المؤلفون: Preecha Changyom, Komgrit Leksakul, Dheerawan Boonyawan, Pongsawat Premphet, Norrapon Vichiansan

المصدر: Heliyon, Vol 9, Iss 11, Pp e22247- (2023)

مصطلحات موضوعية: Magnetron sputtering, Angular sputtering, Co-sputtering, Multilayer sputtering, Science (General), Q1-390, Social sciences (General), H1-99

وصف الملف: electronic resource

Relation: http://www.sciencedirect.com/science/article/pii/S2405844023094550; https://doaj.org/toc/2405-8440

URL الوصول: https://doaj.org/article/eb33237db2884879918004e7e121a4b2

المؤلفون: Bunn, Johnathan K., Metting, C. J., Hattrick-Simpers, Jason R.

المصدر: Faculty Publications

مصطلحات موضوعية: integrated computational materials engineering (ICME), thin film, semi-empirical approach, magnetron sputtering, yamamura's dimensionless differential angular sputtering, Chemical Engineering, Electrical and Computer Engineering, Electromagnetics and Photonics, Electronic Devices and Semiconductor Manufacturing, Engineering, Materials Science and Engineering, Metallurgy, Other Chemical Engineering

Relation: https://scholarcommons.sc.edu/eche_facpub/574; http://link.springer.com/article/10.1007%2Fs11837-014-1234-2

الاتاحة: https://scholarcommons.sc.edu/eche_facpub/574
http://link.springer.com/article/10.1007%2Fs11837-014-1234-2