المؤلفون: Barton, A.T., Yue, R., Anwar, S., Zhu, H., Peng, X., McDonnell, S., Lu, N., Addou, R., Colombo, L., Kim, M.J., Wallace, R.M., Hinkle, C.L.

المساهمون: NIST

المصدر: Microelectronic Engineering ; volume 147, page 306-309 ; ISSN 0167-9317

الاتاحة: http://dx.doi.org/10.1016/j.mee.2015.04.105
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