المؤلفون: Shota Yoshimura, Yannick Feurprier, Yoshihide Kihara, Arnaud Dauendorffer, Tetsuya Nishizuka, Noriaki Nagamine, Kenta Ono, Takahiro Shiozawa, Shinya Morikita, Keisuke Yoshida, Kathleen Nafus, Atsutoshi Inokuchi, Satoru Shimura, Kiyoshi Maeda, Ken Kobayashi

المصدر: Advances in Patterning Materials and Processes XXXVIII.

مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Oxide, Reduction (complexity), chemistry.chemical_compound, chemistry, Resist, Etching (microfabrication), Extreme ultraviolet, Optoelectronics, Process window, business, Lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e4483d854536a268b1f80160886a5e34
https://doi.org/10.1117/12.2583772

المؤلفون: Masaki Hirayama, Hirokazu Asahara, Daiju Takamizu, Shin Saito, Atsutoshi Inokuchi, Tadahiro Ohmi, Akinobu Teramoto, Migaku Takahashi

المصدر: Thin Solid Films. 518:2953-2956

مصطلحات موضوعية: Photoluminescence, Chemistry, Doping, Inorganic chemistry, Metals and Alloys, Analytical chemistry, Surfaces and Interfaces, Chemical vapor deposition, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Lattice constant, Electrical resistivity and conductivity, Materials Chemistry, Sapphire, Metalorganic vapour phase epitaxy, Thin film

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b06b914fb31d741ba236c9d3df17ad5b
https://doi.org/10.1016/j.tsf.2009.09.195

المؤلفون: Tetsuya Goto, Tadahiro Ohmi, Seij Yasuda, Atsutoshi Inokuchi, Masayuki Kohno, Masaki Hirayama, Toshio Nakanishi, Kiyotaka Ishibashi, Masaru Sasaki, Masahiro Okesaku, Toshihisa Nozawa

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 27:686-695

مصطلحات موضوعية: Materials science, Physics::Instrumentation and Detectors, business.industry, Surfaces and Interfaces, Plasma, Condensed Matter Physics, Electromagnetic radiation, Surfaces, Coatings and Films, Optics, Physics::Plasma Physics, Sputtering, visual_art, Excited state, Electrical equipment, visual_art.visual_art_medium, Ceramic, Atomic physics, business, Excitation, Microwave

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8167c487b306112933c8e370eb1ca311
https://doi.org/10.1116/1.3143665

المؤلفون: Tadahiro Ohmi, Akinobu Teramoto, Masaki Hirayama, Atsutoshi Inokuchi, Azumi Itoh, Tetsuya Goto, Seiji Yasuda

المصدر: Japanese Journal of Applied Physics. 47:2515-2520

مصطلحات موضوعية: Physics and Astronomy (miscellaneous), Chemistry, General Engineering, Analytical chemistry, General Physics and Astronomy, Electron temperature, Plasma, Fluorocarbon, Dielectric, Porous medium, Current density, Electron cyclotron resonance, Excitation

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::54a35ccaa391bded4e6ad4d787433244
https://doi.org/10.1143/jjap.47.2515

المؤلفون: Kohei Watanuki, Hirokazu Asahara, Atsutoshi Inokuchi, Tadahiro Ohmi, Masaki Hirayama, Akinobu Teramoto

المصدر: Japanese Journal of Applied Physics. 47:2994-2998

مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), Silicon, Annealing (metallurgy), Inorganic chemistry, General Engineering, General Physics and Astronomy, chemistry.chemical_element, Zinc, Chemical vapor deposition, Epitaxy, law.invention, chemistry, Chemical engineering, law, Metalorganic vapour phase epitaxy, Crystallization, Plasma processing

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4363694fa7ff4551bea1b5facbf05556
https://doi.org/10.1143/jjap.47.2994

المؤلفون: D. Takamizu, Tadahiro Ohmi, Atsutoshi Inokuchi, Hirokazu Asahara, Masaki Hirayama, Akinobu Teramoto

المصدر: Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials.

مصطلحات موضوعية: Materials science, business.industry, law, Analytical chemistry, Optoelectronics, Metalorganic vapour phase epitaxy, Plasma, business, Microwave, Light-emitting diode, law.invention

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e038fef5e9b0ee1a9771ee0f86d14907
https://doi.org/10.7567/ssdm.2009.i-8-7

المؤلفون: Masaki Hirayama, Tadahiro Ohmi, Atsutoshi Inokuchi, Kohei Watanuki, Akinobu Teramoto, Hirokazu Asahara

المصدر: Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials.

