المؤلفون: Weber, O., Josse, E., Andrieu, F., Cros, A., Richard, E., Perreau, P., Baylac, E., Degors, N., Gallon, C., Perrin, E., Chhun, S., Petitprez, E., Delmedico, S., Simon, J., Druais, G., Lasserre, S., Mazurier, J., Guillot, N., Bernard, E., Bianchini, R., Parmigiani, L., Gerard, X., Pribat, C., Gourhant, O., Abbate, F., Gaumer, C., Beugin, V., Gouraud, P., Maury, P., Lagrasta, S., Barge, D., Loubet, N., Beneyton, R., Benoit, D., Zoll, S., Chapon, J.-D., Babaud, L., Bidaud, M., Gregoire, M., Monget, C., Le-Gratiet, B., Brun, P., Mellier, M., Pofelski, A., Clement, L.R., Bingert, R., Puget, S., Kruck, J.-F., Hoguet, D., Scheer, P.

المصدر: 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers

الاتاحة: http://dx.doi.org/10.1109/vlsit.2014.6894343
http://xplorestaging.ieee.org/ielx7/6886509/6894335/06894343.pdf?arnumber=6894343

المؤلفون: Trouiller, Yorick, Belledent, Jerome, Chapon, J. D., Rousset, V., Rody, Yves F., Manakli, Serdar, Goirand, Pierre-Jerome

المساهمون: Yen, Anthony

المصدر: SPIE Proceedings ; Optical Microlithography XVI ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.485527
http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.485527

المؤلفون: Manakli, Serdar, Trouiller, Yorick, Toublan, Olivier, Schiavone, Patrick, Miramond, Corinne, Rody, Yves F., Sundermann, Frank, Chapon, J. D., Goirand, Pierre-Jerome

المساهمون: Yen, Anthony

المصدر: SPIE Proceedings ; Optical Microlithography XV ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.474597
http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.474597

المؤلفون: Trouiller, Yorick, Belledent, Jerome, Chapon, J. D., Rousset, V., Rody, Yves F., Manakli, Serdar, Goirand, Pierre-Jerome

المصدر: Proceedings of SPIE; Nov2003, Issue 1, p1231-1240, 10p