يعرض 1 - 20 نتائج من 1,631 نتيجة بحث عن '"De Gendt, Stefan"', وقت الاستعلام: 1.05s تنقيح النتائج
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    المصدر: Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, 124962D (27 April 2023)

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    المساهمون: IMEC (IMEC), Catholic University of Leuven = Katholieke Universiteit Leuven (KU Leuven), Laboratoire Hubert Curien (LabHC), Institut d'Optique Graduate School (IOGS)-Université Jean Monnet - Saint-Étienne (UJM)-Centre National de la Recherche Scientifique (CNRS)

    المصدر: ISSN: 0734-2101 ; Journal of Vacuum Science & Technology A ; https://hal.science/hal-04531012 ; Journal of Vacuum Science & Technology A, 2024, 42 (3), ⟨10.1116/6.0003380⟩.

    مصطلحات موضوعية: [SPI]Engineering Sciences [physics]

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    المساهمون: Burkhardt, Martin, van Lare, Claire

    المصدر: Optical and EUV Nanolithography XXXVII

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    المساهمون: Agentschap Innoveren en Ondernemen, KU Leuven, Elettra-Sincrotrone Trieste, CALIPSOplus, H2020 Marie Sklodowska-Curie Actions, Fonds Wetenschappelijk Onderzoek, Red Espanola de Supercomputacion

    المصدر: ACS Nano ; volume 16, issue 3, page 4974-4974 ; ISSN 1936-0851 1936-086X