, Ligang Tan, Shuqi Han, Xiujian Chou
المصدر: Materials; Volume 14; Issue 16; Pages: 4634
مصطلحات موضوعية: graphene nanostructure, e-beam lithography, copper-catalyzed growth, local heating effect, in-situ synthesis
وصف الملف: application/pdf
Relation: https://dx.doi.org/10.3390/ma14164634
الاتاحة: https://doi.org/10.3390/ma14164634
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11Academic JournalA Nanoplasmonic-Based Biosensing Approach for Wide-Range and Highly Sensitive Detection of Chemicals
المؤلفون: Francesco Arcadio, Luigi Zeni, Aldo Minardo, Caterina Eramo, Stefania Di Ronza, Chiara Perri, Girolamo D’Agostino, Guido Chiaretti, Giovanni Porto, Nunzio Cennamo
المصدر: Nanomaterials; Volume 11; Issue 8; Pages: 1961
مصطلحات موضوعية: nanoplasmonic sensors, slab waveguides, plastic optical fibers, biochemical sensors, optical sensors, e-beam lithography
وصف الملف: application/pdf
Relation: https://dx.doi.org/10.3390/nano11081961
الاتاحة: https://doi.org/10.3390/nano11081961
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12Academic Journal
المؤلفون: Georgia Geka, George Papageorgiou, Margarita Chatzichristidi, Andreas Germanos Karydas, Vassilis Psycharis, Eleni Makarona
المصدر: Nanomaterials; Volume 11; Issue 3; Pages: 762
مصطلحات موضوعية: polymer nanocomposites, CuO nanostructures, PMMA, e-beam lithography, resist process engineering, X-ray fluorescence, chemical synthesis
وصف الملف: application/pdf
Relation: Nanocomposite Materials; https://dx.doi.org/10.3390/nano11030762
الاتاحة: https://doi.org/10.3390/nano11030762
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13Academic Journal
المؤلفون: Falco C M J M van Delft, Ayyappasamy Sudalaiyadum Perumal, Anja van Langen-Suurling, Charles de Boer, Ondřej Kašpar, Viola Tokárová, Frank W A Dirne, Dan V Nicolau
المصدر: New Journal of Physics, Vol 23, Iss 8, p 085009 (2021)
مصطلحات موضوعية: biocomputation, nanofabrication, microfluidics, motile bacteria, e-beam lithography, E. coli, Science, Physics, QC1-999
Relation: https://doi.org/10.1088/1367-2630/ac1d38; https://doaj.org/toc/1367-2630; https://doaj.org/article/c511ee825c374aa1ad3ded968b1b40e3
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14Academic Journal
المؤلفون: Voronov,, Dmitriy
مصطلحات موضوعية: Instrumentation -- other, diffraction grating, diffraction efficiency, blazed grating, multilayer coating, e-beam lithography, wet anisotropic etch, EUV, soft x-rays, atomic force microscopy
وصف الملف: application/pdf
URL الوصول: https://escholarship.org/uc/item/12d88251
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15Academic Journal
المؤلفون: M.-L. Pourteau, A. Gharbi, P. Brianceau, J.-A. Dallery, F. Laulagnet, G. Rademaker, R. Tiron, H.-J. Engelmann, J. von Borany, K.-H. Heinig, M. Rommel, L. Baier
المصدر: Micro and Nano Engineering, Vol 9, Iss , Pp 100074- (2020)
مصطلحات موضوعية: Single-electron-transistor, Multilayer nanopillars, Si nanodots, E-beam lithography, ICP-RIE, EFTEM, Electronics, TK7800-8360, Technology (General), T1-995
وصف الملف: electronic resource
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16Academic Journal
المؤلفون: G.P. Papageorgiou, A.G. Karydas, G. Papageorgiou, V. Kantarelou, E. Makarona
المصدر: Micro and Nano Engineering, Vol 8, Iss , Pp 100063- (2020)
مصطلحات موضوعية: Periodic nanostructures, ZnO nanostructures, E-beam lithography, Hydrothermal growth, Micro- XRF, Electronics, TK7800-8360, Technology (General), T1-995
وصف الملف: electronic resource
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17Academic Journal
المؤلفون: Min Tu, Benzheng Xia, Dmitry E. Kravchenko, Max Lutz Tietze, Alexander John Cruz, Ivo Stassen, Tom Hauffman, Joan Teyssandier, Steven De Feyter, Zheng Wang, Roland A. Fischer, Benedetta Marmiroli, Heinz Amenitsch, Ana Torvisco, Miriam de J. Velásquez-Hernández, Paolo Falcaro, Rob Ameloot
مصطلحات موضوعية: MOFs, Deep X-Ray Lithography, e-beam lithography, patterning
Relation: https://doi.org/10.1038/s41563-020-00827-x; https://zenodo.org/communities/eu; oai:zenodo.org:4317840
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18Academic Journal
المؤلفون: Gutiérrez, M., Reyes, Df, Araujo, D., Landesman, Jean-Pierre, Pargon, E.
المساهمون: Universidad de Cádiz = University of Cádiz (UCA), Institut de Physique de Rennes (IPR), Université de Rennes (UR)-Centre National de la Recherche Scientifique (CNRS), Laboratoire des technologies de la microélectronique (LTM ), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA), TEC2017-86347-C2-1-R, Ministerio de Economía y Competitividad, H2020-LCE-2014-1.640947, Horizon 2020 Framework Programme
المصدر: ISSN: 0361-5235.
مصطلحات موضوعية: InP etch, HR-STEM images, quantitative strain analysis, SiN x patterns, e-beam lithography, [PHYS]Physics [physics]
Relation: hal-02917609; https://hal.univ-grenoble-alpes.fr/hal-02917609; https://hal.univ-grenoble-alpes.fr/hal-02917609/document; https://hal.univ-grenoble-alpes.fr/hal-02917609/file/gutierrez-auteur.pdf
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19Academic Journal
المؤلفون: Arivanandhan, Gowtham, Li, Zixiong, Curtis, Sabrina Michelle, Velvaluri, Prasanth, Quandt, Eckhard, Kohl, Manfred
مصطلحات موضوعية: article, ScholarlyArticle, ddc:600, ddc:500, Published Version, microactuator, shape memory bimorph effect, finite element modeling, e-beam lithography, silicon technology
Relation: Proceedings -- 2504-3900; https://doi.org/10.3390/iecat2020-08501; https://nbn-resolving.org/urn:nbn:de:gbv:8:3-2021-00039-6; https://macau.uni-kiel.de/receive/macau_mods_00000969; https://macau.uni-kiel.de/servlets/MCRFileNodeServlet/macau_derivate_00002020/proceedings-64-00008-v2.pdf
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20Academic Journal
المؤلفون: Daniel Kappe, Laila Bondzio, Joris Swager, Andreas Becker, Björn Büker, Inga Ennen, Christian Schröder, Andreas Hütten
المصدر: Sensors; Volume 20; Issue 16; Pages: 4596
مصطلحات موضوعية: magnetic nanoparticle properties, Heusler phases, e-beam lithography, magnetic ratchets
وصف الملف: application/pdf
Relation: Physical Sensors; https://dx.doi.org/10.3390/s20164596
الاتاحة: https://doi.org/10.3390/s20164596