المؤلفون: Keil, Katja, Choi, Kang-Hoon, Hohle, Christoph, Kretz, Johannes, Lutz, Tarek, Bettin, Lutz, Boettcher, Monika, Hahmann, Peter, Kliem, Karl-Heinz, Schnabel, Bernd, Irmscher, Mathias, Sailer, Holger

مصطلحات موضوعية: variable shaped beam system, isofocal dose method, MNE

Time: 620

Relation: International Conference on Micro- and Nano-Engineering (MNE) 2007; 33rd International Conference on Micro- and Nano-Engineering 2007. Proceedings; https://publica.fraunhofer.de/handle/publica/358321

الاتاحة: https://publica.fraunhofer.de/handle/publica/358321
https://doi.org/10.1016/j.mee.2008.01.042

المؤلفون: Plontke, Rainer, Bettin, Lutz, Beyer, Dirk, Butschke, Joerg, Irmscher, Mathias, Koepernik, Corinna, Leibold, Bernd, Vix, Armelle B. E., Voehringer, Peter

المصدر: SPIE Proceedings ; 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.568033
http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.568033

المؤلفون: Schatz, Thomas, Hauffe, Bertram, Dobereiner, Stefan, Bruck, Hans-Jurgen, Brendel, Bernd, Bettin, Lutz, Roth, Klaus-Dieter, Steinberg, Walter, Speckbacher, Peter, Sedlmeier, Wolfgang, Engel, Thomas, Hassler-Grohne, Wolfgang, Mirande, Werner, Bosse, Harald

المساهمون: Behringer, Uwe F. W.

المصدر: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents ; SPIE Proceedings ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.514952
http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=767799

المؤلفون: Leibold, Bernd, Butschke, Joerg, Bettin, Lutz, Beyer, Dirk, Irmscher, Mathias, Koepernik, Corinna, Plontke, Rainer, Vix, Armelle, Voehringer, Peter

المساهمون: Kimmel, Kurt R., Staud, Wolfgang

المصدر: SPIE Proceedings ; 23rd Annual BACUS Symposium on Photomask Technology ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.518037

المؤلفون: Hahmann, Peter, Bettin, Lutz, Boettcher, Monika, Denker, Ulrich, Elster, Thomas, Jahr, Steffen, Kirschstein, Ulf-Carsten, Kliem, Karl-Heinz, Schnabel, Bernd

المصدر: Microelectronic Engineering ; volume 84, issue 5-8, page 774-778 ; ISSN 0167-9317

الاتاحة: http://dx.doi.org/10.1016/j.mee.2007.01.049
https://api.elsevier.com/content/article/PII:S0167931707000299?httpAccept=text/xml
https://api.elsevier.com/content/article/PII:S0167931707000299?httpAccept=text/plain