المؤلفون: Pingen, Katrin, Wolff, Niklas, Mohammadian, Zahra, Sandström, Per, Beuer, Susanne, von Hauff, Elizabeth, Kienle, Lorenz, Hultman, Lars, Birch, Jens, Hsiao, Ching-Lien, Hinz, Alexander M.

المساهمون: Bundesministerium f?r Bildung und Forschung, Vetenskapsr?det, Energimyndigheten, Link?pings Universitet, Deutsche Forschungsgemeinschaft, Fraunhofer-Gesellschaft, Olle Engkvists Stiftelse

المصدر: ACS Applied Materials & Interfaces ; volume 16, issue 26, page 34294-34302 ; ISSN 1944-8244 1944-8252

الاتاحة: http://dx.doi.org/10.1021/acsami.4c03112
https://pubs.acs.org/doi/pdf/10.1021/acsami.4c03112

المؤلفون: Sefa, Sandra, Espiritu, Jonathan, Ćwieka, Hanna, Greving, Imke, Flenner, Silja, Will, Olga, Beuer, Susanne, Wieland, D. C Florian, Willumeit-Römer, Regine, Zeller-Plumhoff, Berit

المصدر: Bioactive materials 30, 154 - 168 (2023). doi:10.1016/j.bioactmat.2023.07.017

مصطلحات موضوعية: info:eu-repo/classification/ddc/630

جغرافية الموضوع: DE

Relation: info:eu-repo/semantics/altIdentifier/wos/WOS:001053239200001; info:eu-repo/semantics/altIdentifier/issn/2097-1192; info:eu-repo/semantics/altIdentifier/issn/2452-199X; info:eu-repo/semantics/altIdentifier/pmid/37575877; https://bib-pubdb1.desy.de/record/589466; https://bib-pubdb1.desy.de/search?p=id:%22PUBDB-2023-05209%22

الاتاحة: https://bib-pubdb1.desy.de/record/589466
https://bib-pubdb1.desy.de/search?p=id:%22PUBDB-2023-05209%22

المؤلفون: May, Alexander, Rommel, Mathias, Beuer, Susanne, Erlbacher, Tobias

مصطلحات موضوعية: 4H-SiC, ohmic contacts, PMOS, SiC CMOS, silicon carbide, Ti/Al, Ti SiC 3 2

Relation: European Conference on Silicon Carbide and Related Materials (ECSCRM) 2021; #PLACEHOLDER_PARENT_METADATA_VALUE#; Silicon Carbide and Related Materials 2021; Intelligent Reliability 4.0; https://publica.fraunhofer.de/handle/publica/427698

الاتاحة: https://publica.fraunhofer.de/handle/publica/427698
https://doi.org/10.4028/p-36s1w4

المؤلفون: Beuer, Susanne, Rommel, Mathias

المصدر: 2024 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) ; page 01-04

الاتاحة: http://dx.doi.org/10.1109/ipfa61654.2024.10691159
http://xplorestaging.ieee.org/ielx8/10690276/10690850/10691159.pdf?arnumber=10691159

المؤلفون: Sakai, Kota, Boettcher, Norman, Szabo, Maximilian, Beuer, Susanne, Rommel, Mathias

المصدر: Diffusion and Defect Data Part B: Solid State Phenomena; August 2024, Vol. 358 Issue: 1 p133-140, 8p

المؤلفون: Lim, Minwho, Csato, Constantin, Förthner, Julietta, Rusch, Oleg, Ehrensberger, Kevin, Kupfer, Barbara, Beuer, Susanne, Oertel, Susanne, Byun, Dong-Wook, Kim, Seongjun, Koo, Sang-Mo, Shin, Hoon-Kyu, Erlbacher, Tobias

مصطلحات موضوعية: Super-Junction, MOSFET, Charge Compensation, High Energy Implantation, Energy Filter, Multi Epitaxial, TCAD simulation

Relation: International Conference on Silicon Carbide and Related Materials 2022; Key engineering materials; https://publica.fraunhofer.de/handle/publica/448928

الاتاحة: https://publica.fraunhofer.de/handle/publica/448928
https://doi.org/10.4028/p-hyy2l9

المؤلفون: Hlushko, K., Ziegelwanger, T., Reisinger, M., Todt, J., Meindlhumer, M., Beuer, Susanne, Rommel, Mathias, Greving, I., Flenner, S., Kopeček, J., Keckes, J., Detlefs, C., Yildirim, C.

