المؤلفون: Umberto Celano, Andres Gomez, Paola Piedimonte, Sabine Neumayer, Liam Collins, Mihaela Popovici, Karine Florent, Sean R. C. McMitchell, Paola Favia, Chris Drijbooms, Hugo Bender, Kristof Paredis, Luca Di Piazza, Stephen Jesse, Jan Van Houdt, Paul van der Heide

المصدر: Nanomaterials, Vol 10, Iss 8, p 1576 (2020)

مصطلحات موضوعية: HfO2-based ferroelectrics, Si-doped HfO2, binary oxide ferroelectrics, atomic force microscopy, band-excitation piezoresponse force microscopy, Chemistry, QD1-999

وصف الملف: electronic resource

Relation: https://www.mdpi.com/2079-4991/10/8/1576; https://doaj.org/toc/2079-4991

URL الوصول: https://doaj.org/article/ad7caa6c7cc54dbabdff908aa25de20f

المؤلفون: Liam Collins, Stephen Jesse, Umberto Celano, S. R. C. McMitchell, Paola Piedimonte, Chris Drijbooms, Kristof Paredis, Paul van der Heide, Hugo Bender, Luca Di Piazza, Sabine M. Neumayer, Mihaela Popovici, Jan Van Houdt, Paola Favia, Karine Florent, Andrés Gómez

المساهمون: Department of Energy (US)

المصدر: Nanomaterials
BASE-Bielefeld Academic Search Engine
Nanomaterials, Vol 10, Iss 1576, p 1576 (2020)
Volume 10
Issue 8
Digital.CSIC. Repositorio Institucional del CSIC
instname

مصطلحات موضوعية: Technology, Materials science, HfO2-based ferroelectrics, Si-doped HfO, Chemistry, Multidisciplinary, General Chemical Engineering, Materials Science, Oxide, Materials Science, Multidisciplinary, band-excitation piezoresponse force microscopy, 02 engineering and technology, Dielectric, RRAM, 01 natural sciences, Article, Physics, Applied, lcsh:Chemistry, chemistry.chemical_compound, 0103 physical sciences, Energy level, General Materials Science, Nanoscience & Nanotechnology, Thin film, Si-doped HfO2, Leakage (electronics), 010302 applied physics, Science & Technology, binary oxide ferroelectrics, atomic force microscopy, biology, business.industry, Physics, OXIDE, 021001 nanoscience & nanotechnology, Hafnia, biology.organism_classification, Ferroelectricity, Piezoelectricity, Chemistry, INSIGHTS, lcsh:QD1-999, chemistry, Physical Sciences, Science & Technology - Other Topics, Optoelectronics, 0210 nano-technology, business

وصف الملف: Electronic; application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a782ad15567e1ee8fa36babaa5bed592
https://pubmed.ncbi.nlm.nih.gov/32796703

المؤلفون: Wilfried Vandervorst, Komal Pandey, Thomas Hantschel, Chris Drijbooms, Kristof Paredis

المصدر: Scientific Reports, Vol 10, Iss 1, Pp 1-15 (2020)
Scientific Reports

مصطلحات موضوعية: Materials science, Spreading resistance profiling, Ion beam, MIGRATION, chemistry.chemical_element, lcsh:Medicine, 02 engineering and technology, INDUCED LATERAL DAMAGE, AMORPHIZATION, 01 natural sciences, Focused ion beam, Characterization and analytical techniques, Article, Techniques and instrumentation, CRYSTALLINE SI, Nanoscience and technology, 0103 physical sciences, Microscopy, Electronic devices, DEACTIVATION, Gallium, SILICON, lcsh:Science, 010302 applied physics, Science & Technology, Multidisciplinary, Dopant, business.industry, lcsh:R, DEFECTS, 021001 nanoscience & nanotechnology, Amorphous solid, Multidisciplinary Sciences, Nanoscale devices, RESOLUTION, chemistry, SIMULATION, Science & Technology - Other Topics, Optoelectronics, lcsh:Q, IMPLANTATION, 0210 nano-technology, business, Current density

وصف الملف: Electronic

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f4ac2bf8f03793304753a0d7bcb75b86
https://pubmed.ncbi.nlm.nih.gov/32913186

المؤلفون: A. Kanniainen, Chris Drijbooms, Thijs Boehme, Hugo Bender, N. Bosman, P. van der Heide, Thomas Hantschel, Steven Folkersma, Kristof Paredis, Umberto Celano, Lennaert Wouters, Wilfried Vandervorst

المصدر: 2019 IEEE International Electron Devices Meeting (IEDM).

مصطلحات موضوعية: Materials science, Nanoelectronics, business.industry, Atomic force microscopy, Optoelectronics, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::65a9e0c7606b3f6841a8e46c66cfa0f3
https://doi.org/10.1109/iedm19573.2019.8993661

المؤلفون: Hugo Bender, Chris Drijbooms, David Erickson, Andrew Cockburn, Alain Moussa, Harold Philipsen, Kevin Vandersmissen, Herbert Struyf

المصدر: ECS Journal of Solid State Science and Technology. 3:Q109-Q119

مصطلحات موضوعية: business.product_category, Materials science, business.industry, Process (computing), Stacking, Acoustic microscopy, Nanotechnology, Electronic, Optical and Magnetic Materials, Metrology, Optics, Measured depth, Die (manufacturing), Point (geometry), Wafer, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::aab75e8d12f64cfb2c9eb63ab53e6477
https://doi.org/10.1149/2.005406jss

