المؤلفون: Antonello Santangelo, Cinzia Marcellino, Giuseppe Faro, Paolo Badalà, Alessandra Alberti, Giovanna Pellegrino

المصدر: physica status solidi c. 11:160-163

مصطلحات موضوعية: Materials science, Silicon, business.industry, chemistry.chemical_element, Sputter deposition, Condensed Matter Physics, Crystallography, chemistry.chemical_compound, chemistry, Etching (microfabrication), Sputtering, Silicide, Optoelectronics, Texture (crystalline), Crystallite, business, Layer (electronics)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b5f5dc21eebc5ab5dd066429a1163315
https://doi.org/10.1002/pssc.201300132