مصطلحات موضوعية: Copper, Deterioration, Ductile fracture, Grain boundaries, Hardening, Microstructure, Scanning electron microscopy, Solvents, Dark field X-ray microscopy, High angle grain boundaries, Microstructural refinement, X-ray microscopy, DDC::600 Technik, Medizin, angewandte Wissenschaften::630 Landwirtschaft::631 Technik, Ausstattung, Materialien

Relation: Acta Materialia; https://publica.fraunhofer.de/handle/publica/450671

الاتاحة: https://publica.fraunhofer.de/handle/publica/450671
https://doi.org/10.1016/j.actamat.2023.118961

المؤلفون: Lim, Minwho, Rusch, Oleg, Erlbacher, Tobias, Beuer, Susanne, Rommel, Mathias, Bauer, Anton, Kim, S., Kang, M., Shin, H.-K.

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3883373f88bb77d29b7e66a3e0212364

المؤلفون: Rommel, Mathias, Rumler, Maximilian, Haas, Anke, Beuer, Susanne

مصطلحات موضوعية: focused ion beam (FIB), resistless Ga+ lithography, etch mask, dry etching, RIE, nanopatterning

Time: 670, 620, 530

وصف الملف: application/pdf

Relation: Workshop "Formation of 3D Nanostructures by Ion Beams" (FOR3NANO) 2017; Nanostrukturierte Cochleaelektroden zur elektrischen Charakterisierung sowie zur Manipulation von Zellen; 01 EZ 1001C; https://publica.fraunhofer.de/handle/publica/397010

الاتاحة: https://publica.fraunhofer.de/handle/publica/397010
https://doi.org/10.24406/publica-fhg-397010

المؤلفون: Bilbao-Guillerna, A., Eachambadi, R.T., Cadot, G.B.J., Axinte, D.A., Billingham, J., Stumpf, F., Beuer, Susanne, Rommel, Mathias

Time: 620

Relation: Journal of materials processing technology; STEEP; UNIVSEM; 316560; 280566; https://publica.fraunhofer.de/handle/publica/250303

الاتاحة: https://publica.fraunhofer.de/handle/publica/250303
https://doi.org/10.1016/j.jmatprotec.2017.10.024

المؤلفون: Veerapandian, Savita Kaliya Perumal, Beuer, Susanne, Rumler, Maximilian, Stumpf, Florian, Thomas, Keith, Pillatsch, Lex, Michler, Johannes, Frey, Lothar, Rommel, Mathias

مصطلحات موضوعية: FIB, sputter yield, swelling, SSRM, SiC

Time: 539

Relation: International Conference on Ion Beam Modification of Materials (IBMM) 2014; Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms; STEEP; UNIVSEM; 316560; 280566; https://publica.fraunhofer.de/handle/publica/241586

الاتاحة: https://publica.fraunhofer.de/handle/publica/241586
https://doi.org/10.1016/j.nimb.2015.07.079

المؤلفون: Schmitt, H., Amon, B., Beuer, Susanne, Petersen, S., Rommel, Mathias, Bauer, A.J., Ryssel, H.

مصطلحات موضوعية: UV nanoimprint lithography, residual layer thickness, UV polymer, etch resistance, electron device, MOSFET

Time: 670, 620, 530, 621

وصف الملف: application/pdf

Relation: International Conference on Micro- and Nano-Engineering (MNE) 2008; 34th International Conference on Micro- and Nano-Engineering, MNE 2008; https://publica.fraunhofer.de/handle/publica/362086

الاتاحة: https://publica.fraunhofer.de/handle/publica/362086
https://doi.org/10.1016/j.mee.2008.11.017

المؤلفون: Spoldi, G., Beuer, Susanne, Rommel, Mathias, Yanev, V., Bauer, A.J., Ryssel, H.

