المؤلفون: Junshuai Lia, Jinxiao Wanga, Min Yina, Pingqi Gaoa, Deyan Hea, Qiang Chenb, Hajime Shiraib

المساهمون: The Pennsylvania State University CiteSeerX Archives

المصدر: http://spm.com.cn/papers/1043.pdf.

مصطلحات موضوعية: A1. Atomic force microscopy, A1. Crystal morphology, A1. Surface structure, A3. Inductively coupled plasma CVD, B2. Si films, B3. Field

وصف الملف: application/pdf

Relation: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.652.7814; http://spm.com.cn/papers/1043.pdf

الاتاحة: http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.652.7814
http://spm.com.cn/papers/1043.pdf