المؤلفون: Atuko YAMAGUCHI, Chiho KATO, Hisako KOMACHIYA, Hisayo ISHIHARA, Kiyomi MASE, Yasutoshi SHIRAI

المصدر: Abstracts of Annual Congress of The Japan Society of Home Economics. 2006, :296

المؤلفون: Atuko YAMAGUCHI, Chiho KATO, Hisako KOMACHIYA, Hisayo ISHIHARA, Kiyomi MASE, Yasutoshi SHIRAI

المصدر: Abstracts of Annual Congress of The Japan Society of Home Economics. 2006, :113

المؤلفون: Ioana Graur, Hitoshi Komuro, Yutaka Hojo, Derren N. Dunn, Marshal N. Miller, Atuko Yamaguchi, Keiichiro Hitomi, Toru Ishimoto, Shoji Hotta, Nicole Saulnier, Shunsuke Koshihara, Scott Halle, Nobuhiro Okai

المصدر: Journal of Micro/Nanolithography, MEMS, and MOEMS. 15:034002

مصطلحات موضوعية: Materials science, business.industry, Mechanical Engineering, Process (computing), 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Data modeling, 010309 optics, Optics, Optical proximity correction, Resist, 0103 physical sciences, Calibration, Correction technique, Node (circuits), Electrical and Electronic Engineering, 0210 nano-technology, business, Root-mean-square deviation

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1fbc877661149f00aa1a2c43a0e7acc1
https://doi.org/10.1117/1.jmm.15.3.034002

المؤلفون: Keiichiro Hitomi, Halle, Scott, Miller, Marshal, Graur, Ioana, Saulnier, Nicole, Dunn, Derren, Nobuhiro Okai, Shoji Hotta, Atuko Yamaguchi, Hitoshi Komuro, Toru Ishimoto, Shunsuke Koshihara, Yutaka Hojo

المصدر: Journal of Micro/Nanolithography, MEMS & MOEMS; Jul2016, Vol. 15 Issue 3, p034002-1-034002-8, 8p

مصطلحات موضوعية: PROXIMITY effect (Electron beam lithography), SCANNING electron microscopes, ROOT-mean-squares, METROLOGY, ACQUISITION of data

المؤلفون: Atuko Yamaguchi, Kazuro Murayama, Seiichi Miyazaki

المصدر: Philosophical Magazine B. 60:137-152

مصطلحات موضوعية: Fractal network, Physics, Chemical substance, Photoluminescence, Condensed matter physics, Condensed Matter::Other, General Chemical Engineering, Diffusion, Exciton, General Physics and Astronomy, Condensed Matter::Mesoscopic Systems and Quantum Hall Effect, Random walk, Molecular physics, Decay curve, Condensed Matter::Materials Science, Recombination

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1b45922035d6a5557110df3fb7415dd9
https://doi.org/10.1080/13642818908228822