مصطلحات موضوعية: focused ion beam (FIB), ion implantation damage, scanning capacitance microscopy, scanning spreading resistance microscopy

Time: 670, 620, 530, 621

وصف الملف: application/pdf

Relation: International Conference on Micro- and Nano-Engineering (MNE) 2008; 34th International Conference on Micro- and Nano-Engineering, MNE 2008; https://publica.fraunhofer.de/handle/publica/362085

الاتاحة: https://publica.fraunhofer.de/handle/publica/362085
https://doi.org/10.1016/j.mee.2009.01.003

المؤلفون: Beuer, Susanne, Rommel, Mathias, Petersen, S., Amon, B., Sulzbach, T., Engl, W., Bauer, A.J., Ryssel, H.

مصطلحات موضوعية: integrated field emitter, SPM sensor, EBID carbon, Schottky barrier, tungsten, silicon carbide, inhomogeneities

Time: 670

Relation: International Conference on Micro- and Nano-Engineering (MNE) 2007; 33rd International Conference on Micro- and Nano-Engineering 2007. Proceedings; https://publica.fraunhofer.de/handle/publica/358032

الاتاحة: https://publica.fraunhofer.de/handle/publica/358032
https://doi.org/10.1016/j.mee.2008.01.048

المؤلفون: Beuer, Susanne, Yanev, V., Rommel, Mathias, Bauer, A.J., Ryssel, H.

مصطلحات موضوعية: SSRM, FIB damage, ion beam damage

Time: 670

Relation: International Vacuum Congress (IVC) 2007; International Conference on Surface Science (ICSS) 2007; International Conference on Nanoscience and Technology (ICN+T) 2007; 17th International Vacuum Congress (IVC-17), 13th International Conference on Surface Science (ICSS-13) and International Conference on Nanoscience and Technology (ICN+T) 2007. Part 5: Nanoscience; https://publica.fraunhofer.de/handle/publica/358003

الاتاحة: https://publica.fraunhofer.de/handle/publica/358003
https://doi.org/10.1088/1742-6596/100/5/052007

المؤلفون: Beuer, Susanne, Rommel, Mathias, Lehrer, C., Platzgummer, E., Kvasnica, S., Bauer, A.J., Ryssel, H.

Time: 670, 620, 530, 621

وصف الملف: application/pdf

Relation: International Conference on Micro- and Nano-Engineering (MNE) 2006; 32nd International Conference Micro- and Nano-Engineering 2007. Proceedings; https://publica.fraunhofer.de/handle/publica/354927

الاتاحة: https://publica.fraunhofer.de/handle/publica/354927
https://doi.org/10.1016/j.mee.2007.01.033

المؤلفون: Berberich, S.E., März, M., Bauer, A.J., Beuer, Susanne, Ryssel, H.

Time: 670, 620, 530

Relation: International Symposium on Power Semiconductor Devices & ICs 2006; 18th International Symposium on Power Semiconductor Devices & ICs, ISPSD 2006; https://publica.fraunhofer.de/handle/publica/353083

الاتاحة: https://publica.fraunhofer.de/handle/publica/353083

المؤلفون: Veerapandian, S.K.P., Beuer, Susanne, Rumler, Maximilian, Stumpf, Florian, Thomas, Keith, Pillatsch, L., Michler, Johannes, Frey, Lothar, Rommel, Mathias

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2042a712513076a5cfcb611bb96c5a76

المؤلفون: Beuer, Susanne, Rommel, Mathias, Rumler, Maximilian, Haas, Anke, Bauer, Anton J., Frey, Lothar

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::17fdf6fb8aa33f987656378615491f93

المؤلفون: Rommel, M, Spoldi, G., Yanev, V., Beuer, Susanne, Amon, B., Jambreck, J., Petersen, S., Bauer, A.J., Frey, L.

مصطلحات موضوعية: FIB, SPM, focused ion beam, scanning probe microscopy, FIB damage, SSRM, SCM

Time: 670, 620, 530, 533

وصف الملف: application/pdf

Relation: Journal of vacuum science and technology B. Microelectronics and nanometer structures; https://publica.fraunhofer.de/handle/publica/221628

الاتاحة: https://publica.fraunhofer.de/handle/publica/221628
https://doi.org/10.1116/1.3431085