مصطلحات موضوعية: Materials science, chemistry, Excited state, Analytical chemistry, chemistry.chemical_element, High density, Nanotechnology, Metalorganic vapour phase epitaxy, Plasma, Zinc, Ion bombardment, Microwave

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e4a414b9f3100f0ec9fe6c56ed556ee0
https://doi.org/10.7567/ssdm.2008.f-2-2

المؤلفون: Azumi Itoh, Tadahiro Ohmi, Atsutoshi Inokuchi, Tetsuya Goto, Akinobu Teramoto, Seiji Yasuda, Masaki Hirayama

المصدر: Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials.

مصطلحات موضوعية: Materials science, Inter layer, Dielectric, Fluorocarbon, Composite material, Porosity

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3e166c426c6ea62cfc6ff159645302c1
https://doi.org/10.7567/ssdm.2007.p-2-1

المؤلفون: Masaki Hirayama, Akinobu Teramoto, Kohei Watanuki, Atsutoshi Inokuchi, Hirokazu Asahara, Tadahiro Ohmi

المصدر: Extended Abstracts of the 2007 International Conference on Solid State Devices and Materials.

مصطلحات موضوعية: Materials science, chemistry, Excited state, Analytical chemistry, High density, chemistry.chemical_element, Metalorganic vapour phase epitaxy, Plasma, Zinc, Microwave, Characterization (materials science)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::195af46f1c87dfe01cef612b96bcc23a
https://doi.org/10.7567/ssdm.2007.f-2-1

المؤلفون: Shigetoshi Sugawa, Tadahiro Ohmi, Hirokazu Asahara, Atsutoshi Inokuchi, Akinobu Teramoto, Jiro Yamanaka, Tetsuya Goto, Masaki Hirayama, Masato Terasaki, Hiroshi Nakazawa

المصدر: Extended Abstracts of the 2005 International Conference on Solid State Devices and Materials.

مصطلحات موضوعية: Materials science, business.industry, Interface (computing), Doping, Nanotechnology, Plasma, Contact hole, chemistry.chemical_compound, chemistry, Etching (microfabrication), Excited state, Silicide, Optoelectronics, business, Microwave

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b80eaed024538d8bb176479ead5e0249
https://doi.org/10.7567/ssdm.2005.p1-25

المؤلفون: Kohei Watanuki, Atsutoshi Inokuchi, Tetsuya Goto, Tadahiro Ohmi, Akinori Banba, Tatsuhiko Adachi, Hirokazu Suzuki, Akinobu Teramoto, Shigetoshi Sugawa, Yasuyuki Shirai, Tadashi Koike

المصدر: Japanese Journal of Applied Physics. 49:111503

مصطلحات موضوعية: Materials science, Methyltrimethoxysilane, General Engineering, Oxide, General Physics and Astronomy, Relative permittivity, Dielectric, Metal, chemistry.chemical_compound, chemistry, Chemical engineering, visual_art, visual_art.visual_art_medium, Breakdown voltage, Current density, Sol-gel

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c6e4d347c71119051662af0d5b1e8c77
https://doi.org/10.1143/jjap.49.111503

المؤلفون: Nobuyuki Manabe, Akinobu Teramoto, Tastuhiko Adachi, Shigetoshi Sugawa, Tadashi Koike, Atsutoshi Inokuchi, Kohei Watanuki, Akinori Banba, Tetsuya Goto, Hirokazu Suzuki, Tadahiro Ohmi, Yasuyuki Shirai

المصدر: ECS Meeting Abstracts. :1498-1498

مصطلحات موضوعية: Materials science, Chromatography, Shallow trench isolation, Narrow gap, Engineering physics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3c974eab0f3560a25d8f922c2efad309
https://doi.org/10.1149/ma2010-02/22/1498

المؤلفون: Kohei Watanuki, Hirokazu Asahara, Atsutoshi Inokuchi, Takumi Kadota, Chihiro Hasegawa, Hiroki Kanato, Akinobu Teramoto, Yasuyuki Shirai, Tadahiro Ohmi

المصدر: ECS Meeting Abstracts. :703-703

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d3afd9144c1a104870d39bd4a20afcb6
https://doi.org/10.1149/ma2009-01/15/703

المؤلفون: Atsutoshi Inokuchi, Hirokazu Asahara, Akinobu Teramoto, Kohei Watanuki, Tadahiro Ohmi, Masaki Hirayama

المصدر: Japanese Journal of Applied Physics. 48:04C135

مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), Hydrogen, Thermal desorption spectroscopy, General Engineering, Analytical chemistry, General Physics and Astronomy, chemistry.chemical_element, Zinc, Chemical vapor deposition, Secondary ion mass spectrometry, Condensed Matter::Materials Science, Full width at half maximum, Crystallinity, chemistry, Metalorganic vapour phase epitaxy

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::be06fd2c6e95408266d056e0c1a6f264
https://doi.org/10.1143/jjap.48.04c135