المؤلفون: Kaindl, Reinhard, Gupta, Tushar, Bluemel, Alexander, Pei, Songfeng, Hou, Peng-Xiang, Liu, Chang, Patter, Paul, Popovic, Karl, Dergez, David, Elibol, Kenan, Schaffer, Erhard, Liu, Johan, 1960, Eder, Dominik, Kieslinger, Dietmar, Ren, Wencai, Hartmann, Paul, Waldhauser, Wolfgang, Bayer, Bernhard C.

المصدر: ACS Omega. 6(50):34301-34313

وصف الملف: electronic

URL الوصول: https://research.chalmers.se/publication/527944
https://research.chalmers.se/publication/527944/file/527944_Fulltext.pdf

المؤلفون: Dergez, Dávid

المساهمون: Schmid, Ulrich, TU Wien, Österreich, Mayrhofer, Paul Heinz, Strasser, Gottfried, Schmid, Silvan

مصطلحات موضوعية: Siliziumnitrid, Manipulation von Spannungen, Sputter-Beschichtung, ICP-CVD, Leckstromverhalten, Silicon Nitride, Stress Engineering, Sputter Deposition, Leakage Current Behaviour

وصف الملف: xiv, 194 Blätter

Relation: https://doi.org/10.34726/hss.2017.32287; http://hdl.handle.net/20.500.12708/8263; AC14515731; urn:nbn:at:at-ubtuw:1-106025

الاتاحة: https://doi.org/10.34726/hss.2017.32287
https://hdl.handle.net/20.500.12708/8263