المؤلفون: Alexandr V. Lutzau, Alexey Yu. Trifonov, Vladimir Saraykin, Vladimir Privezentsev, Andrey A. Shemukhin, D. V. Petrov

المصدر: Solid State Phenomena. :502-508

مصطلحات موضوعية: Materials science, Silicon, Scanning electron microscope, Annealing (metallurgy), Metallurgy, Recrystallization (metallurgy), chemistry.chemical_element, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Amorphous solid, Ion, Ion implantation, Chemical engineering, chemistry, Transmission electron microscopy, General Materials Science

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::60021c54197919ee95adc4d9399d3234
https://doi.org/10.4028/www.scientific.net/ssp.205-206.502