المؤلفون: Hugo Bender, Alex Radisic, Chris Drijbooms, Wouter Ruythooren, Harold Philipsen, S. Rodet, Ole Lühn, Zaid El-Mekki, M. Honore, Silvia Armini

المصدر: Microelectronic Engineering. 88:701-704

مصطلحات موضوعية: Materials science, Plating, Metallurgy, Copper plating, Electrical and Electronic Engineering, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4057f58d2bcbea2e79c61d67e1e32953
https://doi.org/10.1016/j.mee.2010.06.030

المؤلفون: Alex Radisic, Hugo Bender, J. Geypen, Chris Drijbooms, Harold Philipsen, P. Van Marcke

المصدر: Journal of Materials Science. 47:6497-6504

مصطلحات موضوعية: Materials science, Silicon, business.industry, Scanning electron microscope, Mechanical Engineering, technology, industry, and agriculture, Analytical chemistry, chemistry.chemical_element, Focused ion beam, Dual beam, Characterization (materials science), chemistry, Mechanics of Materials, Transmission electron microscopy, Optoelectronics, General Materials Science, Wafer, Specimen preparation, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c3ebf2f7b860c75865e9bee48991c5b2
https://doi.org/10.1007/s10853-010-5144-6

المؤلفون: Alexis Franquet, S. Garaud, Guy Vereecke, F. Sinapi, Thierry Conard, Youssef Travaly, I. Hoflijk, Bert Brijs, Chao Zhao, Henny Volders, Zsolt Tokei, Hugo Bender, Chris Drijbooms, Wei-Min Li, D. Vanhaeren, H. Sprey, Alain M. Jonas, Rudy Caluwaerts, L. Carbonell, Alain Moussa

المصدر: Microelectronic Engineering. 84:2460-2465

مصطلحات موضوعية: Materials science, Oxide, Analytical chemistry, chemistry.chemical_element, Tungsten hexafluoride, Nanotechnology, Tungsten, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, Atomic layer deposition, chemistry, Electrical resistivity and conductivity, Plasma-enhanced chemical vapor deposition, Electrical and Electronic Engineering, Ternary operation, Layer (electronics)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5f9ce21c9de7693605db1d66e1e00413
https://doi.org/10.1016/j.mee.2007.05.023

المؤلفون: Chris Drijbooms, Denis Shamiryan, Peter Verheyen, Hans Weijtmans, Philip Absil, Chantal J. Arena, R. Wise, Sophie Passefort, Akira Inoue, Matty Caymax, John McCormack, Haruyuki Sorada, Alain Moussa, Roger Loo, Geert Eneman, Vladimir Machkaoutsan, Pierre Tomasini, Stephane Godny, Rita Rooyackers, Stefan Jakschik, Frederik Leys, Christian Walczyk, Byeong Chan Lee, Sangjin Hyun, Tinne Delande, Hugo Bender, Luc Geenen

المصدر: ECS Transactions. 3:453-465

مصطلحات موضوعية: Engineering, business.industry, North central, business, Engineering physics, PMOS logic

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5b5865cae7713a5efb7770e4b2dda609
https://doi.org/10.1149/1.2355843

المؤلفون: Bart Vandevelde, Melina Lofrano, Steven Demuynck, Philippe Roussel, Christopher J. Wilson, Thomas Kauerauf, Hugo Bender, Guido Groeseneken, Zsolt Tokei, Chris Drijbooms, Kristof Croes, Geni Butera

المصدر: 2010 IEEE International Reliability Physics Symposium.

مصطلحات موضوعية: Materials science, Transistor, chemistry.chemical_element, Tungsten, Electromigration, Copper, Fluence, Electrical contacts, law.invention, Stress (mechanics), chemistry, law, Electronic engineering, Composite material, Joule heating

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::47de99a4630cb4e099e9435e1dde8bdb
https://doi.org/10.1109/irps.2010.5488744

المؤلفون: Hugo Bender, Kristof Kellens, Bart Swinnen, Aleksandar Radisic, Chris Drijbooms, Philippe M. Vereecken, Ole Lühn, Geert Doumen, Wouter Ruythooren

المصدر: Scopus-Elsevier

مصطلحات موضوعية: Materials science, business.industry, law, Plating, Optoelectronics, Polishing, Integrated circuit, Electrochemistry, business, law.invention

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4641643b4044770200eb7a4168ea6f4b
https://doi.org/10.1557/proc-1112-e03-06

المؤلفون: Chris Drijbooms, Laurens F Kwakman, Alexis Franquet, Hugo Bender, Wilfried Vandervorst, Trudo Clarysse, Brigitte Parmentier

المصدر: Semiconductor Science and Technology. 30:114015

مصطلحات موضوعية: Materials science, Ion beam, Scanning electron microscope, business.industry, Analytical chemistry, Condensed Matter Physics, Focused ion beam, Die (integrated circuit), Electronic, Optical and Magnetic Materials, Ion, Transmission electron microscopy, Materials Chemistry, Optoelectronics, Wafer, Electrical and Electronic Engineering, business, Beam (structure)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::cbc209bcae8c68244d6d2eebc365e9cd
https://doi.org/10.1088/0268-1242/30/11/114015

المؤلفون: Hugo Bender, P. Roussel, Chris Drijbooms, P. Van Marcke

المصدر: The 1998 international conference on characterization and metrology for ULSI technology.

مصطلحات موضوعية: Materials science, Ion implantation, Ion beam, business.industry, Transmission electron microscopy, Analytical chemistry, Optoelectronics, Crystallite, Specimen preparation, business, Focused ion beam, Amorphous solid

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0ccfb45fae02cd1e038d6a6fd73e23d5
https://doi.org/10.1063/1.56880