المؤلفون: Lin Zesheng, Song Chen, Liu Tianbao, Shao Jianda, Zhu Meiping
مصطلحات موضوعية: plasma-enhanced atomic layer deposition, Al2O3 single-layer thin film, Al2O3/HfO2/SiO2 tri-layer, laser-induced damage threshold, interface defect, interface bonding performance
الاتاحة: https://doi.org/10.57760/sciencedb.08751