المؤلفون: Van der Heijden, R. (author), Andriesse, M.S.P. (author), Carlström, C.F. (author), Van der Drift, E. (author), Geluk, E.J. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nouwens, P. (author), Siang Oei, Y. (author), De Vries, T. (author)

مصطلحات موضوعية: photonic crystal, InP, ICP etching

Relation: Proceedings of SPIE, 2004 vol. 5450--0277-786X; http://resolver.tudelft.nl/uuid:6aab8d63-494c-4ae3-9b34-59a207e51144

الاتاحة: http://resolver.tudelft.nl/uuid:6aab8d63-494c-4ae3-9b34-59a207e51144

المؤلفون: Carlström, C.F. (author), Van der Heijden, R. (author), Andriesse, M.S.P. (author), Karouta, F. (author), Van der Heijden, R.W. (author), Van der Drift, E.W.J.M. (author), Salemink, H.W.M. (author)

مصطلحات موضوعية: III-V semiconductors, indium compounds, passivation, photonic crystals, sputter etching, indium phosphide, chlorine

Relation: Journal of Vacuum Science & Technology B, 26 (5), 2008--1071-1023; http://resolver.tudelft.nl/uuid:fd13a0aa-f5bd-4187-aad0-bb532eb21635

الاتاحة: http://resolver.tudelft.nl/uuid:fd13a0aa-f5bd-4187-aad0-bb532eb21635