المؤلفون: Ibrahim Sari, Michael Kraft, Ioannis Zeimpekis

مصطلحات موضوعية: Dry release, Microelectromechanical systems, DRIE, Materials science, Dicing free release, Materialtechnik, Silicon on insulator, Nanotechnology, General Medicine, HF VPE, Accelerometer, MEMS, Die preparation, Etching (microfabrication), Deep reactive-ion etching, Wafer dicing, Wafer, Proof mass, Engineering(all), Micro fabrication

وصف الملف: text

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7de23348f0951e8eb8137d760a60aee3
https://eprints.soton.ac.uk/409584/