المؤلفون: Tez, S., Kaya, M.

مصطلحات موضوعية: Capacitive resonator, Finite element method (FEM), Frequency response, Mass sensor, Micro-electro-mechanical systems (MEMS), Capacitance, Capacitive sensors, Finite element method, MEMS, Organic chemicals, Resonators, Volatile organic compounds, Capacitive resonators, Comb-drive resonator, Frequency response analysis, MEMS (microelectromechanical system), Micro-electro-mechanical system, Polymer thin films, Thin film layers, Volatile organic chemicals

Relation: Electrica; Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı; https://doi.org/10.5152/electrica.2024.23124; https://hdl.handle.net/11499/56840; 24; 210; 217; WOS:001275870300020

الاتاحة: https://hdl.handle.net/11499/56840
https://doi.org/10.5152/electrica.2024.23124

المؤلفون: AytaÅŸkın, E., Tez, Serdar

مصطلحات موضوعية: Finite element method (FEM), Capacitive resonator, Microelectromechanical systems (MEMS), Resonance frequency shift, Sensor, Electromechanical devices, MEMS, Natural frequencies, Resonators, Capacitive resonators, Detection mechanism, Mechanical and electrical, Micro electromechanical system (MEMS), Resonance frequencies, Resonator structures, Theoretical calculations, Structural design

Relation: Electrica; Makale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı; https://hdl.handle.net/11499/37361; https://doi.org/10.5152/ELECTRICA.2020.19054; 20; 41; 51; WOS:000518150600005

الاتاحة: https://hdl.handle.net/11499/37361
https://doi.org/10.5152/ELECTRICA.2020.19054

المؤلفون: Ergun Aytaskin, Serdar Tez

مصطلحات موضوعية: Analyte, Resonator structures, Materials science, Mechanical and electrical, Resonance frequency shift, Capacitive sensing, Theoretical calculations, Natural frequencies, Resonator, Microelectromechanical systems (MEMS), Resonators, Resonance frequencies, Electrical and Electronic Engineering, Sensor, Microelectromechanical systems, Capacitive resonators, Finite element method (FEM), business.industry, element method (FEM), resonance frequency shift, sensor, MEMS, capacitive resonator, finite, Electromechanical devices, Micro electromechanical system (MEMS), Structural design, Optoelectronics, business, Detection mechanism, Capacitive resonator

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::17be51b1f2fc7241a2e088e3b294363e
https://hdl.handle.net/11499/37361

المؤلفون: Belkadi, Nesrine

المساهمون: Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS), Université de Franche-Comté, Bernard Dulmet, Thomas Baron

المصدر: Micro et nanotechnologies/Microélectronique. Université de Franche-Comté, 2016. Français. ⟨NNT : 2016BESA2088⟩

مصطلحات موضوعية: Ocillators, Capacitive resonators, Bulk acoustic waves, Accoustic energy-trapping, Electriostatic transduction, Oscillateurs, Structure mesa / mesa -inversée, Inverted -mesastructures, Energie piégée, Thickness extensional modes, MEMS, Ondes élastiques de volume, Mode d'extension compréssion, Excitation électrostatique, Resonateurs capacitifs, Clean room microfabrication, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, Microfabrication salle blanche

URL الوصول: https://explore.openaire.eu/search/publication?articleId=od______2592::f8daa76b2c87d1b2ef15e977f61c27d1
https://tel.archives-ouvertes.fr/tel-02466459/file/these_A_BELKADI_Nesrine_2016.pdf

المؤلفون: Belkadi, Nesrine

المساهمون: Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST), Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté COMUE (UBFC)-Université Bourgogne Franche-Comté COMUE (UBFC), Université de Franche-Comté, Bernard Dulmet, Thomas Baron

المصدر: https://theses.hal.science/tel-02466459 ; Micro et nanotechnologies/Microélectronique. Université de Franche-Comté, 2016. Français. ⟨NNT : 2016BESA2088⟩.

مصطلحات موضوعية: MEMS, Ocillators, Capacitive resonators, Electriostatic transduction, Bulk acoustic waves, Thickness extensional modes, Accoustic energy-trapping, Inverted -mesastructures, Clean room microfabrication, Oscillateurs, Resonateurs capacitifs, Excitation électrostatique, Ondes élastiques de volume, Mode d'extension compréssion, Energie piégée, Structure mesa / mesa -inversée, Microfabrication salle blanche, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics

Relation: NNT: 2016BESA2088; tel-02466459; https://theses.hal.science/tel-02466459; https://theses.hal.science/tel-02466459/document; https://theses.hal.science/tel-02466459/file/these_A_BELKADI_Nesrine_2016.pdf

الاتاحة: https://theses.hal.science/tel-02466459
https://theses.hal.science/tel-02466459/document
https://theses.hal.science/tel-02466459/file/these_A_BELKADI_Nesrine_2016.pdf

المؤلفون: Belkadi, Nesrine

المساهمون: Besançon, Dulmet, Bernard, Baron, Thomas

مصطلحات موضوعية: MEMS, Oscillateurs, Resonateurs capacitifs, Excitation électrostatique, Ondes élastiques de volume, Mode d'extension compréssion, Energie piégée, Structure mesa / mesa -inversée, Microfabrication salle blanche, Ocillators, Capacitive resonators, Electriostatic transduction, Bulk acoustic waves, Thickness extensional modes, Accoustic energy-trapping, Inverted -mesastructures, Clean room microfabrication

Time: 670

Relation: http://www.theses.fr/2016BESA2088/document

الاتاحة: http://www.theses.fr/2016BESA2088/document