المؤلفون: Shelby Forrester Nelson, Carolyn Rae Ellinger

المصدر: Chemistry of Materials. 26:1514-1522

مصطلحات موضوعية: Fabrication, Materials science, business.industry, General Chemical Engineering, Doping, Oxide, Nanotechnology, General Chemistry, Substrate (electronics), Dielectric, Atomic layer deposition, chemistry.chemical_compound, Semiconductor, Chemical engineering, chemistry, Materials Chemistry, Thin film, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::fce6ca022edd06b1aec608cfc9c6c11e
https://doi.org/10.1021/cm402464z

المؤلفون: Shelby Forrester Nelson, Lee W. Tutt, Carolyn Rae Ellinger

المصدر: ECS Meeting Abstracts. :1605-1605

مصطلحات موضوعية: Engineering drawing, law, Computer science, Transistor, Hardware_INTEGRATEDCIRCUITS, Engineering physics, law.invention

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b2a21fe22befa62dbb288bb432689b36
https://doi.org/10.1149/ma2014-02/30/1605