المؤلفون: Hillmann, Frank, Dobereiner, Stefan, Gittinger, Christian, Reiter, Richard, Falk, Gunther, Bruck, Hans-Jurgen, Scheuring, Gerd, Bosser, Artur, Heiden, Michael, Hoppen, Gerhard, Sulik, Wolfgang, Vollrath, Wolfgang

المصدر: SPIE Proceedings ; 21st European Mask and Lithography Conference ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.637295

المؤلفون: Schatz, Thomas, Hauffe, Bertram, Dobereiner, Stefan, Bruck, Hans-Jurgen, Brendel, Bernd, Bettin, Lutz, Roth, Klaus-Dieter, Steinberg, Walter, Speckbacher, Peter, Sedlmeier, Wolfgang, Engel, Thomas, Hassler-Grohne, Wolfgang, Mirande, Werner, Bosse, Harald

المساهمون: Behringer, Uwe F. W.

المصدر: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents ; SPIE Proceedings ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.514952
http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=767799

المؤلفون: Maisack, Michael, Kendziorra, Eckhard, Kretschmar, Peter, Kunz, Mathias, Staubert, Rüdiger, Döbereiner, Stefan, Englhauser, Jakob, Pietsch, Wolfgang, Reppin, Claus, Trümper, Joachim, Efremov, Valeri, Kaniovsky, Sascha, Kusnetzov, Sascha, Sunyaev, Rashid

المصدر: AIP Conference Proceedings ; volume 304, page 451-455 ; ISSN 0094-243X

الاتاحة: http://dx.doi.org/10.1063/1.45604

المؤلفون: Maisack, Michael, Staubert, Rüdiger, Döbereiner, Stefan, Pietsch, Wolfgang, Kaniovsky, Sascha, Sunyaev, Rashid

المصدر: AIP Conference Proceedings ; volume 304, page 346-350 ; ISSN 0094-243X

الاتاحة: http://dx.doi.org/10.1063/1.45586

المؤلفون: Hourd, Andrew C., Grimshaw, Anthony, Scheuring, Gerd, Gittinger, Christian, Dobereiner, Stefan, Hillmann, Frank, Bruck, Hans-Jurgen, Hartmann, Hans, Ordynskyy, Volodymyr, Peter, Kai, Chen, Shiuh-Bin, Chen, Parkson W., Jonckheere, Rik M., Philipsen, Vicky, Schatz, Thomas, Sommer, Karl

المصدر: Proceedings of SPIE; Nov2003, Issue 1, p148-157, 10p